Compact mass spectrometer

Patent metadata

Field	Value
Publication number	US-10096458-B2
Application number	US-201414892344-A
Country	US
Kind code	B2
Filing date	May 29, 2014
Priority date	May 31, 2013
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

A miniature mass spectrometer is disclosed comprising an atmospheric pressure ionization source, a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of the first vacuum chamber and a third vacuum chamber located downstream of the second vacuum chamber. A first vacuum pump is arranged and adapted to pump the first vacuum chamber, wherein the first vacuum pump is arranged and adapted to maintain the first vacuum chamber at a pressure <10 mbar. A first RF ion guide is located within the first vacuum chamber and an ion detector is located in the third vacuum chamber. The ion path length from the atmospheric pressure sampling orifice or capillary to an ion detecting surface of the ion detector is ≤400 mm. The mass spectrometer further comprises a tandem quadrupole mass analyzer, a 3D ion trap mass analyzer, a 2D or linear ion trap mass analyzer, a Time of Flight mass analyzer, a quadrupole-Time of Flight mass analyzer or an electrostatic mass analyzer arranged in the third vacuum chamber. A split flow turbomolecular vacuum pump comprising an intermediate or interstage port is connected to the second vacuum chamber and a high vacuum (“HV”) port is connected to the third vacuum chamber. The first vacuum pump is also arranged and adapted to act as a backing vacuum pump to the split flow turbomolecular vacuum pump and the first vacuum pump has a maximum pumping speed ≤10 m 3 /hr (2.78 L/s).

First claim

The invention claimed is:

1. A miniature mass spectrometer comprising:
an atmospheric pressure ionisation source;
a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of said first vacuum chamber and a third vacuum chamber located downstream of said second vacuum chamber;
a first vacuum pump arranged and adapted to pump said first vacuum chamber, wherein said first vacuum pump is arranged and adapted to maintain said first vacuum chamber at a pressure <10 mbar;
a first RF ion guide located within said first vacuum chamber;
an ion detector located in said third vacuum chamber;
wherein the ion path length from said atmospheric pressure sampling orifice or capillary to an ion detecting surface of said ion detector is ≤400 mm;
wherein said mass spectrometer further comprises:
a tandem quadrupole mass analyser, a 3D ion trap mass analyser, a 2D or linear ion trap mass analyser, a Time of Flight mass analyser, a quadrupole-Time of Flight mass analyser or an electrostatic mass analyser arranged in said third vacuum chamber; and
a split flow turbomolecular vacuum pump comprising an intermediate or interstage port connected to said second vacuum chamber and a high vacuum (“HV”) port connected to said third vacuum chamber;
wherein said first vacuum pump is also arranged and adapted to act as a backing vacuum pump to said split flow turbomolecular vacuum pump; and
wherein said first vacuum pump has a maximum pumping speed ≤10 m 3 /hr (2.78 L/s).

2. A miniature mass spectrometer comprising:
an atmospheric pressure ionisation source;
a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of said first vacuum chamber, a third vacuum chamber located downstream of said second vacuum chamber and a fourth vacuum chamber located downstream of said third vacuum chamber;
a first vacuum pump arranged and adapted to pump said first vacuum chamber, wherein said first vacuum pump is arranged and adapted to maintain said first vacuum chamber at a pressure <10 mbar;
a first RF ion guide located within said first vacuum chamber;
an ion detector located in said fourth vacuum chamber;
wherein the ion path length from said atmospheric pressure sampling orifice or capillary to an ion detecting surface of said ion detector is ≤400 mm;
wherein said mass spectrometer further comprises:
a tandem quadrupole mass analyser, a 3D ion trap mass analyser, a 2D or linear ion trap mass analyser, a Time of Flight mass analyser, a quadrupole-Time of Flight mass analyser or an electrostatic mass analyser arranged in said third vacuum chamber and/or said fourth vacuum chamber; and
a split flow turbomolecular vacuum pump comprising an intermediate or interstage port connected to said second vacuum chamber, an intermediate or interstage port connected to said third vacuum chamber and a high vacuum (“HV”) port connected to said fourth vacuum chamber;
wherein said first vacuum pump is also arranged and adapted to act as a backing vacuum pump to said split flow turbomolecular vacuum pump; and
wherein said first vacuum pump has a maximum pumping speed ≤10 m 3 /hr (2.78 L/s).

