Versatile holder for treating the surface of rod-shaped substrates

Patent metadata

Field	Value
Publication number	US-10072326-B2
Application number	US-201414888277-A
Country	US
Kind code	B2
Filing date	Apr 24, 2014
Priority date	May 2, 2013
Publication date	Sep 11, 2018
Grant date	Sep 11, 2018

Abstract

A holder for securing at least one rod-shaped substrate body having a variable cross-section along the substrate body has a substrate body region BQ 1 comprising a surface to be treated. The holder comprises at least one perforated wall as the front wall, the wall having at least one opening, and also comprises a support element and a retaining element. The support element is constructed and/or secured in the opening in such a way that at least part of the substrate body can be arranged longitudinally and obliquely in the support element and the retaining element is constructed and/or secured in the opening in such a way that the retaining element can retain the substrate body at a point between the region BQ 1 and the remainder of the substrate body such that the region BQ 1 protrudes from the holder through the opening.

First claim

The invention claimed is:

1. Holder for fastening at least one rod-shaped body ( 10 ) with variable section along the substrate body and a surface to be treated, which is located in an area B Q1 of the substrate body ( 10 ) comprising an end of the substrate body ( 10 ) and a smaller cross-section than the rest of
the substrate body ( 10 ), wherein the holder comprises at least one perforated wall as a front wall ( 3 ), which is provided with at least one opening ( 5 ) wherein the holder comprises at least one support element ( 9 ) and a retaining element ( 11 ), which are arranged at an opening ( 5 ), wherein:
the support element ( 9 ) is constructed or secured in such a way to the opening ( 5 ), that the substrate body may be at least partially disposed oblique at an inclination angle α to the horizontal alongside in the support element ( 9 ), and
the retaining element ( 11 ) is constructed or secured in such a way to the opening ( 5 ) that the retaining element ( 11 ) can stop the substrate body at a position between the area B Q1 and the remainder of the substrate body in such a way that the area B Q1 projects through the opening ( 5 ) from the holder, wherein the angle of inclination α to the horizontal is greater than 2°.

2. Holder according to claim 1 , characterized in that, preferably 5°≤α≤20°.

3. Holder according claim 1 , characterized in that the supporting member ( 9 ) is elongate and has two ends, one end of the support element ( 9 ) being close to the front wall ( 3 ) or on the front wall ( 3 ) and the other end distant from the front wall ( 3 ).

4. Holder according to claim 3 , characterized in that the holder comprises at least two support elements ( 9 ) for attachment of at least two substrate members ( 10 ) which are arranged parallel in the vertical plane or incisive in the horizontal plane, wherein the distance in the horizontal plane between the support elements ( 9 ) is greater with respect to the close to the front wall ( 3 ) lying areas compared to the distant from the front wall ( 3 ) areas, thereby also the distance in the horizontal plane between the substrate members ( 10 ) is greater with respect to the close to the front wall
( 3 ) lying areas compared to the distant from the front wall ( 3 ) areas.

5. Holder according to claim 4 , characterized in that the holder comprises at least a second perforated wall, distant by a spacing from the front wall ( 3 ), is provided with at least one opening ( 5 ′)
and being arranged as a supporting wall ( 13 ) for the supporting members ( 9 ) in the holder such that at least a part of one of the support elements ( 9 ) is supported by an opening ( 5 ′).

6. Holder according to claim 5 , characterized in that the second perforated wall is provided with an array of openings ( 5 ″), the number of openings ( 5 ′) in the array of openings ( 5 ″) of the supporting wall ( 13 ) corresponds to the number of openings in the array of openings ( 5 ) of the front wall ( 3 ), and the support wall
( 13 ) is arranged in the holder in such a way that each supporting member ( 9 ) at the same time is supported by an opening ( 5 ) and an opening ( 5 ′).

7. Holder according to claim 6 , characterized in that the supporting wall ( 13 ) in the holder is arranged parallel with respect to the front wall ( 3 ),
or the array of openings ( 5 ″), or to the front wall ( 3 ) and the array of openings ( 5 ″) and is designed such that
in the vertical plane, each opening of the arrangement of openings ( 5 ′) is arranged above the opening of the corresponding array of openings ( 5 ), or in the horizontal plane, the distance between the openings of the array of openings ( 5 ′) in the support wall

( 13 ) is smaller than the distance between the openings of the array of openings ( 5 ) in the front wall ( 3 ).

8. Holder according to claim 1 , characterized in that the retaining elements ( 11 ) are made in the form of a front cover mask ( 17 ) having an array of openings ( 5 ″′).

9. Holder according to claim 5 , characterized in that the holder comprises composite elements ( 15 ), with the aid of which the position of the front wall ( 3 ) in relation to the position of the support wall ( 13 ) is secured.

10. Holder according to claim 9 , characterized in that the composite elements ( 15 ) are walls which form together with the rest of the holder a compartment cartridge ( 20 ).

11. Holder according to claim 1 , characterized in that the holder is loaded with at least one substrate body ( 10 ) in such a way that the area B Q1 of the substrate body ( 10 ) is projecting through one of the openings ( 5 ) of the front wall ( 3 ) of the holder and thereby as well the surface to be treated of the substrate.

12. Holder according to claim 11 , characterized in that the holder comprises a cover as a coating protective cover ( 40 ) which shade the spaces of the substrate body ( 10 ) which do not protrude through the opening ( 5 ) of the front wall
( 3 ) wherein the cover ( 40 ) is formed as an open box or a hood which is adapted to be pushed over from the side of the support wall ( 13 ).

13. Holder according to claim 11 , characterized in that the holder comprises a cover as a transport protection cover ( 50 ), which covers the areas of the substrate body ( 10 ) protruding through the opening ( 5 ) of the front wall ( 3 ), wherein
the protection cover ( 50 ) is formed as an open box or a hood which is adapted to be pushed over from the side of the cover mask ( 17 ).

Assignees

• Oerlikon Surface Solutions Ag Truebbach
• Oerlikon Surface Solutions Ag Pfaffikon

Inventors

• Siebert Max
• Vogel Remo
• Jotz Karl Wolfgang

Classifications

• H01J37/32403

  Treating multiple sides of workpieces, e.g. 3D workpieces · CPC title

• C23C14/042 Primary

  using masks · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• C23C14/50

  Substrate holders · CPC title

• C23C14/021 Primary

  Cleaning or etching treatments · CPC title