Optical coating method, apparatus and product

Patent metadata

Field	Value
Publication number	US-10077207-B2
Application number	US-201313906065-A
Country	US
Kind code	B2
Filing date	May 30, 2013
Priority date	Nov 30, 2011
Publication date	Sep 18, 2018
Grant date	Sep 18, 2018

Abstract

This disclosure is directed to an improved process for making glass articles having optical coating and easy-to clean coating thereon, an apparatus for the process and a product made using the process. In particular, the disclosure is directed to a process in which the application of the optical coating and the easy-to-clean coating can be sequentially applied using a single apparatus. Using the combination of the coating apparatus and the substrate carrier described herein results in a glass article having both optical and easy-to-clean coating that have improved scratch resistance durability and optical performance, and in addition the resulting articles are “shadow free.”

First claim

We claim:

1. A deposition coating apparatus for depositing coating on a substrate, the deposition coating apparatus comprising:
a vacuum chamber;
a rotatable dome positioned in the vacuum chamber, the rotatable dome comprising a magnetic material; and
at least one substrate carrier for attachment to the rotatable dome, the at least one substrate carrier comprising:
a sheet-like substrate carrier base comprising a sheet-like retention surface, an underside positioned opposite the sheet-like retention surface, and a substrate retention area disposed on the sheet-like retention surface;
a plurality of magnets coupled to the underside of the sheet-like substrate carrier base and positioned outside of a perimeter of the substrate retention area to magnetically attach the substrate carrier to the rotatable dome; and
an adhesive material positioned over the sheet-like retention surface in the substrate retention area for releasably affixing at least one substrate to be coated in the deposition coating apparatus.

2. The deposition coating apparatus of claim 1 further comprising a plasma source positioned within the vacuum chamber and substantially vertically oriented to direct plasma onto an underside of the rotatable dome, wherein the plasma source is positioned below the rotatable dome and radially outward from an axis of rotation of the rotatable dome such that the plasma emitted from the plasma source is incident on the underside of the rotatable dome from at least an outer edge of the rotatable dome to at least a center of the rotatable dome.

3. The deposition coating apparatus of claim 2 , wherein a distance between the axis of rotation of the rotatable dome and the plasma source is greater than a distance between a projected perimeter of the rotatable dome and the plasma source.

4. The deposition coating apparatus of claim 3 further comprising at least one shadow mask adjustably positionable within the vacuum chamber.

5. The deposition coating apparatus of claim 4 , wherein the at least one shadow mask is adjustable from an extended position wherein the at least one shadow mask is positioned between at least one of the first e-beam source and the second e-beam source and the rotatable dome and a retracted position wherein the at least one shadow mask is not positioned between either the first e-beam source or the second e-beam source and the rotatable dome.

6. The deposition coating apparatus of claim 1 further comprising a first e-beam source positioned in the vacuum chamber and oriented to direct a first electron beam onto a first coating source material positioned in the vacuum chamber and a second e-beam source positioned in the vacuum chamber and oriented to direct a second electron beam onto a second coating source material positioned in the vacuum chamber.

7. The deposition coating apparatus of claim 6 , wherein the first coating source material has a high refractive index and the second coating source material has a low refractive index or a medium refractive index.

8. The deposition coating apparatus of claim 1 , wherein the plurality of magnets off-sets the substrate carrier a distance from the dome when the substrate carrier is magnetically attached to the dome.

Assignees

• Corning Inc

Inventors

• Lee Christopher Morton
• Lu Xiao-Feng
• Ouyang Michael Xu
• Zhang Junhong

Classifications

• C03C2217/78

  Coatings specially designed to be durable, e.g. scratch-resistant · CPC title

• B05D5/083

  involving the use of fluoropolymers · CPC title

• C03C2217/76

  Hydrophobic and oleophobic coatings · CPC title

• C03C2218/32

  After-treatment · CPC title

• C03C2218/151

  by vacuum evaporation · CPC title