Gas mixture control in a gas discharge light source

Patent metadata

Field	Value
Publication number	US-10090629-B2
Application number	US-201715495455-A
Country	US
Kind code	B2
Filing date	Apr 24, 2017
Priority date	Jan 8, 2016
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A gas discharge light source includes a gas discharge system that includes one or more gas discharge chambers. Each of the gas discharge chambers in the gas discharge system is filled with a respective gas mixture. For each gas discharge chamber, a pulsed energy is supplied to the respective gas mixture by activating its associated energy source to thereby produce a pulsed amplified light beam from the gas discharge chamber. One or more properties of the gas discharge system are determined. A gas maintenance scheme is selected from among a plurality of possible schemes based on the determined one or more properties of the gas discharge system. The selected gas maintenance scheme is applied to the gas discharge system. A gas maintenance scheme includes one or more parameters related to adding one or more supplemental gas mixtures to the gas discharge chambers of the gas discharge system.

First claim

What is claimed is:

1. A method of operating a gas discharge light source comprising a gas discharge system that includes one or more gas discharge chambers, each gas discharge chamber housing an energy source, the method comprising:
filling each of the gas discharge chambers in the gas discharge system with a respective gas mixture;
for each gas discharge chamber, supplying a pulsed energy to the respective gas mixture by activating its energy source to thereby produce a pulsed amplified light beam from the gas discharge chamber;
applying a conservation gas maintenance scheme to the gas discharge system, wherein the conservation gas maintenance scheme is one that conserves a component gas while still maintaining suitable output parameters for the pulsed amplified light beam;
monitoring one or more operating characteristics of the gas discharge light source while the conservation gas maintenance scheme is applied to the gas discharge system;
determining whether any of the one or more monitored operating characteristics will be out of an acceptable range at a future time; and
if it is determined that any of the one or more monitored operating characteristics would be out of an acceptable range at the future time, then switching from the conservation gas maintenance scheme to a restore gas maintenance scheme and applying the restore gas maintenance scheme to the gas discharge system by increasing a relative amount of the component gas in the gas mixture of at least one of the gas discharge chambers.

2. The method of claim 1 , wherein the component gas includes a buffer gas.

3. The method of claim 1 , wherein increasing a relative amount of the component gas in the gas mixture of at least one of the gas discharge chambers comprises applying a restore gas injection scheme to the at least one gas discharge chamber.

4. The method of claim 3 , wherein applying the restore injection scheme comprises one or more of:
increasing a temporal frequency at which an injection of the component gas is performed, and
pumping more component gas into the gas mixture of the at least one gas discharge chamber than was pumped before it was determined that any of the one or more monitored operating characteristics will be out of an acceptable range.

5. The method of claim 1 , wherein monitoring one or more operating characteristics of the gas discharge light source comprises monitoring one or more of:
a pulsed energy that is supplied to the gas mixture of at least one of the gas discharge chambers; and
an energy of the pulsed amplified light beam output from at least one of the gas discharge chambers.

6. The method of claim 5 , wherein monitoring one or more operating characteristics comprises measuring one or more of the following characteristics of the gas discharge light source:
a change in the pulsed energy supplied to the gas mixture of at least one of the gas discharge chambers over time; and
a change in the energy of the pulsed amplified light beam output from at least one of the gas discharge chambers over time.

7. The method of claim 1 , wherein:
monitoring one or more operating characteristics of the gas discharge light source comprises calculating values of the operating characteristics, and
determining whether any of the one or more monitored operating characteristics will be out of the acceptable range at a future time comprises determining whether any of the calculated values of the operating characteristics will be out of the acceptable range at a future time.

8. The method of claim 7 , wherein calculating values of the operating characteristics comprises calculating average values of the operating characteristics.

9. The method of claim 1 , wherein increasing a relative amount of the component gas in the gas mixture of at least one of the gas discharge chambers comprises applying a refill scheme to the at least one gas discharge chamber, the refill scheme comprising: purging the gas mixture from the at least one gas discharge chamber and filling the at least one gas discharge chamber with a fresh gas mixture that includes the component gas.

10. The method of claim 1 , wherein determining whether any of the one or more monitored operating characteristics will be out of the acceptable range at a future time comprises determining whether any of the one or more monitored operating characteristics is likely to be out of the acceptable range at a future time.

11. The method of claim 1 , wherein determining whether any of the one or more monitored operating characteristics will be out of the acceptable range at a future time comprises:
determining a rate of change of each of the one or more monitored operating characteristics; and
determining whether the rate of change for each of the one or more monitored operating characteristics indicates whether that monitored operating characteristic is likely to be out of the acceptable range at the future time.

12. The method of claim 1 , further comprising determining whether any of the one or more monitored operating characteristics will be out of another acceptable range at a future time, and if it is determined that any of the one or more monitored operating characteristics will be out of the other acceptable range at a future time, then applying a refill scheme to at least one gas discharge chamber, the refill scheme comprising:
purging the gas mixture from the at least one of the gas discharge chambers, and
filling the purged gas discharge chamber with fresh gas mixture that includes the component gas.

13. The method of claim 1 , wherein the one or more operating characteristics of the gas discharge light source are monitored while the pulsed amplified light beam is produced.

14. The method of claim 1 , wherein the gas discharge system comprises a first gas discharge chamber housing a first energy source and a second gas discharge chamber housing a second energy source.

15. The method of claim 14 , wherein filling each of the gas discharge chambers with a respective gas mixture comprises filling the first gas discharge chamber with a first gas mixture and filling the second gas discharge chamber with a second gas mixture.

16. The method of claim 14 , wherein applying the selected restore gas maintenance scheme to the gas discharge system comprises increasing a relative amount of the component gas in a first gas mixture of the first gas discharge chamber and increasing a relative amount of the component gas in a second gas mixture of the second gas discharge chamber.

17. The method of claim 1 , wherein filling a gas discharge chamber with the respective gas mixture comprises filling the gas discharge chamber with a mixture of a gain medium and a buffer gas.

18. The method of claim 17 , wherein filling a gas discharge chamber with the mixture of the gain medium and the buffer gas comprises filling the gas discharge chamber with a gain medium that includes a noble gas and a halogen, and a buffer gas that includes an inert gas.

19. The method of claim 18 , wherein the inert gas includes helium or neon and the component gas includes the inert gas.

20. A gas discharge light source comprising:
a gas discharge system that includes one or more gas discharge chambers, each gas discharge chamber housing an energy source and containing a gas mixture that includes a gain medium; and
a gas maintenance system comprising:
a gas supply system;
a monitoring system; and
a control system coupled to the gas supply system and to the monitoring system, and configured to:
provide a sign

Assignees

• Cymer LLC

Inventors

• Ahlawat Rahul
• Aggarwal Tanuj

Classifications

• H01S3/0971

  transversely excited (H01S3/0975 takes precedence) · CPC title

• H01S3/225

  comprising an excimer or exciplex · CPC title

• H01S3/036 Primary

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/2251

  ArF, i.e. argon fluoride is comprised for lasing around 193 nm · CPC title

• H01S3/2258

  F2, i.e. molecular fluoride is comprised for lasing around 157 nm · CPC title