Gas-sensitive hall device

Patent metadata

Field	Value
Publication number	US-10082484-B2
Application number	US-201615247336-A
Country	US
Kind code	B2
Filing date	Aug 25, 2016
Priority date	Sep 17, 2015
Publication date	Sep 25, 2018
Grant date	Sep 25, 2018

Abstract

A chemically sensitive Hall device is described herein. In accordance with one example of the present invention, a Hall device comprises a substrate and a chemically sensitive layer arranged on the substrate. The chemically sensitive layer is able to interact with atoms or molecules of a gaseous or liquid fluid. Force electrodes are connected to the chemically sensitive layer for feeding a sensor current through the chemically sensitive layer along a first direction. Sense electrodes are connected to the chemically sensitive layer to tap a Hall voltage at the chemically sensitive layer along a second direction. A back gate is arranged on or integrated in the substrate and is isolated from the chemically sensitive layer by an isolation layer.

First claim

The invention claimed is:

1. A chemically sensitive Hall device comprising:
a substrate;
a chemically sensitive layer arranged on the substrate and operably interacting with atoms or molecules of a gaseous or liquid fluid;
force electrodes connected to the chemically sensitive layer for feeding a sensor current through the chemically sensitive layer along a first direction;
sense electrodes connected to the chemically sensitive layer to tap a Hall voltage at the chemically sensitive layer along a second direction;
a back gate arranged on or integrated in the substrate; the back gate being isolated from the chemically sensitive layer by an isolation layer.

2. The chemically sensitive Hall device according to claim 1 further comprising:
a control circuit coupled to the force electrodes and configured to generate the sensor current, and further coupled to the back-gate and configured to apply a gate voltage to the back-gate for tuning of the Hall voltage.

3. The chemically sensitive Hall device according to claim 2 , wherein the control circuit is configured to apply the gate voltage to the back gate such that the Hall voltage is adjusted to zero.

4. The chemically sensitive Hall device according to claim 2 , wherein the control circuit further coupled to the sense electrodes and configured to regularly or continuously regulate the gate voltage applied to the back gate such that the Hall voltage is maintained at a level of substantially zero volts.

5. The chemically sensitive Hall device according to claim 1 , wherein a coil is integrated in the substrate subjacent to the chemically sensitive layer.

6. The chemically sensitive Hall device according to claim 5 , wherein the coil is operably supplied with current to generate a magnetic field having a field component perpendicular to a top surface of the chemically sensitive layer.

7. The chemically sensitive Hall device according to claim 5 , wherein the coil is configured to be operated as heating coil to generate heat for the heating of the chemically sensitive layer.

8. The chemically sensitive Hall device according to claim 1 , further comprising:
a permanent magnet configured to generate a magnetic field having a filed component perpendicular to a top surface of the chemically sensitive layer.

9. The chemically sensitive Hall device according to claim 1 , further comprising:
a heating circuit including a heat generating element, which is configured to heat up a gas-sensitive layer to desorb atoms or molecules from the chemically sensitive layer.

10. The chemically sensitive Hall device according to claim 9 , wherein the back-gate region is used as heat generating element.

11. The chemically sensitive Hall device according to claim 9 , wherein the chemically sensitive layer is used as heat generating element, and the sensor current is increased to heat up the chemically sensitive layer.

12. The chemically sensitive Hall device according to claim 9 , wherein the heating circuit is configured to cyclically heat up the gas-sensitive layer.

13. A sensor array including at least two chemically sensitive Hall devices in accordance with claim 1 , wherein the at least two chemically sensitive Hall devices are integrated in one substrate or in one sensor package.

14. The chemically sensitive Hall device according to claim 1 , wherein the sense electrodes are connected to the chemically sensitive layer directly.

15. The chemically sensitive Hall device according to claim 1 , wherein the force electrodes and the sense electrodes are formed in a same layer.

16. A method for operating a sensor which includes a chemically sensitive Hall element arranged on a substrate; the method comprising:
applying a sensor current to the chemically sensitive Hall element so that the sensor current passes through the Hall element in a first direction,
sensing a Hall voltage at the Hall element along a second direction substantially perpendicular to the first direction; and
applying a gate voltage to a back-gate arranged on or integrated in the substrate, the gate voltage being responsive to the Hall voltage.

17. The method according to claim 16 further comprising:
heating the chemically sensitive Hall element to desorb atoms or molecules from the chemically sensitive Hall element.

18. The method according to claim 17 , wherein the heating is performed regularly or periodically for a defined duration.

19. The method according to claim 17 , wherein the heating is performed for a defined duration, when the gate voltage leaves a pre-defined target range.

20. The method according to claim 17 , wherein the heating is performed for a defined duration, when a pre-defined cycle time has elapsed.

21. The method according to claim 16 , wherein the gate voltage is regularly or periodically adjusted such that the Hall voltage becomes zero.

22. A chemically sensitive sensor array comprising:
at least two Hall elements having a chemically sensitive layer, which operably interacts with atoms or molecules of a gaseous or liquid fluid; each Hall element having force electrodes for feeding a sensor current through the respective Hall element, sense electrodes for tapping a Hall voltage at the respective Hall element, and a back gate, which is arranged subjacent to the chemically sensitive layer, is isolated from the chemically sensitive layer by an isolation layer, and has a gate voltage responsive to the Hall voltage.

23. The chemically sensitive sensor array of claim 22 ,
wherein at least two of the Hall elements have chemically sensitive layers, which are chemically functionalized differently to provide sensitivity to different atoms or molecules.

24. The chemically sensitive sensor array of claim 22 , further comprising:
circuitry configured to select one or more of the Hall elements; the sensor current being fed at least through the selected Hall elements, the back gate voltage being applied to the back gate(s) of at least the selected Hall elements, and the Hall voltage being tapped at least at the selected Hall elements.

25. The chemically sensitive sensor array of claim 24 , wherein two or more Hall elements are selected and the selected Hall elements are connected in parallel.

26. The chemically sensitive sensor array of claim 24 , wherein the Hall elements are selected sequentially.

27. The chemically sensitive sensor array of claim 24 , wherein the circuitry includes at least a multiplexer and a demultiplexer.

Assignees

• Infineon Technologies Ag

Inventors

• Breuer Werner
• Eckinger Markus

Classifications

• G01N27/74 Primary

  of fluids (G01N24/00 takes precedence) · CPC title

• G01N27/72

  by investigating magnetic variables · CPC title

• G01R33/072 Primary

  Constructional adaptation of the sensor to specific applications · CPC title

• G01N27/00

  Investigating or analysing materials by the use of electric, electrochemical, or magnetic means (G01N3/00 – G01N25/00 take precedence; measurement or testing of electric or magnetic variables or of electric or magnetic properties of materials G01R) · CPC title

• G01N27/26 Primary

  by investigating electrochemical variables; by using electrolysis or electrophoresis · CPC title