Cylinder, plasma apparatus, gas laser apparatus, and method of manufacturing cylinder

Patent metadata

Field	Value
Publication number	US-10090628-B2
Application number	US-201515115649-A
Country	US
Kind code	B2
Filing date	Jan 30, 2015
Priority date	Jan 30, 2014
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

There is provided a cylinder including a first cylinder having an inner surface exposed; and a second cylinder joined to an outer surface of the first cylinder, the second cylinder containing alumina as a main component, the first cylinder containing yttrium-containing oxide as a main component.

First claim

The invention claimed is:

1. A cylinder, comprising:
a first cylinder having an inner surface exposed; and
a second cylinder joined to an outer surface of the first cylinder, the second cylinder containing alumina as a main component,
the first cylinder containing yttrium-containing oxide as a main component, and
wherein an arithmetic average roughness Ra of the inner surface of the first cylinder is smaller than an arithmetic average roughness Ra of an outer surface of the second cylinder.

2. The cylinder according to claim 1 , wherein a surface open pore ratio of the inner surface of the first cylinder is smaller than a surface open pore ratio of an outer surface of the second cylinder.

3. The cylinder according to claim 1 , wherein a thickness of the second cylinder is larger than a thickness of the first cylinder.

4. The cylinder according to claim 3 , wherein the thickness of the first cylinder is 0.5 mm or more and 1 mm or less, and the thickness of the second cylinder is 2.6 mm or more and 3.6 mm or less.

5. The cylinder according to claim 1 , wherein the first cylinder and the second cylinder are composed of a thermally-sprayed film.

6. A plasma apparatus, comprising:
the cylinder according to claim 1 ; and
electrodes disposed in an inner space of the cylinder.

7. A gas laser apparatus, comprising:
the plasma apparatus according to claim 6 ; and
a gas supply port which supplies a laser oscillation gas to the inner space of the cylinder constituting the plasma apparatus.

8. A method of manufacturing a cylinder, comprising:
preparing a rod-shaped core;
forming a first cylinder by thermally spraying yttrium-containing oxide onto an outer surface of the core;
forming a second cylinder by thermally spraying alumina onto an outer surface of the first cylinder, wherein an arithmetic average roughness Ra of the inner surface of the first cylinder is smaller than an arithmetic average roughness Ra of an outer surface of the second cylinder; and
removing the core from an assembly of the first cylinder and the second cylinder.

Assignees

• Kyocera Corp

Inventors

• Noguchi Yukio

Classifications

• H01S3/032 Primary

  for confinement of the discharge, e.g. by special features of the discharge constricting tube · CPC title

• H01S3/0305

  Selection of materials for the tube or the coatings thereon · CPC title