Plasma processing apparatus
US-2024420923-A1 · Dec 19, 2024 · US
Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring
US10074523B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10074523-B2 |
| Application number | US-201514589404-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 5, 2015 |
| Priority date | Jul 5, 2012 |
| Publication date | Sep 11, 2018 |
| Grant date | Sep 11, 2018 |
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- Title
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- Abstract
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Abstract
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A polycrystalline CaF 2 member includes a combined assembly of a plurality of polycrystalline bodies made from CaF 2 that are pressure bonded together.
First claim
Opening claim text (preview).
What is claimed is: 1. A polycrystalline CaF 2 member comprising: a combined assembly of a plurality of polycrystalline bodies made from CaF 2 that are pressure bonded together, each of the plurality of polycrystalline bodies comprising sintered minute crystals of CaF 2 particles, and a mean particle diameter of the minute crystals of the plurality of polycrystalline bodies being greater than or equal to 200 μm. 2. The polycrystalline CaF 2 member according to claim 1 , wherein: a relative density of polycrystalline CaF 2 of the polycrystalline bodies is greater than or equal to 94.0%. 3. A member for a plasma treatment device, comprising the polycrystalline CaF 2 member according to claim 1 . 4. A member for a plasma treatment device, comprising the polycrystalline CaF 2 member according to claim 2 . 5. The member for a plasma treatment device according to claim 3 , wherein: the member for a plasma treatment device is a focusing ring. 6. The member for a plasma treatment device according to claim 4 , wherein: the member for a plasma treatment device is a focusing ring. 7. A plasma treatment device, comprising the member for a plasma treatment device according to claim 3 . 8. A plasma treatment device, comprising the member for a plasma treatment device according to claim 4 .
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Classifications
based on fluorides · CPC title
submicron sized, i.e. from 0,1 to 1 micron · CPC title
directly with other burned ceramic articles · CPC title
Side-way connecting, e.g. connecting two plates through their sides · CPC title
Products characterised by their shape · CPC title
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Frequently asked questions
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- What does patent US10074523B2 cover?
- A polycrystalline CaF 2 member includes a combined assembly of a plurality of polycrystalline bodies made from CaF 2 that are pressure bonded together.
- Who is the assignee on this patent?
- Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/32642. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 11 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).