Seal rings in electrochemical processors

Patent metadata

Field	Value
Publication number	US-10087543-B2
Application number	US-201715423298-A
Country	US
Kind code	B2
Filing date	Feb 2, 2017
Priority date	May 17, 2012
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A seal ring for an electrochemical processor does not slip or deflect laterally when pressed against a wafer surface. The seal ring may be on a rotor of the processor, with the seal ring having an outer wall joined to a tip arc through an end. The outer wall may be a straight wall. A relatively rigid support ring may be attached to the seal ring, to provide a more precise sealing dimension. Knife edge seal rings that slip or deflect laterally on the wafer surface may also be used. In these designs, the slipping is substantially uniform and consistent, resulting in improved performance.

First claim

The invention claimed is:

1. A seal for use in an electrochemical processor, comprising:
a seal ring having an inner diameter and an outer diameter, and a flat horizontal top surface;
an arc section at the inner diameter of the seal ring extending from the flat horizontal top surface of the seal ring to a straight vertical section of the seal ring;
the straight vertical section adjoining a tip arc having a first radius of curvature;
an outer wall adjoining a bottom surface of the seal ring, and an end radius having a second radius of curvature, the end radius between the outer wall and the tip arc, with the outer wall parallel to the straight vertical section, and with the first radius of curvature 2 to 30 times greater than the second radius of curvature;
a support ring supporting the seal ring, the support ring having a flat inner edge inserted into an outward facing horizontal slot in the seal ring adjacent to the inner diameter of the seal ring, with the horizontal slot parallel to the top surface of the seal ring.

2. The seal of claim 1 wherein the outer wall is straight and vertical and an inner wall of the seal ring between the arc section and the tip arc is flat, parallel and co-axial with the outer wall.

3. The seal of claim 1 having a height of 1 to 5 mm.

4. The seal of claim 1 wherein the inside diameter is 294.6 to 295.7 mm.

5. The seal of claim 1 with the tip arc having a concave curvature.

6. The seal of claim 1 with the end radius having a radius of curvature of less than 0.13 mm.

7. The seal of claim 1 wherein the straight vertical section is flat and concentric with the outer wall.

8. The seal of claim 1 wherein the support ring comprises metal and the seal ring comprises a fluoroelastomer.

9. A seal for sealing against a semiconductor material wafer during electroplating in an electrochemical processor, comprising:
a seal ring having an inner diameter, an outer diameter, and a top surface, wherein the entire top surface of the seal ring is horizontal and flat;
an arc section at the inner diameter of the seal ring extending from the flat horizontal top surface of the seal ring to a straight vertical section of the seal ring;
the straight vertical section adjoining a tip arc having a first radius of curvature;
an outer wall adjoining a bottom surface of the seal ring, and an end radius having a second radius of curvature, the end radius between the outer wall and the tip arc, with the outer wall parallel to the straight vertical section, and with the first radius of curvature greater than the second radius of curvature; and
a support ring supporting the seal ring, the support ring having a flat inner edge inserted into an outward facing horizontal slot in the seal ring parallel to the top surface of the seal ring.

10. The seal of claim 9 wherein the support ring is entirely flat.

11. The seal of claim 1 wherein the support ring is entirely flat.

Assignees

• Applied Materials Inc

Inventors

• Zimmerman Nolan L
• Mattinger George
• Wilson Gregory J
• Englhardt Eric A
• Ramasamy Balamurugan

Classifications

• H10W76/40 Primary

  Fillings or auxiliary members in containers, e.g. centering rings (fillings or auxiliary members for thermal protection or control in containers or encapsulations H10W40/70) · CPC title

• F16J15/3204

  with at least one lip · CPC title

• F16J15/025

  and with at least one flexible lip · CPC title

• F16J15/3236

  with at least one lip for each surface, e.g. U-cup packings · CPC title

• F16J15/00

  Sealings · CPC title