Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US10071393B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10071393-B2 |
| Application number | US-201615153178-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 12, 2016 |
| Priority date | May 12, 2016 |
| Publication date | Sep 11, 2018 |
| Grant date | Sep 11, 2018 |
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Official abstract text for this publication.
A method of controlling a dispensing unit is used to dispense material on a substrate. The method includes connecting a solenoid coil of a pneumatically-driven pump to an amplifier output of a dispensing system, and driving the solenoid coil with the amplifier to a cause the pneumatically-driven pump to dispense material on a substrate. The method further may include commanding an idle current to flow in the solenoid coil during periods of inactivity. The idle current may be sufficient to cause warming of the solenoid coil, yet not sufficient to activate the solenoid to an engaged position. The method further may include commanding a first current level to flow in the solenoid coil to rapidly activate the solenoid, and commanding a second current level to flow in the solenoid coil after the solenoid is activated.
Opening claim text (preview).
What is claimed is: 1. A method of controlling a dispensing unit used to dispense material on a substrate, the method comprising: connecting a solenoid coil of a pneumatically-driven pump to an amplifier output of a dispensing system; and driving the solenoid coil with the amplifier to a cause the pneumatically-driven pump to dispense material on a substrate. 2. The method of claim 1 , further comprising commanding an idle current to flow in the solenoid coil during periods of inactivity. 3. The method of claim 2 , wherein the idle current is sufficient to cause warming of the solenoid coil, yet not sufficient to activate the solenoid to an engaged position. 4. The method of claim 1 , further comprising commanding a first current level to flow in the solenoid coil to rapidly activate the solenoid, and commanding a second current level to flow in the solenoid coil after the solenoid is activated. 5. The method of claim 4 , wherein the second current level is sufficient to maintain the solenoid in the activated state. 6. The method of claim 5 , wherein the second current level is less than the first current level. 7. The method of claim 6 , further comprising commanding a third current level to flow in the solenoid coil. 8. The method of claim 7 , wherein the third current level is of opposite polarity than the second current level and of a magnitude sufficiently small so as not to cause the solenoid to activate. 9. The method of claim 8 , further comprising commanding an idle current to flow in the solenoid coil during periods of inactivity. 10. The method of claim 9 , wherein the idle current is sufficient to cause warming of the solenoid coil, yet not sufficient to activate the solenoid to an engaged position. 11. The method of claim 1 , wherein the dispensing unit is configured to dispense viscous material on an electronic substrate.
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