Pellicle including a water-soluble adhesive and photomask assembly including the pellicle

Patent metadata

Field	Value
Publication number	US-10087348-B2
Application number	US-201615254701-A
Country	US
Kind code	B2
Filing date	Sep 1, 2016
Priority date	Sep 30, 2015
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.

First claim

What is claimed is:

1. A method of manufacturing a pellicle adhesive, comprising:
copolymerizing an acrylate monomer and a functional monomer, the functional monomer comprising a COOH group or a CONH 2 group; and
substituting a hydrogen ion of the COOH group or the CONH 2 group with a sodium ion, a potassium ion, a calcium ion, or an ammonium ion (NHR 3 + ) to form a water-soluble acrylic adhesive material, wherein R is hydrogen or a C 1 to C 3 alkyl group,
wherein the copolymerizing and the substituting steps comprise mixing a solvent in an amount of about 25% to about 66% by weight of the water-soluble acrylic adhesive material, the acrylate monomer in an amount of about 20% to about 55% by weight of the water-soluble acrylic adhesive material, and the functional monomer in an amount of about 10% to about 30% by weight of the water-soluble acrylic adhesive material.

2. The method of claim 1 , wherein the copolymerizing is initiated by a radical initiator, and
wherein the radical initiator comprises at least one of azobis iso-butyro nitrile, benzoyl peroxide, di-tert-butyl peroxide, and tert-butyl peroxybenzoate.

3. The method of claim 1 , wherein the substituting is performed using at least one salt of KOH, NaOH, Ca(OH) 2 , and NH 4 OH.

4. The method of claim 1 , wherein the acrylate monomer comprises at least one of methyl acrylate, ethyl acrylate, isopropyl acrylate, n-butyl acrylate, 2-ethylhexyl acrylate, n-butyl methacrylate, and glycidyl methacrylate.

5. The method of claim 1 , wherein the functional monomer comprises an acrylic acid monomer or an amide monomer.

6. The method of claim 5 , wherein the acrylic acid monomer comprises at least one of acrylic acid and methacrylic acid.

7. The method of claim 5 , wherein the amide monomer comprises at least one of acrylamide, methacrylamide, and maleimide.

8. The method of claim 1 , wherein the copolymerizing is performed at a temperature in a range of about 30° C. to about 150° C., and the substituting is performed at a temperature in a range of about 0° C. to about 100° C.

9. The method of claim 1 , further comprising:
preparing a mixture including the water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the pellicle adhesive, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the pellicle adhesive, and an additive in an amount of about 1% to about 5% by weight of the pellicle adhesive; and
heating the mixture.

10. The method of claim 9 , wherein the alcohol comprises at least one of methanol, ethanol, butanol, and isopropanol.

11. The method of claim 9 , wherein the additive comprises a stabilizer and/or a dispersant.

12. A method of manufacturing a pellicle adhesive, the method comprising:
copolymerizing an acrylate monomer and a functional monomer, the functional monomer comprising a COOH group or a CONH 2 group;
substituting a hydrogen ion of the COOH group or the CONH 2 group with a sodium ion, a potassium ion, a calcium ion, or an ammonium ion (NHR 3 + ) to form a water-soluble acrylic adhesive material, wherein R is hydrogen or a C 1 to C 3 alkyl group;
preparing a mixture including the water-soluble acrylic adhesive material, water or a solution of water and alcohol, and an additive; and
heating the mixture,
wherein the mixture includes the water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the pellicle adhesive, water or the solution of water and alcohol in an amount of about 40% to about 55% by weight of the pellicle adhesive, and the additive in an amount of about 1% to about 5% by weight of the pellicle adhesive.

13. The method of claim 12 , wherein the alcohol comprises at least one of methanol, ethanol, butanol, and isopropanol.

14. The method of claim 12 , wherein the additive comprises a stabilizer and/or a dispersant.

15. A method of manufacturing a pellicle adhesive, the method comprising:
preparing a mixture including a solvent, an acrylate monomer, a functional monomer, and a salt of at least one of KOH, NaOH, Ca(OH) 2 , and NH 4 OH, wherein the functional monomer comprises a COOH group or a CONH 2 group; and
copolymerizing the acrylate monomer and the functional monomer and substituting a hydrogen ion of the COOH group or the CONH 2 group with a sodium ion, a potassium ion, a calcium ion, or an ammonium ion (NHR 3 + ) in the mixture to form a water-soluble acrylic adhesive material, wherein R is hydrogen or a C 1 to C 3 alkyl group,
wherein the mixture includes the solvent in an amount of about 25% to about 75% by weight of the mixture, the acrylate monomer in an amount of about 20% to about 55% by weight of the mixture, the functional monomer in an amount of about 5% to about 20% by weight of the mixture, and the salt in an amount of about 3% to about 5% by weight of the mixture.

16. The method of claim 15 , wherein the mixture further includes a radical initiator that initiates copolymerization of the acrylate monomer and the functional monomer.

17. The method of claim 16 , wherein the radical initiator comprises at least one of azobis iso-butyro nitrile, benzoyl peroxide, di-tert-butyl peroxide, and tert-butyl peroxybenzoate.

18. The method of claim 15 , wherein the copolymerizing is performed at a temperature in a range of about 30° C. to about 150° C., and the substituting is performed at a temperature in a range of about 0° C. to about 100° C.

Assignees

• Samsung Electronics Co Ltd
• Fine Semitech Corp

Inventors

• YOO Byungchul
• Cho Sungyong
• Choi Jaehyuck
• Yang Jeongsu
• Chung Donghoon
• Lee Han-Shin
• KIM Myungjun
• KIM Ikjun
• Kim Jikang
• Min Jeonghwan
• Seo Kyoungchae

Classifications

• C08F8/44

  Preparation of metal salts or ammonium salts · CPC title

• C09J133/02 Primary

  Homopolymers or copolymers of acids; Metal or ammonium salts thereof · CPC title

• C08F6/02

  Neutralisation of the polymerisation mass, e.g. killing the catalyst (short-stopping C08F2/42 ){also removal of catalyst residues} · CPC title

• C09J133/08

  Homopolymers or copolymers of acrylic acid esters · CPC title

• G03F1/64

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title