Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

Patent metadata

Field	Value
Publication number	US-10090133-B2
Application number	US-201615293367-A
Country	US
Kind code	B2
Filing date	Oct 14, 2016
Priority date	Mar 3, 2014
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A novel composition, system and method for improving beam current during boron ion implantation are provided. In a preferred aspect, the boron ion implant process involves utilizing B2H6, 11BF3 and H2 at specific ranges of concentrations. The B2H6 is selected to have an ionization cross-section higher than that of the BF3 at an operating arc voltage of an ion source utilized during generation and implantation of active hydrogen ions species. The hydrogen allows higher levels of B2H6 to be introduced into the BF3 without reduction in F ion scavenging. The active boron ions produce an improved beam current characterized by maintaining or increasing the beam current level without incurring degradation of the ion source when compared to a beam current generated from conventional boron precursor materials.

First claim

The invention claimed is:

1. A boron-containing dopant composition for use in an ion implantation process, comprising:
diborane (B2H6) from 0.1%-10%;
hydrogen (H2) ranging from about 5%-15%; and
the balance being isotopically enriched boron trifluoride in boron mass isotope 11 (11BF 3 );
wherein said composition is characterized by no greater than 10,000 ppm of higher order boranes.

2. The boron-containing dopant composition for use in an ion implantation process of claim 1 , wherein the B2H6 and H2 are supplied as a mixture in a first supply source, and the 11BF3 is supplied in a second supply source.

3. The boron-containing dopant composition for use in an ion implantation process of claim 1 , wherein the B2H6 and 11BF3 are supplied as a mixture in a first supply source, and the H2 is supplied in a second supply source.

4. The boron-containing dopant composition for use in an ion implantation process of claim 1 , wherein the B2H6, H2 and 11BF3 is supplied as a mixture in a single supply source.

5. The boron-containing dopant composition for use in an ion implantation process of claim 1 , wherein said B2H6 is isotopically enriched above natural abundance level.

6. The boron-containing dopant composition for use in an ion implantation process of claim 1 , wherein said boron-containing dopant composition is produced at either an upstream location of the ion chamber and/or within the ion chamber.

7. A boron-containing dopant composition for use in an ion implantation process, comprising isotopically enriched boron trifluoride in boron mass isotope 11 (11BF3) configured to be supplied in a supply vessel wherein said 11BF3 is characterized by no greater than 10,000 ppm of higher order boranes and further wherein said supply vessel comprises hydrogen (H2).

8. The boron-containing dopant composition for use in an ion implantation process of claim 7 , wherein said 11BF3 is supplied as part of a gas kit, said gas kit comprising a separate supply vessel comprising B2H6.

9. The boron containing dopant composition of claim 7 , wherein said supply vessel is configured into a gas box.

10. The boron containing dopant composition of claim 7 , wherein said supply vessel is a sub-atmospheric delivery package that is in fluid communication with an ion source apparatus configured to be operated to generate boron active ions, said ion source apparatus characterized by an average glitch rate of no greater than about 2 glitches per min during an ion source life.

11. The boron-containing dopant of claim 7 , further characterized by the absence of a diluent gas.

12. The boron containing dopant composition of claim 10 , wherein said supply vessel is a sub-atmospheric delivery package that is in fluid communication with an ion source apparatus configured to be operated to generate boron active ions, said ion source apparatus characterized by an average glitch rate of no greater than about 2 glitches per min during an ion source life of at least 100 hours.

13. A boron-containing dopant composition gas for use in an ion implantation process, comprising:
a gas storage and dispensing vessel comprising said boron-containing dopant composition gas mixture;
said boron-containing dopant composition gas mixture comprising:
isotopically enriched boron trifluoride in boron mass isotope 11 (11BF3); and
hydrogen, wherein said gas mixture is characterized by no greater than 10,000 ppm of higher order boranes;
further wherein said gas storage and dispensing vessel is configured into a gas box that is operably connected to an ion source apparatus to implant active boron ions.

14. The boron-containing dopant composition gas of claim 13 , characterized by the substantial or entire absence of xenon or argon.

Assignees

• Praxair Technology Inc

Inventors

• Sinha Ashwini K
• Smith Stanley M
• Heiderman Douglas C
• Campeau Serge M

Classifications

• H01J37/3171 Primary

  for ion implantation · CPC title

• H01J37/08

  Ion sources; Ion guns · CPC title

• H01J37/32807

  Construction (includes replacing parts of the apparatus) · CPC title

• H01J2237/006

  Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, (H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608) · CPC title

• H01J37/32458

  Vessel · CPC title