Thin film transistor, manufacturing method thereof, and display device including the same

Patent metadata

Field	Value
Publication number	US-10090401-B2
Application number	US-201715682113-A
Country	US
Kind code	B2
Filing date	Aug 21, 2017
Priority date	Aug 22, 2016
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A thin film transistor includes a substrate, a semiconductor layer, a first insulating layer, and a gate electrode. The gate electrode overlaps the semiconductor layer. The thin film transistor includes a second insulating layer on the gate electrode, and an electrode structure on the second insulating layer. The electrode structure is connected to the gate electrode through a via hole. The thin film transistor includes a source electrode and a drain electrode passing through the first insulating layer and the second insulating layer to be connected to the semiconductor layer. The semiconductor layer includes a channel area overlapping the gate electrode, a source area connected to the source electrode, a drain area connected to the drain electrode, a lightly doped source area, and a lightly doped drain area. The electrode structure overlaps at least one of the lightly doped source area or the lightly doped drain area.

First claim

What is claimed is:

1. A thin film transistor comprising:
a substrate;
a semiconductor layer on the substrate;
a first insulating layer on the semiconductor layer;
a gate electrode on the first insulating layer, the gate electrode overlapping the semiconductor layer;
a second insulating layer on the gate electrode;
an electrode structure on the second insulating layer, the electrode structure connected to the gate electrode through at least one via hole; and
a source electrode and a drain electrode passing through the first insulating layer and the second insulating layer to be connected to the semiconductor layer,
wherein the semiconductor layer comprises:
a channel area overlapping the gate electrode;
a source area connected to the source electrode;
a drain area connected to the drain electrode;
a lightly doped source (LDS) area between the source area and the channel area; and
a lightly doped drain (LDD) area between the drain area and the channel area, and
the electrode structure overlaps at least one of the lightly doped source (LDS) area or the lightly doped drain (LDD) area.

2. The thin film transistor as claimed in claim 1 , wherein the electrode structure overlaps the lightly doped source area and the lightly doped drain area.

3. The thin film transistor as claimed in claim 1 , wherein the gate electrode does not overlap the lightly doped source area and the lightly doped drain area.

4. The thin film transistor as claimed in claim 1 , wherein a concentration of an n-type impurity of the lightly doped source area and the lightly doped drain area is lower than the concentration of the n-type impurity of the source area and the drain area.

5. The thin film transistor as claimed in claim 4 , wherein the n-type impurity comprises at least one selected from a group comprising phosphorus (P) and arsenic (As),.

6. The thin film transistor as claimed in claim 1 , wherein the gate electrode and the electrode structure are provided with substantially the same voltage.

7. The thin film transistor as claimed in claim 1 , wherein a concentration of an n-type impurity of the channel area is lower than the concentrations of the n-type impurity of the lightly doped source area and the lightly doped drain area.

8. The thin film transistor as claimed in claim 1 , wherein the electrode structure has an island shape from a direction perpendicular to a surface of the substrate.

9. A display device comprising:
a substrate;
a semiconductor layer on the substrate;
a first insulating layer on the semiconductor layer;
a gate electrode on the first insulating layer, the gate electrode overlapping the semiconductor layer;
a second insulating layer on the gate electrode;
an electrode structure on the second insulating layer, the electrode structure connected to the gate electrode through a via hole; and
a source electrode and a drain electrode passing through the first insulating layer and the second insulating layer to be connected to the semiconductor layer,
wherein the semiconductor layer comprises:
a channel area overlapping the gate electrode;
a source area connected to the source electrode;
a drain area connected to the drain electrode;
a lightly doped source (LDS) area between the source area and the channel area; and
a lightly doped drain (LDD) area between the drain area and the channel area, and
the electrode structure overlaps at least one of the lightly doped source (LDS) area or the lightly doped drain (LDD) area.

10. The display device as claimed in claim 9 , wherein the electrode structure overlaps the lightly doped source area and the lightly doped drain area.

11. The display device as claimed in claim 9 , wherein the gate electrode does not overlap the lightly doped source area and the lightly doped drain area.

12. The display device as claimed in claim 9 , wherein the lightly doped source area and the lightly doped drain area are doped with an n-type impurity at a lower concentration than concentrations at which the source area and the drain area are doped with an n-type impurity.

13. The display device as claimed in claim 12 , wherein the n-type impurity comprises at least one selected from a group comprising phosphorus (P) and arsenic (As).

14. The display device as claimed in claim 9 , wherein the gate electrode and the electrode structure are applied with substantially a same voltage.

15. The display device as claimed in claim 9 , wherein the channel area is doped with an n-type impurity at a lower concentration than concentrations at which the lightly doped source area and the lightly doped drain area are doped with an n-type impurity.

Assignees

• Samsung Display Co Ltd

Inventors

• Jang Yongjae
• Kim Waljun
• Yoon Joosun

Classifications

• H01L29/4908

  Electricity · mapped topic

• H01L51/0545

  Electricity · mapped topic

• H01L51/0512

  Electricity · mapped topic

• H01L29/458

  Electricity · mapped topic

• H01L29/66765 Primary

  Electricity · mapped topic