Laser optical system and laser annealing device including the same
US-2016252732-A1 · Sep 1, 2016 · US
US10084279B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10084279-B2 |
| Application number | US-201715827207-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 30, 2017 |
| Priority date | Dec 7, 2016 |
| Publication date | Sep 25, 2018 |
| Grant date | Sep 25, 2018 |
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A laser apparatus has a gain medium which has opposite ends, wherein the laser apparatus includes at least two independently controllable excitation sources, each one of the excitation sources being operable to produce an input beam to excite or pump the gain medium. Beam splitting arrangements are associated with the excitation sources are configured to split the input beam of its associated excitation source into at least two sub-beams. Beam guiding arrangements are associated with the excitation sources and are configured to direct a path of at least one of the split sub-beams from its associated excitation source, whereby each excitation source, its associated beam splitting arrangement, and beam guiding arrangement are arranged such that the sub-beams are respectively directed inwardly towards the gain medium at opposite ends.
Opening claim text (preview).
What is claimed is: 1. A laser apparatus including a gain medium which has opposite ends, wherein the laser apparatus includes: at least two independently controllable excitation sources, each one of the excitation sources being operable to produce an input beam to excite or pump the gain medium; a plurality of beam splitting arrangements respectively associated with the excitation sources, each beam splitting arrangement configured to split the input beam of its associated excitation source into at least two sub-beams; and a plurality of beam guiding arrangements respectively associated with the excitation sources, each one of the beam guiding arrangements being configured to direct a path of at least one of the split sub-beams from its associated excitation source, whereby each excitation source, its associated beam splitting arrangement, and beam guiding arrangement are arranged such that the sub-beams are respectively directed inwardly towards the gain medium at opposite ends. 2. The laser apparatus as claimed in claim 1 , in which the gain medium is excited by two inwardly directed sub-beams at each end, wherein, at each end, one sub-beam is from one of the excitation sources, while the other sub-beam is from the other excitation source. 3. The laser apparatus as claimed in claim 1 , in which: a beam profile of an output beam of the laser apparatus is in accordance with a gain profile of the gain medium; and the gain profile of the gain medium is in accordance with a beam profile and/or intensity and/or arrangement of the sub-beams which are directed towards, and excite, the gain medium. 4. The laser apparatus as claimed in claim 1 , in which: each excitation source is aligned with, and directed towards, one or the other of the ends of the gain medium; and optionally one of the sub-beams from the excitation is not re-directed, already being aligned with one of the ends of the gain medium, while the other of the sub-beams from that excitation source is guided by the beam guiding arrangement in a loop around the gain medium to the other end, such that the sub-beams from the same excitation source are inwardly directed at opposite ends of the gain medium. 5. The laser apparatus as claimed in claim 1 , in which: the sub-beams of one of the excitation sources, when directed inwardly to the gain medium, are parallel and co-axial with each other; or the sub-beams of one of the excitation sources, when directed inwardly to the gain medium, are parallel but not co-axial with each other. 6. The laser apparatus as claimed in claim 1 , in which: the sub-beams of different excitation sources, when directed inwardly to the gain medium are parallel with each other; and optionally the sub-beams of one of the excitation sources are co-axial with each other, while the sub-beams of the other excitation source are offset from each other and also offset from the other sub-beams of the other excitation source, all sub-beams being parallel. 7. The laser apparatus as claimed in claim 1 , in which the beam splitting arrangement includes a polarising beam splitter. 8. The laser apparatus as claimed in claim 1 , in which each excitation source is a laser diode. 9. The laser apparatus as claimed in claim 1 , in which each beam guiding arrangement includes at least two mirrors to fold the sub-beams around the gain medium. 10. The laser apparatus as claimed in claim 1 , which includes a shaping lens arranged between the excitation source and the beam splitting arrangement, the shaping lens configured to shape the input beam from the excitation source. 11. The laser apparatus as claimed in claim 1 , in which the gain medium is a crystalline gain medium, optionally being a Tm:YLF (Thulium-doped Yttrium Lithium Fluoride) crystal slab. 12. A laser system including: the laser apparatus as claimed in claim 1 ; and a controller configured to vary relative intensities of the input beams of the excitation sources based on one or more of: pre-defined profile criteria; or received user input. 13. A method of operating a laser apparatus including a gain medium which has opposite ends, wherein the method includes: providing at least two independent excitation sources, each one of the excitation sources being operable to produce an input beam to excite or pump the gain medium; splitting, by a plurality of beam splitting arrangements respectively associated with each one of the excitation sources, the input beam of each one of the associated excitation sources into at least two sub-beams; and directing, by a plurality of beam guiding arrangements respectively associated with each one of the excitation sources, a path of at least one of the split sub-beams from each associated excitation source, whereby each excitation source, its associated beam splitting arrangement, and beam guiding arrangement are arranged such that the sub-beams are respectively directed inwardly towards the gain medium at opposite ends. 14. The method as claimed in claim 13 , which includes directing at least some of the sub-beams inwardly towards opposite ends of the gain medium such that at least some of the sub-beams are parallel but not co-axial with each other. 15. The method as claimed in claim 13 , which includes changing the gain profile of the gain medium (and hence a beam profile of an output beam) by one or more of: adjusting the arrangement or spacings of the various sub-beams; and/or by varying an intensity of the input beams absolutely or relative to each other.
Guiding of the pump light · CPC title
by controlling the optical pumping · CPC title
Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title
thulium · CPC title
YLiF4(YLF, LYF) · CPC title
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