Nano-gap grating devices with enhanced optical properties and methods of fabrication

Patent metadata

Field	Value
Publication number	US-10073200-B2
Application number	US-201314081353-A
Country	US
Kind code	B2
Filing date	Nov 15, 2013
Priority date	Feb 11, 2013
Publication date	Sep 11, 2018
Grant date	Sep 11, 2018

Abstract

A method of producing a grating structure comprises the steps of forming a stamp from flexible plastic material, the stamp including a negative of a periodic grating pattern on a first surface; forming an ink by applying a polymer film to the stamp, the ink including a first surface and an opposing second surface, wherein the first surface of the ink contacts the first surface of the stamp such that the ink retains a positive of the periodic grating pattern; placing the ink and the stamp on a substrate such that the second surface of the ink contacts an upper surface of the substrate; and removing the stamp from the ink by applying a tensional force to one edge of the stamp.

First claim

Having thus described various embodiments of the invention, what is claimed as new and desired to be protected by Letters Patent includes the following:

1. A grating structure comprising:
a substrate including a smooth upper surface;
a base layer positioned on the substrate, the base layer including
a first surface with a plurality of grating elements positioned adjacent one another, each grating element including a longitudinal peak and a longitudinal valley, and
a second surface, opposing the first surface, in contact with the upper surface of the substrate; and

a contiguous first functional layer conformally covering the second surface of the base layer applied at a deposition angle away from normal on the second surface of the base layer, such that the first functional layer has a non-uniform thickness and such that the deposition angle of the first functional layer produces an enhanced fluorescence of a sample,
wherein the first functional layer includes a nanogap in the longitudinal valley,
wherein the nanogap measures between 10 nanometers and 30 nanometers in lateral width; and
wherein the nanogap produces the fluorescence enhancement in the vicinity of the nanogap.

2. The grating structure of claim 1 , wherein the first functional layer includes a longitudinal peak aligned with the peak of the base layer and a longitudinal valley aligned with the valley of the base layer.

3. The grating structure of claim 1 , wherein the first functional layer includes a plateau and a tip, wherein the tip is a longitudinal peak, and the plateau is a rounded surface extending therebetween.

4. The grating structure of claim 3 , wherein the tip includes a plurality of nanospurs abutting one another along the length thereof, wherein each nanospur includes or forms a peak.

5. The grating structure of claim 1 , further comprising a second functional layer applied to an upper surface of the first functional layer, such that the first functional layer is formed from a dielectric and the second functional layer is formed from a metal or a metal alloy.

6. The grating structure of claim 1 , wherein the first functional layer is formed from a metal or a metal alloy.

7. The grating structure of claim 1 , wherein the first functional layer is formed from a dielectric.

8. The grating structure of claim 1 , wherein the deposition angle is between approximately 65 degrees away from normal to approximately 80 degrees away form normal.

9. The grating structure of claim 1 , wherein first functional layer is further applied in a direction transverse to an axis of the longitudinal peak and the longitudinal valley.

10. A grating structure comprising:
a substrate including a smooth upper surface;
a base layer positioned on the substrate, the base layer including
a first surface with a plurality of grating elements positioned adjacent one another, each grating element including a longitudinal peak and a longitudinal valley, and
a second surface, opposing the first surface, in contact with the upper surface of the substrate; and

a contiguous first functional layer conformally covering the second surface of the base layer, such that the deposition angle of the first functional layer produces a nanogap in the longitudinal valley of the first functional layer;
wherein the nanogap measures between 10 nanometers and 30 nanometers in lateral width; and
wherein the nanogap causes fluorescence enhancement of a sample in the vicinity of the nanogap.

11. The grating structure of claim 10 , wherein the fluorescence is enhanced by a factor between 68 and 300 over a glass slide baseline.

12. The grating structure of claim 11 , wherein the fluorescence is enhanced by a factor between 118 and 300 over a glass slide baseline.

13. The grating structure of claim 10 , wherein the fluorescence is enhanced by a factor between 25 and 300 over a glass slide baseline.

14. The grating structure of claim 10 , wherein the longitudinal peak has a height of approximately 60 nanometers.

15. The grating structure of claim 10 , wherein the nanogap is approximately 20 nanometers in lateral width.

16. The grating structure of claim 1 , wherein the fluorescence is enhanced by a factor between 68 and 300 over a glass slide baseline.

17. The grating structure of claim 16 , wherein the fluorescence is enhanced by a factor between 118 and 300 over a glass slide baseline.

18. The grating structure of claim 1 , wherein the fluorescence is enhanced by a factor between 25 and 300 over a glass slide baseline.

19. The grating structure of claim 1 , wherein the nanogap is approximately 20 nanometers in lateral width.

20. The grating structure of claim 3 , wherein the plateau is approximately 90 nanometers and the tip is between 10 nanometers and 30 nanometers.

Assignees

• Univ Missouri

Inventors

• Gangopadhyay Shubhra
• Korampally Venu
• Basuray Sagnik
• Bhatnagar Kunal
• Pathak Avinash
• Ghosh Arnab
• Menke Drew Edwin
• Mathai Joseph
• Cornish Peter
• Gangopadhyay Keshab
• Wood Aaron

Classifications

• G02B5/1814

  structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings (G02B5/189 takes precedence) · CPC title

• G02B5/1852

  using mechanical means, e.g. ruling with diamond tool, moulding · CPC title

• G02B5/1861

  Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials (G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence) · CPC title

• G02B5/18

  Diffraction gratings {(holographic optical elements G02B5/32, G03H; integrally combined with optical fibres G02B6/02057; for coupling light guides G02B6/34; integrally combined with optical integrated light guides G02B6/12; grating systems G02B27/44)} · CPC title

• G02B5/1842 Primary

  Gratings for image generation (G02B5/1847 takes precedence) · CPC title