Laser irradiation apparatus

Patent metadata

Field	Value
Publication number	US-10092979-B2
Application number	US-201815962664-A
Country	US
Kind code	B2
Filing date	Apr 25, 2018
Priority date	Dec 25, 2015
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

A laser irradiation apparatus may include: an irradiation head section including first and second irradiation heads each configured to perform laser light irradiation on a workpiece; a laser unit section including first and second laser units configured to respectively output first laser light and second laser light; a beam delivery section provided in an optical path between the laser unit section and the irradiation head section, and configured to perform switching of optical paths between optical paths of the first laser light and the second laser light to cause the first or second laser light to enter the first or second irradiation head; a first beam property varying section provided in an optical path between the first laser unit and the irradiation head section; and a second beam property varying section provided in an optical path between the second laser unit and the irradiation head section.

First claim

What is claimed is:

1. A laser irradiation apparatus, comprising:
an irradiation head section including a first irradiation head and a second irradiation head each configured to perform laser light irradiation on a workpiece;
a laser unit section including a first laser unit configured to output first laser light and a second laser unit configured to output second laser light;
a beam delivery section provided in an optical path between the laser unit section and the irradiation head section, and configured to perform switching of optical paths between an optical path of the first laser light and an optical path of the second laser light to cause one of the first laser light and the second laser light to enter one of the first irradiation head and the second irradiation head;
a first beam property varying section provided in an optical path between the first laser unit and the irradiation head section, and configured to vary a beam property of one of the first laser light and the second laser light in response to the switching of the optical paths by the beam delivery section; and
a second beam property varying section provided in an optical path between the second laser unit and the irradiation head section, and configured to vary a beam property of one of the first laser light and the second laser light in response to the switching of the optical paths by the beam delivery section.

2. The laser irradiation apparatus according to claim 1 , wherein the first beam property varying section comprises a first optical path length varying section configured to vary an optical path length of the first laser light to cause a first optical path length to be substantially equal to a second optical path length, the first optical path length being an optical path length between the first laser unit and the first irradiation head upon the switching of the optical paths to cause the first laser light to enter the first irradiation head, the second optical path length being an optical path length between the first laser unit and the second irradiation head upon the switching of the optical paths to cause the first laser light to enter the second irradiation head.

3. The laser irradiation apparatus according to claim 1 , wherein the second beam property varying section comprises a second optical path length varying section configured to vary an optical path length of the second laser light to cause a first optical path length to be substantially equal to a second optical path length, the first optical path length being an optical path length between the second laser unit and the second irradiation head upon the switching of the optical paths to cause the second laser light to enter the second irradiation head, the second optical path length being an optical path length between the second laser unit and the first irradiation head upon the switching of the optical paths to cause the second laser light to enter the first irradiation head.

4. The laser irradiation apparatus according to claim 1 , wherein the first beam property varying section comprises a first transfer optical system configured to vary the beam property of the first laser light to cause a first beam size and a first beam divergence angle to be respectively substantially equal to a second beam size and a second beam divergence angle, the first beam size and the first beam divergence angle being respectively a beam size and a beam divergence angle of the first laser light upon the switching of the optical paths to cause the first laser light to enter the first irradiation head, the second beam size and the second beam divergence angle being respectively a beam size and a beam divergence angle of the first laser light upon the switching of the optical paths to cause the first laser light to enter the second irradiation head.

5. The laser irradiation apparatus according to claim 1 , wherein the second beam property varying section comprises a second transfer optical system configured to vary the beam property of the second laser light to cause a first beam size and a first beam divergence angle to be respectively substantially equal to a second beam size and a second beam divergence angle, the first beam size and the first beam divergence angle being respectively a beam size and a beam divergence angle of the second laser light upon the switching of the optical paths to cause the second laser light to enter the second irradiation head, the second beam size and the second beam divergence angle being respectively a beam size and a beam divergence angle of the second laser light upon the switching of the optical paths to cause the second laser light to enter the first irradiation head.

6. The laser irradiation apparatus according to claim 1 , further comprising a controller configured to control the beam delivery section to perform the switching of the optical paths on condition that one of the first laser unit and the second laser unit comes to be inoperable.

7. The laser irradiation apparatus according to claim 6 , wherein
the controller controls the beam delivery section to cause, on condition that the first laser unit and the second laser unit are both operable, the first laser light to enter the first irradiation head and the second laser light to enter the second irradiation head, and
the controller controls the beam delivery section to cause, on condition that one of the first laser unit and the second laser unit is inoperable, one of the first laser light output from the operable first laser unit and the second laser light output from the operable second laser unit to enter one of the first irradiation head and the second irradiation head and then enter the other of the first irradiation head and the second irradiation head.

8. The laser irradiation apparatus according to claim 7 , wherein the controller controls, on the condition that one of the first laser unit and the second laser unit comes to be inoperable and in response to the switching of the optical paths, one of the first beam property varying section and the second beam property varying section to vary the beam property of one of the first laser light output from the operable first laser unit and the second laser light output from the operable second laser unit.

9. The laser irradiation apparatus according to claim 6 , wherein, on the condition that one of the first laser unit and the second laser unit comes to be inoperable, the inoperable one outputs, to the controller, a predetermined signal denoting operation halt.

Assignees

• Gigaphoton Inc

Inventors

• Suzuki Akiyoshi
• Taniyama Minoru
• Wakabayashi Osamu

Classifications

• B23K26/10 Primary

  using a fixed support {, i.e. involving moving the laser beam} · CPC title

• H01S3/0071

  Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title

• B23K26/0622

  by shaping pulses · CPC title

• B23K26/046

  Automatically focusing the laser beam · CPC title

• H01S3/2383

  Parallel arrangements · CPC title