Valve, fluid control structure, fluid device and method of manufacturing valve

Patent metadata

Field	Value
Publication number	US-10100939-B2
Application number	US-201615172453-A
Country	US
Kind code	B2
Filing date	Jun 3, 2016
Priority date	Dec 6, 2013
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

A valve disposed at a flow path includes: a substrate having a first surface in which a hole having an opening section is formed; and a diaphragm member fixed to at least part of a wall surface of the hole and in which at least a central portion has a thin film shape, wherein a flow of a fluid in the flow path is controlled by deforming the diaphragm member.

First claim

What is claimed is:

1. A valve disposed at a flow path, the valve comprising:
a substrate having a first surface in which a hole having an opening section is formed; and
a diaphragm member fixed to at least a part of a wall surface of the hole and in which at least a central portion has a thin film shape, the diaphragm member configured to have a closed position at which the diaphragm member closes the flow path and an open position at which the diaphragm member opens the flow path,
wherein the first surface of the substrate faces the flow path, a first surface of the diaphragm member faces the flow path and is a plane substantially parallel to and flush with the first surface of the substrate when the diaphragm member is at the open position, and a flow of a fluid in the flow path is controlled by deforming the diaphragm member to move between the open position and the closed position.

2. The valve according to claim 1 , wherein
the first surface of the substrate is a fluid contact surface, and the diaphragm member controls the flow of the fluid in the flow path by deforming in a direction perpendicular to an axis of the flow path.

3. The valve according to claim 1 , wherein
the diaphragm member is disposed at the opening section side of the hole.

4. The valve according to claim 1 , wherein
a thickness of an outer edge section of the diaphragm member in contact with the wall surface of the hole is larger than that of the central portion of the diaphragm member.

5. The valve according to claim 1 , wherein
at least a central portion of a second surface of the diaphragm member opposite to the first surface of the diaphragm member has a recessed concave shape.

6. The valve according to claim 1 , wherein
in a cross-section in a thickness direction of the substrate,
a first side of the diaphragm member facing the flow path is a straight line substantially parallel to a first side that constitutes the first surface of the substrate, and
at least a central portion of a second side of the diaphragm member opposite to the first side of the diaphragm member has a concave shape that approaches the opposite first side.

7. The valve according to claim 1 , wherein
the diaphragm member is an elastomer.

8. The valve according to claim 1 , wherein
the hole is a through-hole,
the diaphragm member is fixed to one end side in the through-hole, and
the hole configures a space through which an external force passes from the other end side of the through-hole toward the diaphragm member.

9. The valve according to claim 1 , wherein
the hole has a step section formed to extend at the wall surface, and
the diaphragm member is fixed to at least the wall surface in a bottom surface and the wall surface of the step section.

10. The valve according to claim 1 , wherein
an inner wall surface that constitutes the opening section is expanded outward in a radial direction of the hole, and
an inner diameter of the opening section is larger than that of the hole further inside of the opening section.

11. The valve according to claim 1 , wherein
a throttling section having a lateral cross-sectional area cut in the radial direction smaller than another portion of the opening section is formed in an inner wall surface that constitutes an end portion of the opening section.

12. The valve according to claim 1 , wherein
one or more concave sections expanded outward in the radial direction of the hole are formed in an inner wall surface that constitutes the opening section,
an outer edge section of the diaphragm member is formed to extend in the concave section, and
the inner wall surface that constitutes the concave section and the outer edge section of the diaphragm member are at least partially adhered to each other.

13. The valve according to claim 12 , wherein
the plurality of concave sections are formed, and each of the concave sections is disposed point-symmetrically with respect to each other about the hole.

14. The valve according to claim 12 , wherein
the plurality of concave sections are formed, an end portion facing the first surface of the substrate in a partition wall that separates the neighboring concave sections is disposed further inside than the first surface of the substrate, and the neighboring concave sections are spatially connected to each other in the vicinity of the end portion of the partition wall.

15. The valve according to claim 1 , wherein
an expansion section in which an end portion of an inner wall surface that constitutes the opening section is expanded outward in the radial direction of the hole is formed,
a longitudinal hole section in which at least a part of the expansion section except for a peripheral edge portion of the hole enters further inside the substrate than the peripheral edge portion is formed,
the outer edge section of the diaphragm member is formed to extend in the longitudinal hole section, and
the inner wall surface that constitutes the opening section and the outer edge section of the diaphragm member are at least partially adhered to each other.

16. The valve according to claim 15 , wherein
a first end portion of the longitudinal hole section is opened at the expansion section, and a second end portion of the longitudinal hole section is freely exposed to the atmosphere.

17. The valve according to claim 1 , wherein
at least a central portion of the diaphragm member is exposed to the first surface of the substrate and is disposed at an area that constitutes the flow path.

Assignees

• Univ Tokyo
• Nikon Corp

Inventors

• Ichiki Takanori
• Kobayashi Masashi
• TERANE Shotaro
• Suzuki Kuno

Classifications

• F16K7/126

  the seat being formed on a rib perpendicular to the fluid line · CPC title

• F16K2099/0078

  using moulding or stamping · CPC title

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• B23P15/001

  valves or valve housings (welding B23K; valve housings per se F16K) · CPC title

• F16K7/17

  the diaphragm being actuated by fluid pressure · CPC title