Organic light-emitting display apparatus and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-10090484-B1
Application number	US-201815866461-A
Country	US
Kind code	B1
Filing date	Jan 10, 2018
Priority date	Mar 10, 2017
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A method of manufacturing an organic light-emitting display apparatus includes the step of forming a first pixel electrode and a second pixel electrode on a substrate, forming a pixel-defining film on the first pixel electrode and the second pixel electrode, the pixel-defining film having an opening through which each of the first pixel electrode and the second pixel electrode is exposed, forming a first masking pattern on the pixel-defining film having a first opening portion through which the first pixel electrode is exposed, sequentially forming a first intermediate layer including a first emission layer, a first counter electrode, a first protective layer, and a first anti-decapping layer on the first pixel electrode and the first masking pattern, and removing the first masking pattern along with the first intermediate layer, the first counter electrode, the first protective layer, and the first anti-decapping layer disposed on the first masking pattern.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising the steps of:
forming a first pixel electrode and a second pixel electrode on a substrate;
forming a pixel-defining film on the first pixel electrode and the second pixel electrode, the pixel-defining film having an opening through which each of the first pixel electrode and the second pixel electrode is exposed;
forming a first masking pattern on the pixel-defining film having a first opening portion through which the first pixel electrode is exposed;
sequentially forming a first intermediate layer comprising a first emission layer, a first counter electrode, a first protective layer, and a first anti-decapping layer on the first pixel electrode and the first masking pattern; and
removing the first masking pattern along with the first intermediate layer, the first counter electrode, the first protective layer, and the first anti-decapping layer disposed on the first masking pattern.

2. The method of claim 1 , wherein the first anti-decapping layer is formed of a material comprising fluorine.

3. The method of claim 1 , wherein the first protective layer is formed of a material comprising transparent conductive oxide.

4. The method of claim 1 , wherein the first protective layer is formed to have a width greater than a width of the first counter electrode.

5. The method of claim 4 , wherein the first protective layer is formed to have an end portion directly contacting the pixel-defining film.

6. The method of claim 1 , wherein the first masking pattern comprises a material other than fluorine.

7. The method of claim 1 , wherein the first masking pattern is formed using a photolithography process.

8. The method of claim 1 , wherein the first intermediate layer is formed using a deposition process.

9. The method of claim 1 , wherein the first anti-decapping layer is formed to have a width greater than a width of the first protective layer.

10. The method of claim 1 , the method further comprising the steps of:
forming a second masking pattern on the first anti-decapping layer and the pixel-defining film, the second masking pattern having a second opening portion through which the second pixel electrode is exposed;
sequentially forming a second intermediate layer comprising a second emission layer, a second counter electrode, a second protective layer, and a second anti-decapping layer on the second pixel electrode and the second masking pattern; and
removing the second masking pattern along with the second intermediate layer, the second counter electrode, the second protective layer, and the second anti-decapping layer disposed on the second masking pattern.

11. The method of claim 10 , the method further comprising the steps of:
respectively forming through-holes in the first anti-decapping layer and the second anti-decapping layer; and
forming a connection layer on the first anti-decapping layer and the second anti-decapping layer to cover the first anti-decapping layer and the second anti-decapping layer.

12. The method of claim 11 , wherein the through-holes are formed to expose top surfaces of the first protective layer and the second protective layer.

13. The method of claim 10 , the method further comprising the steps of:
removing the first anti-decapping layer and the second anti-decapping layer; and
forming a connection layer on the first protective layer and the second protective layer to cover the first protective layer and the second protective layer.

14. The method of claim 13 , wherein the first anti-decapping layer and the second anti-decapping layer are removed using plasma treatment.

15. An organic light-emitting display apparatus comprising:
a first pixel electrode and a second pixel electrode disposed on a substrate;
a pixel-defining film disposed on the first pixel electrode and the second pixel electrode and having openings through which the first pixel electrode and the second pixel electrode are exposed;
a first intermediate layer and a second intermediate layer respectively disposed on the first pixel electrode and the second pixel electrode, the first intermediate layer and a second intermediate layer respectively comprising a first emission layer and a second emission layer;
a first counter electrode and a second counter electrode respectively disposed on the first intermediate layer and the second intermediate layer and having island-type patterns;
a first protective layer and a second protective layer respectively disposed on the first counter electrode and the second counter electrode and having island-type patterns;
a first anti-decapping layer and a second anti-decapping layer respectively disposed on the first protective layer and the second protective layer; and
a connection layer disposed on the first anti-decapping layer and the second anti-decapping layer and electrically connected to the first counter electrode and the second counter electrode.

16. The organic light-emitting display apparatus of claim 15 , wherein each of the first anti-decapping layer and the second anti-decapping layer comprises fluorine.

17. The organic light-emitting display apparatus of claim 15 , wherein each of the first protective layer and the second protective layer comprises a transparent conductive oxide.

18. The organic light-emitting display apparatus of claim 15 , wherein the first protective layer has a width greater than a width of the first counter electrode, and the second protective layer has a width greater than a width of the second counter electrode.

19. The organic light-emitting display apparatus of claim 18 , wherein an end portion of each of the first protective layer and the second protective layer directly contacts the pixel-defining film.

20. The organic light-emitting display apparatus of claim 15 , wherein the first anti-decapping layer and the second anti-decapping layer have island-type patterns covering the first protective layer and the second protective layer.

21. The organic light-emitting display apparatus of claim 20 , wherein the first anti-decapping layer and the second anti-decapping layer have through-holes through which top surfaces of the first protective layer and the second protective layer are exposed,
wherein the first protective layer and the second protective layer directly contact the connection layer through the through-holes.

22. The organic light-emitting display apparatus of claim 20 , wherein the first anti-decapping layer has a width greater than a width of the first protective layer, and the second anti-decapping layer has a width greater than a width of the second protective layer.

23. The organic light-emitting display apparatus of claim 15 , wherein the first anti-decapping layer and the second anti-decapping layer are disposed on the first protective layer and the second protective layer, and each comprises distributed particles.

24. The organic light-emitting display apparatus of claim 23 , wherein the first protective layer and the second protective layer directly contact the connection layer through spaces between the distributed particles of the first anti-decapping layer and the second anti-decapping layer.

25. The organic light-emitting display apparatus of claim 15 , wherein the connection layer integrally covers the first protective layer and the second protective layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Kwon Younggil
• Choung Jiyoung
• Lee Seul
• Choi Jinbaek

Classifications

• C23C14/042

  using masks · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• H01L27/3209

  Electricity · mapped topic

• H01L51/5203 Primary

  Electricity · mapped topic

• H10K59/805

  Electrodes · CPC title