Liquid deposition photolithography
US-9034568-B2 · May 19, 2015 · US
US10093064B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10093064-B2 |
| Application number | US-201514937151-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 10, 2015 |
| Priority date | Feb 12, 2013 |
| Publication date | Oct 9, 2018 |
| Grant date | Oct 9, 2018 |
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A method of forming a three-dimensional object, is carried out by (a) providing a carrier and a build plate, the build plate comprising a semipermeable member, the semipermeable member comprising a build surface with the build surface and the carrier defining a build region therebetween, and with the build surface in fluid communication by way of the semipermeable member with a source of polymerization inhibitor; (b) filling the build region with a polymerizable liquid, the polymerizable liquid contacting the build surface, (c) irradiating the build region through the build plate to produce a solid polymerized region in the build region, while forming or maintaining a liquid film release layer comprised of the polymerizable liquid formed between the solid polymerized region and the build surface, wherein the polymerization of which liquid film is inhibited by the polymerization inhibitor; and (d) advancing the carrier with the polymerized region adhered thereto away from the build surface on the build plate to create a subsequent build region between the polymerized region and the build surface while concurrently filling the subsequent build region with polymerizable liquid as in step (b). Apparatus for carrying out the method is also described.
Opening claim text (preview).
That which is claimed is: 1. A method of forming a three-dimensional object, comprising the steps of: (a) providing a carrier and a build plate, said build plate comprising a semipermeable member, said semipermeable member comprising a build surface with said build surface and said carrier defining a build region therebetween, and with said build surface in fluid communication by way of the semipermeable member with a source of polymerization inhibitor; (b) filling said build region with a polymerizable liquid, said polymerizable liquid contacting said build surface, (c) irradiating said build region through said build plate to produce a solid polymerized region in said build region, while forming or maintaining a liquid film release layer comprised of said polymerizable liquid formed between said solid polymerized region and said build surface, wherein the polymerization of which liquid film is inhibited by said polymerization inhibitor; and (d) advancing said carrier with said polymerized region adhered thereto away from said build surface on said build plate to create a subsequent build region between said polymerized region and said build surface while concurrently filling said subsequent build region with polymerizable liquid as in step (b), (e) continuing and/or repeating steps (c) and (d) to continuously produce in a layerless manner a subsequent polymerized region adhered to a previous polymerized region until the continued or repeated deposition of polymerized regions adhered to one another forms said three-dimensional object; wherein said build plate is stationary, and wherein said polymerizable liquid comprises a free radical polymerizable liquid, said inhibitor comprises oxygen, and step (c) is carried out by irradiating said build region with light. 2. The method of claim 1 , wherein steps (c) and (d) are carried out concurrently. 3. The method of claim 1 , wherein the source of polymerization inhibitor is a reservoir of polymerization inhibitor within the semipermeable member. 4. A method of forming a three-dimensional object, comprising the steps of: (a) providing a carrier and a build plate, said build plate comprising a semipermeable member, said semipermeable member comprising a build surface with said build surface and said carrier defining a build region therebetween, and with said build surface in fluid communication by way of the semipermeable member with a source of polymerization inhibitor; (b) filling said build region with a polymerizable liquid, said polymerizable liquid contacting said build surface, (c) irradiating said build region through said build plate to produce a solid polymerized region in said build region, while forming or maintaining a liquid film release layer comprised of said polymerizable liquid between said solid polymerized region and said build surface, the polymerization of which liquid film is inhibited by said polymerization inhibitor; and (d) advancing said carrier with said polymerized region adhered thereto away from said build surface on said build plate to create a subsequent build region between said polymerized region and said build surface while concurrently filling said subsequent build region with polymerizable liquid as in step (b), (e) continuing and/or repeating steps (c) and (d) to continuously produce in a layerless manner a subsequent polymerized region adhered to a previous polymerized region until the continued or repeated deposition of polymerized regions adhered to one another forms said three-dimensional object; wherein said build plate is stationary, wherein the semipermeable member further comprises a feed surface separate from said build surface, and wherein said polymerizable liquid comprises a free radical polymerizable liquid, said inhibitor comprises oxygen, and step (c) is carried out by irradiating said build region with light. 5. The method of claim 4 , wherein the feed surface is in fluid contact with a polymerization inhibitor so as to provide said source of polymerization inhibitor. 6. The method of claim 1 , further comprising heating said polymerizable liquid to reduce the viscosity thereof in said build region. 7. The method of claim 1 , further comprising cooling said polymerizable liquid in said build region to dissipate heat generated by polymerization reactions. 8. The method of claim 1 , wherein said advancing step or steps is/are carried out at a cumulative rate of at least 10 microns per second. 9. The method of claim 8 , wherein excess polymerizable liquid is supplied to said build region, removed or drained therefrom to cool said build region, and then optionally recirculated back to said build region. 10. The method of claim 1 , wherein said carrier has a soluble sacrificial layer thereon, and said three-dimensional object is formed on said soluble sacrificial layer. 11. The method of claim 1 , wherein: the total surface area of the build region occupies at least seventy percent of the total surface area of the build surface; and/or wherein lateral movement of the carrier and object in any direction is not more than thirty percent of the width of said build region in the corresponding direction. 12. A method of forming a three-dimensional object, comprising the steps of: (a) providing a carrier and a build plate, said build plate comprising a semipermeable member, said semipermeable member comprising a build surface with said build surface and said carrier defining a build region therebetween, and with said build surface in fluid communication by way of the semipermeable member with a source of polymerization inhibitor; (b) filling said build region with a polymerizable liquid, said polymerizable liquid contacting said build surface, (c) irradiating said build region through said build plate to produce a solid polymerized region in said build region, while forming or maintaining a liquid film release layer comprised of said polymerizable liquid between said solid polymerized region and said build surface, the polymerization of which liquid film is inhibited by said polymerization inhibitor; and (d) advancing said carrier with said polymerized region adhered thereto away from said build surface on said build plate to create a subsequent build region between said polymerized region and said build surface while concurrently filling said subsequent build region with polymerizable liquid as in step (b), wherein said build plate is stationary, said method further comprising the steps of: monitoring or detecting at least one process parameter and/or providing at least one known or predetermined process parameter; and then altering at least one process condition in response to said monitored process parameter or known process parameter, wherein said polymerizable liquid comprises a free radical polymerizable liquid, said inhibitor comprises oxygen, and step (c) is carried out by irradiating said build region with light. 13. The method of claim 1 , wherein the carrier with said polymerized region adhered thereto is unidirectionally advanced away from said build surface on said stationary build plate. 14. The method of claim 1 , wherein said semipermeable member comprises a flexible polymer film, and said build plate further comprises a tensioning member connected to said polymer film and to fix and rigidify the film. 15. The method of any claim 1 , wherein said semipermeable member comprises: (i) a polymer film layer having a top surface positioned for contacting said polymerizable liquid and a bottom surface, and (ii) a rigid, gas permeable, optically transparent supporting member contacting said film l
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