Oven controlled MEMS oscillator

Patent metadata

Field	Value
Publication number	US-10069500-B2
Application number	US-201615209875-A
Country	US
Kind code	B2
Filing date	Jul 14, 2016
Priority date	Jul 14, 2016
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

An oven controlled MEMS timing device that includes a very small oscillator that can be heated very rapidly with very low power. The MEMS device includes a rectangular frame, a heated platform positing in the frame, and a pair of support beams that extend from the rectangular frame and hold the platform within a cavity of the frame to thermally isolate the platform. Moreover, the device includes a resonator attached to the platform by a pair of anchor beams, a heater that heats the platform to maintain a target temperature for the resonator and a thermistor that measures a temperature of the platform to provide a control loop for the heater.

First claim

The invention claimed is:

1. An oven controlled MEMS oscillator comprising:
a frame;
a platform disposed within the frame;
at least one support beam extending from the frame and affixed to one end of the platform to hold the platform within a cavity of the frame such that the platform is thermally isolated from the frame;
a resonator coupled to the platform by at least a pair of anchor beams;
a temperature sensor disposed on the platform at least between the one end of the platform and the resonator; and
a heater configured to heat the platform and maintain a target temperature in response to a temperature measured by the temperature sensor,
wherein the resonator is disposed in a center of the platform and the temperature sensor is disposed between the resonator and the at least one support beam.

2. The oven controlled MEMS oscillator according to claim 1 , wherein the platform, the resonator, and the at least one support beam are all disposed in a same plane.

3. The oven controlled MEMS oscillator according to claim 1 , wherein the heater and the temperature sensor are formed by a same metal deposition.

4. The oven controlled MEMS oscillator according to claim 1 , wherein the at least one support beam comprises a pair of support beams extending from the frame and affixed to respective sides of the one end of the platform.

5. The oven controlled MEMS oscillator according to claim 4 , wherein the heater is disposed on the one end of the platform between the respective sides where the pair of support beams are affixed to platform.

6. The oven controlled MEMS oscillator according to claim 1 , wherein the temperature sensor comprises a serpentine shape thermistor and is disposed on opposing sides of the resonator.

7. An oven controlled MEMS oscillator comprising:
a frame;
a platform disposed within the frame;
at least one support beam extending from the frame and affixed to one end of the platform to hold the platform within a cavity of the frame such that the platform is thermally isolated from the frame;
a resonator coupled to the platform by at least a pair of anchor beams;
a temperature sensor disposed on the platform at least between the one end of the platform and the resonator; and
a heater configured to heat the platform and maintain a target temperature in response to a temperature measured by the temperature sensor,
wherein the heater comprises a pair of heating elements disposed on the pair of support beams, respectively.

8. An oven controlled MEMS oscillator comprising:
a frame;
a platform disposed within the frame;
at least one support beam extending from the frame and affixed to one end of the platform to hold the platform within a cavity of the frame such that the platform is thermally isolated from the frame;
a resonator coupled to the platform by at least a pair of anchor beams;
a temperature sensor disposed on the platform at least between the one end of the platform and the resonator; and
a heater configured to heat the platform and maintain a target temperature in response to a temperature measured by the temperature sensor,
wherein the frame comprises a silicon-on-insulator layer and the resonator and the platform are etched in the silicon-on-insulator layer of the frame.

9. The oven controlled MEMS oscillator according to claim 1 , wherein the pair of anchor beams are coupled to opposing sides of the resonator adjacent to a nodal point of the resonator.

10. The oven controlled MEMS oscillator according to claim 1 , wherein a width of the platform between an edge of the platform and the resonator is at least two times a thickness of the platform.

11. An oven controlled MEMS oscillator comprising:
a frame;
a platform disposed within the frame;
at least one support beam extending from the frame and affixed to one end of the platform to hold the platform within a cavity of the frame such that the platform is thermally isolated from the frame;
a resonator coupled to the platform by at least a pair of anchor beams;
a temperature sensor disposed on the platform at least between the one end of the platform and the resonator;
a heater configured to heat the platform and maintain a target temperature in response to a temperature measured by the temperature sensor; and
a resonator cap bonded to the frame by a metal ring.

12. The oven controlled MEMS oscillator according to claim 1 , wherein the resonator is bulk acoustic mode resonator.

13. A timing device comprising:
a carrier;
oscillation circuitry disposed on the carrier
an oven lid affixed to the carrier to form a first oven covering the oscillation circuitry;
a first heater disposed on the carrier and configured to heat the first oven to a first temperature;
a MEMS oven controlled resonator disposed on the carrier and electrically coupled to the oscillation circuitry, the MEMS oven controlled resonator including:
a substrate,
a rectangular frame disposed on the substrate,
a resonator cap attached to the rectangular frame to form a second oven,
a platform disposed within the frame,
at least one support beam configured to hold the platform within a cavity of the frame,
a resonator coupled to the platform,
a temperature sensor disposed on the platform at least between the one end of the platform and the resonator, and
a second heater configured to heat the platform to maintain the second oven at a second temperature higher than the first temperature in response to a temperature measured by the temperature sensor.

14. The timing device according to claim 13 , wherein the resonator is coupled to the platform by a pair of anchor beams disposed on opposing first sides of the resonator.

15. The timing device according to claim 13 , wherein the at least one support beam comprises a pair of support beams that extend from the rectangular frame and are affixed to respective sides of the one end of the platform to hold the platform within a cavity of the frame such that the platform is thermally isolated from the frame.

16. The timing device according to claim 13 , wherein the platform, the resonator, and the at least one support beam of the MEMS oven controlled resonator are all disposed in a same plane.

17. The timing device according to claim 13 , wherein the second heater and the temperature sensor of the MEMS oven controlled resonator are formed by a same metal deposition.

18. The timing device according to claim 13 , wherein the second heater is disposed on the one end of the platform between the at least one support beam and the resonator.

19. The timing device according to claim 13 , wherein the second heater comprises a pair of heating elements disposed on the pair of support beams, respectively, of the MEMS oven controlled resonator.

Assignees

• Murata Manufacturing Co

Inventors

• Kaajakari Ville

Classifications

• H03H9/02

  Details · CPC title

• H03H9/02102

  of temperature influence (cutting angles H03H9/02015) · CPC title

• H03H9/02448

  of temperature influence · CPC title

• H03L1/04 Primary

  Constructional details for maintaining temperature constant · CPC title

• H03L1/028

  of generators comprising piezoelectric resonators (H03L1/021, H03L1/022 take precedence; oscillation generators with a piezoelectric resonator H03B5/32) · CPC title