Semiconductor detector, radiation detector and radiation detection apparatus

Patent metadata

Field	Value
Publication number	US-10094939-B2
Application number	US-201615388254-A
Country	US
Kind code	B2
Filing date	Dec 22, 2016
Priority date	Dec 24, 2015
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

A semiconductor detector for detecting radiation comprises a first semiconductor part in which an electron and a hole are generated by incident radiation; a signal output electrode outputting a signal base on the electron or the hole; and a gettering part gettering impurities in the first semiconductor part. In addition, the semiconductor detector further comprises a second semiconductor part doped with a type of dopant impurities and having dopant impurity concentration higher than that of the first semiconductor part. The second semiconductor part is in contact with the first semiconductor part. The gettering part is in contact with the second semiconductor part and not in contact with the first semiconductor part.

First claim

What is claimed is:

1. A semiconductor detector for detecting radiation, comprising:
a first semiconductor part in which an electron and a hole are generated by incident radiation;
a signal output electrode outputting a signal based on the electron or the hole;
a gettering part gettering impurities in the first semiconductor part; and
a second semiconductor part doped with a type of dopant impurities and having dopant impurity concentration higher than dopant impurity concentration of the first semiconductor part, wherein
the second semiconductor part is in contact with the first semiconductor part,
the gettering part is in contact with the second semiconductor part and not in contact with the first semiconductor part,
one of the first semiconductor part and the second semiconductor part includes a constituent composed of n-type silicon and the other of the first semiconductor part and the second semiconductor part includes a constituent composed of p-type silicon, and
the gettering part includes n-type polysilicon.

2. The semiconductor detector according to claim 1 , wherein
the first semiconductor part has a plate-like shape,
the second semiconductor part is located at one surface of the first semiconductor part,
the other surface of the first semiconductor part is an entrance surface for incident radiation, and
the gettering part is located on the second semiconductor part.

3. The semiconductor detector according to claim 2 , wherein
the second semiconductor part is formed with multiple curved elements.

4. A radiation detector, comprising:
the semiconductor detector according to claim 1 ;
a circuit board on which the semiconductor detector is mounted; and
a base plate holding the semiconductor detector and the circuit board.

5. A radiation detection apparatus, comprising:
the semiconductor detector according to claim 1 detecting radiation;
an output part outputting a signal corresponding to energy of radiation detected by the semiconductor detector; and
a spectrum generation part generating a spectrum of the radiation based on the signal output by the output part.

6. A radiation detection apparatus detecting radiation generated from a sample irradiated with radiation, comprising:
an irradiation part irradiating a sample with radiation;
the semiconductor detector according to claim 1 detecting radiation generated from the sample;
an output part outputting a signal corresponding to energy of radiation detected by the semiconductor detector;
a spectrum generation part generating a spectrum of the radiation based on the signal output by the output part; and
a display part displaying the spectrum generated by the spectrum generation part.

Assignees

• Fond Bruno Kessler
• Horiba Ltd

Inventors

• Picciotto Antonino
• Bellutti Pierluigi
• Boscardin Maurizio
• Zorzi Nicola
• Matsunaga Daisuke

Classifications

• G01T1/366 Primary

  with semi-conductor detectors · CPC title

• G01T1/247

  Detector read-out circuitry (for processing gain or off-set correction H04N) · CPC title

• H01L31/118

  Electricity · mapped topic

• H01L31/115

  Electricity · mapped topic

• G01T1/24 Primary

  with semiconductor detectors · CPC title