3. A miniature mass spectrometer as claimed in claim 2 , wherein a quadrupole mass filter is arranged in said third vacuum chamber.

4. A miniature mass spectrometer as claimed in claim 2 , wherein a Time of Flight mass analyser is arranged in said fourth vacuum chamber.

5. A miniature mass spectrometer as claimed in claim 1 , wherein said first vacuum pump comprises a rotary vane vacuum pump or a diaphragm vacuum pump.

6. A miniature mass spectrometer as claimed in claim 1 , wherein the total internal volume of said first, second and third vacuum chambers is ≤2000 cm 3 .

7. A miniature mass spectrometer as claimed in claim 1 , wherein said first RF ion guide comprises a dual conjoined stacked ring ion guide.

8. A miniature mass spectrometer as claimed in claim 1 , wherein said first RF ion guide comprises a multipole ion guide, a stacked ring ion guide or an ion funnel ion guide.

9. A miniature mass spectrometer as claimed in claim 1 , wherein said first RF ion guide has a length <120 mm.

10. A miniature mass spectrometer as claimed in claim 1 , wherein said atmospheric pressure sampling orifice or capillary has a diameter ≤0.3 mm.

11. A miniature mass spectrometer as claimed in claim 1 , wherein the product of the pressure P 1 in the vicinity of said first RF ion guide and the length L 1 of said first RF ion guide is in the range 10-100 mbar-cm.

12. A miniature mass spectrometer as claimed in claim 1 , further comprising a second RF ion guide located in said second vacuum chamber.

13. A miniature mass spectrometer as claimed in claim 12 , wherein said second RF ion guide comprises a dual conjoined stacked ring ion guide, a multipole ion guide, a stacked ring ion guide or an ion funnel ion guide.

14. A miniature mass spectrometer as claimed in claim 12 , wherein the product of the pressure P 2 in the vicinity of said second RF ion guide and the length L 2 of said second RF ion guide is in the range 0.05-0.3 mbar-cm.

15. A miniature mass spectrometer as claimed in claim 1 , further comprising a differential pumping aperture or orifice between said first vacuum chamber and said second vacuum chamber, wherein said differential pumping aperture or orifice between said first vacuum chamber and said second vacuum chamber has a diameter ≤1.5 mm.

16. A miniature mass spectrometer as claimed in claim 1 , wherein said second vacuum chamber is arranged to be maintained at pressure in the range 0.001-0.1 mbar.

17. A miniature mass spectrometer as claimed in claim 1 , further comprising a differential pumping aperture or orifice between said second vacuum chamber and said third vacuum chamber, wherein said differential pumping aperture or orifice between said second vacuum chamber and said third vacuum chamber has a diameter ≤2.0 mm.

18. A miniature mass spectrometer as claimed in claim 1 , wherein said third vacuum chamber is arranged to be maintained at pressure <0.0003 mbar.

19. A method of mass spectrometry comprising:
providing a miniature mass spectrometer comprising an atmospheric pressure ionisation source, a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of said first vacuum chamber and a third vacuum chamber located downstream of said second vacuum chamber, a first vacuum pump arranged and adapted to pump said first vacuum chamber,
a first RF ion guide located within said first vacuum chamber, an ion detector located in said third vacuum chamber, a split flow turbomolecular vacuum pump comprising an intermediate or interstage port connected to said second vacuum chamber and a high vacuum (“HV”) port connected to said third vacuum chamber, wherein the ion path length from said atmospheric pressure sampling orifice or capillary to an ion detecting surface of said ion detector is ≤400 mm, wherein said first vacuum pump is also arranged and adapted to act as a backing vacuum pump to said split flow turbomolecular vacuum pump and wherein said first vacuum pump has a maximum pumping speed ≤10 m 3 /hr (2.78 L/s);
providing a tandem quadrupole mass analyser, a 3D ion trap mass analyser, a 2D or linear ion trap mass analyser, a Time of Flight mass analyser, a quadrupole-Time of Flight mass analyser or an electrostatic mass analyser in said third vacuum chamber;
operating said first

Assignees

• Micromass Ltd

Inventors

• Gordon David
• Kenny Daniel James

Classifications

• H01J49/0013

  Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components · CPC title

• H01J49/24 Primary

  Vacuum systems, e.g. maintaining desired pressures · CPC title

• H01J49/062

  Ion guides (linear ion traps performing mass selection H01J49/4225, mass filters H01J49/421) · CPC title