Device and method for continuous vgf crystal growth through rotation after horizontal injection synthesis
US-2019352794-A1 · Nov 21, 2019 · US
US10072350B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10072350-B2 |
| Application number | US-201415022707-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 16, 2014 |
| Priority date | Sep 17, 2013 |
| Publication date | Sep 11, 2018 |
| Grant date | Sep 11, 2018 |
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A method for manufacturing a silicon ingot having uniform phosphorus concentration. The method includes at least the steps of: (i) providing a quasi-uniform molten silicon bath containing at least phosphorus; and (ii) proceeding to the directional solidification of the silicon, wherein a speed (VI) for solidifying the silicon and a rate (JLV) of evaporation of the phosphorus at the liquid/vapor interface of the bath are controlled such that, at each moment of the directional solidification, the following equation is verified: VI=k′/(2−k) (E), wherein k′ is the phosphorus transfer coefficient, and k is the distribution coefficient of the phosphorus in the silicon. Also relates to a silicon ingot having uniform phosphorus concentration across a height of at least 20 cm.
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The invention claimed is: 1. A process for manufacturing a silicon ingot having a uniform phosphorus concentration, comprising at least the steps consisting in: (i) providing an almost uniform bath of molten silicon comprising at least phosphorus; and (ii) carrying out the directional solidification of the silicon, with a speed of solidification (V I ) of the silicon and a rate of evaporation (J LV ) of the phosphorus at the liquid-vapor interface of the bath which are controlle…
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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