Tilt detecting device

Patent metadata

Field	Value
Publication number	US-10088310-B2
Application number	US-201514950517-A
Country	US
Kind code	B2
Filing date	Nov 24, 2015
Priority date	Dec 9, 2014
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A tilt detecting device comprising, a light source for projecting a pattern, a liquid component having a free liquid surface and for rear-surface reflecting by the free liquid surface, a photodetection element for photodetecting a reflection image of the rear-surface reflected pattern, and an arithmetic processing unit, wherein the arithmetic processing unit is adapted to scan a predetermined range of a photodetection surface of the photodetection element as many times as required and performs averaging processing to a photodetection signal as detected and calculates a barycentric position of the pattern based on signals subjected to averaging processing.

First claim

The invention claimed is:

1. A tilt detecting device comprising, a light source for projecting a pattern, a liquid component having a free liquid surface and for rear-surface reflecting said pattern by said free liquid surface to form a rear-surface reflected pattern, a photodetection element for photodetecting a reflection image of said rear-surface reflected pattern, and an arithmetic processing unit, wherein said arithmetic processing unit is adapted to scan circularly around a point set in advance as a center on said photodetection element and scan a predetermined range of a photodetection surface of said photodetection element a plurality of times and performs averaging processing to a photodetection signal as detected and calculates a barycentric position of said pattern based on signals subjected to averaging processing.

2. A tilt detecting device according to claim 1 , wherein said arithmetic processing unit scans around a barycenter, as a center, obtained by a calculation with different radiuses, respectively.

3. A tilt detecting device according to claim 2 , wherein said pattern comprises at least two small patterns disposed point-symmetrically with respect to said barycenter of said pattern.

4. A tilt detecting device according to claim 3 , wherein said arithmetic processing unit obtains respectively width centers of said two small patterns by averaging processing and calculates said barycentric position of said pattern based on a straight line connecting said width centers of said two small patterns.

5. A tilt detecting device according to claim 2 , wherein said pattern comprises at least one small pattern, a center of said small pattern is located at a known position with respect to said barycenter of said pattern, a center position of said small pattern is calculated based on a photodetection signal in scanning, and said barycentric position of said pattern is calculated based on said center position of said small pattern.

6. A tilt detecting device according to claim 3 , wherein said arithmetic processing unit obtains said width center of said small pattern for each of two sets of said two small patterns disposed point-symmetrically, calculates said straight line connecting said width centers of said two small patterns for each set, and calculates an intersection of two straight lines as said barycentric position.

7. A tilt detecting device according to claim 1 , wherein said pattern comprises at least two small patterns disposed point-symmetrically with respect to said barycenter of said pattern.

8. A tilt detecting device according to claim 7 , wherein said arithmetic processing unit obtains respectively width centers of said two small patterns by averaging processing and calculates said barycentric position of said pattern based on a straight line connecting said width centers of said two small patterns.

9. A tilt detecting device according to claim 7 , wherein said arithmetic processing unit obtains said width center of said small pattern for each of two sets of said two small patterns disposed point-symmetrically, calculates said straight line connecting said width centers of said two small patterns for each set, and calculates an intersection of two straight lines as said barycentric position.

10. A tilt detecting device according to claim 1 , wherein said pattern comprises at least one small pattern, a center of said small pattern is located at a known position with respect to said barycenter of said pattern, a center position of said small pattern is calculated based on a photodetection signal in scanning, and said barycentric position of said pattern is calculated based on said center position of said small pattern.

11. A tilt detecting device comprising, a light source for projecting a pattern, a liquid component having a free liquid surface and for rear-surface reflecting said pattern by said free liquid surface to form a rear-surface reflected pattern, a photodetection element for photodetecting a reflection image of said rear-surface reflected pattern, and an arithmetic processing unit, wherein said arithmetic processing unit is adapted to scan a predetermined range of a photodetection surface of said photodetection element a plurality of times and performs averaging processing to a photodetection signal as detected and calculates a barycentric position of said pattern based on signals subjected to averaging processing, and wherein said pattern comprises at least two small patterns disposed point-symmetrically with respect to said barycenter of said pattern.

12. A tilt detecting device according to claim 11 , wherein said arithmetic processing unit obtains respectively width centers of said two small patterns by averaging processing and calculates said barycentric position of said pattern based on a straight line connecting said width centers of said two small patterns.

13. A tilt detecting device according to claim 11 , wherein said arithmetic processing unit obtains said width center of said small pattern for each of two sets of said two small patterns disposed point-symmetrically, calculates said straight line connecting said width centers of said two small patterns for each set, and calculates an intersection of two straight lines as said barycentric position.

Assignees

• Kk Topcon

Inventors

• Kodaira Jun-Ichi

Classifications

• G01C2009/066

  optical · CPC title

• G01C9/20

  the indication being based on the inclination of the surface of a liquid relative to its container · CPC title

• G01C9/06 Primary

  Electric or photoelectric indication or reading means · CPC title

• G01C9/08

  Means for compensating acceleration forces due to movement of instrument · CPC title

• G01C9/18

  by using liquids · CPC title