Capacitive micromachined ultrasonic transducer and test object information acquiring apparatus including capacitive micromachined ultrasonic transducer

Patent metadata

Field	Value
Publication number	US-10101303-B2
Application number	US-201514949482-A
Country	US
Kind code	B2
Filing date	Nov 23, 2015
Priority date	Nov 28, 2014
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

A capacitive micromachined ultrasonic transducer includes a first insulating film and a second insulating film disposed with a gap therebetween, a first electrode and a second electrode disposed on outer surfaces of the first and second insulating films, respectively, with the gap therebetween, at least one cell having an electrostatic capacitance between the first and second electrodes that varies with a variation of a thickness of the gap caused by displacement of the second insulating film and the second electrode, and a voltage applying unit configured to apply a voltage to between the first electrode and the second electrode. An electric field strength applied to the first insulating film is closer to an electric field strength that causes dielectric breakdown than an electric field strength applied to the second insulating film.

First claim

What is claimed is:

1. A capacitive micromachined ultrasonic transducer comprising:
a first insulating film and a second insulating film disposed with a gap therebetween;
a first electrode and a second electrode disposed on outer surfaces of the first and second insulating films, respectively, with the gap therebetween;
at least one cell having an electrostatic capacitance between the first and second electrodes that varies with a variation of a thickness of the gap caused by displacement of the second insulating film and the second electrode; and
a voltage applying unit configured to apply a voltage to between the first electrode and the second electrode,
wherein an electric field strength applied to the first insulating film is closer to an electric field strength that causes dielectric breakdown of the first insulating film than an electric field strength applied to the second insulating film that causes dielectric breakdown of the second insulating film,
wherein the first insulating film includes silicon oxide, and the second insulating film includes silicon nitride, and
wherein a thickness of the second insulating film is greater than or equal to 0.32×G 1.24 , where G represents the thickness of the gap.

2. The capacitive micromachined ultrasonic transducer according to claim 1 , further comprising:
an additional insulating film disposed on the second electrode,
wherein the second insulating film, the second electrode, and the additional insulating film are displaceable.

3. The capacitive micromachined ultrasonic transducer according to claim 1 , wherein the first insulating film is an insulating film having Fowler-Nordheim tunneling conduction characteristic.

4. The capacitive micromachined ultrasonic transducer according to claim 1 , wherein the second insulating film is an insulating film having Poole-Frenkel conduction characteristic.

5. The capacitive micromachined ultrasonic transducer according to claim 1 , wherein the first insulating film is formed of silicon oxide, and the second insulating film is formed of silicon nitride.

6. A test object information acquiring apparatus comprising:
an ultrasonic probe including the capacitive micromachined ultrasonic transducer according to claim 1 ;
an image processing unit;
a circuit unit configured to send and receive a signal between the ultrasonic probe and the image processing unit; and
a control unit configured to control the image processing unit and the circuit unit.

7. The capacitive micromachined ultrasonic transducer according to claim 1 , wherein the capacitive micromachined ultrasonic transducer comprises a plurality of cells each connected to the first electrode, and the cells constitute at least one element.

8. The capacitive micromachined ultrasonic transducer according to claim 7 , wherein the capacitive micromachined ultrasonic transducer comprises a plurality of elements.

9. The capacitive micromachined ultrasonic transducer according to claim 1 , wherein an electric field strength E 1 applied to the first insulating film and an electric field strength E 2 applied to the second insulating film are given as follows:
E 1= V /( t 1+ t 2×∈1/∈2), and

E 2= V /( t 2+ t 1×∈2/∈1)

where V denotes a voltage applied to between the first electrode and the second electrode, t 1 denotes the thickness of the first insulating film, t 2 denotes the thickness of the second insulating film, ∈ 1 denotes the relative permittivity of the first insulating film, and ∈ 2 denotes the relative permittivity of the second insulating film, and
wherein the following expression is satisfied:
E 1/ EX 1> E 2/ EX 2

where EX 1 denotes an electric field strength that causes dielectric breakdown of the first insulating film, and EX 2 denotes an electric field strength that causes dielectric breakdown of the second insulating film.

10. The capacitive micromachined ultrasonic transducer according to claim 1 ,
wherein a value obtained by dividing a relative permittivity of the second insulating film by a relative permittivity of the first insulating film is greater than 1.14.

Assignees

• Canon Kk

Inventors

• Kato Ayako
• Torashima Kazutoshi

Classifications

• G01N29/2406 Primary

  Electrostatic or capacitive probes, e.g. electret or cMUT-probes · CPC title

• B06B1/0292 Primary

  Electrostatic transducers, e.g. electret-type · CPC title

• H04R31/006

  Interconnection of transducer parts (of diaphragm and outer suspension by moulding H04R31/003) · CPC title

• H04R19/04

  Microphones (H04R19/01 takes precedence) · CPC title

• H04R19/005 Primary

  using semiconductor materials · CPC title