Laser welding transparent glass sheets using low melting glass or thin absorbing films

Patent metadata

Field	Value
Publication number	US-10069104-B2
Application number	US-201715655194-A
Country	US
Kind code	B2
Filing date	Jul 20, 2017
Priority date	May 10, 2013
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

A method of sealing a workpiece comprising forming an inorganic film over a surface of a first substrate, arranging a workpiece to be protected between the first substrate and a second substrate wherein the inorganic film is in contact with the second substrate; and sealing the workpiece between the first and second substrates as a function of the composition of impurities in the first or second substrates and as a function of the composition of the inorganic film by locally heating the inorganic film with a predetermined laser radiation wavelength. The inorganic film, the first substrate, or the second substrate can be transmissive at approximately 420 nm to approximately 750 nm.

First claim

We claim:

1. A bonding method comprising:
forming an inorganic film over a surface of a first substrate;
positioning a second substrate in contact with the inorganic film; and
locally heating the inorganic film with laser radiation having a predetermined wavelength to form a weld region comprising a bond between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate,
wherein the inorganic film comprises at least one inorganic film element and wherein one or both of the first and second substrates comprises at least one inorganic substrate element; and
wherein a first inorganic film element concentration of the first or second substrate in the weld region is higher than a second inorganic film element concentration of the first or second substrate outside the weld region.

2. The method of claim 1 , further comprising arranging workpiece between the first and second substrates prior to locally heating the inorganic film with laser radiation.

3. The method of claim 1 , wherein the bond between the first and second substrates is formed as a function of the composition of impurities in the first or second substrates and as a function of the composition of the inorganic film through the local heating of the inorganic film with laser radiation having the predetermined wavelength.

4. The method of claim 1 , further comprising forming a second inorganic film over a surface of the second substrate.

5. The method of claim 1 , wherein the at least one inorganic film element is chosen from F, P, Sn, B, Bi, Zn, Ti, W, Ce, Nb, Pb, Fe, Va, Cr, Mn, Mg, Ge, and combinations thereof.

6. The method of claim 1 , wherein the first inorganic film element concentration is at least about 5 mol % higher than the second inorganic film element concentration.

7. The method of claim 1 , wherein a first substrate element concentration of the weld region is higher than a second substrate element concentration of the inorganic film outside the weld region.

8. The method of claim 7 , wherein the at least one inorganic substrate element is chosen from Al, B, Si, Na, Li, K, Mg, Ca, Ba, and combinations thereof.

9. The method of claim 7 , wherein the first substrate element concentration is at least about 30 mol % higher than the second substrate element concentration.

10. The method of claim 1 , wherein the inorganic film has the following composition:
20-100 mol % SnO;
0-50 mol % SnF 2 ; and
0-30 mol % P 2 O 5 or B 2 O 3 .

11. The method of claim 1 , wherein the inorganic film has the following composition:
10-80 mol % B 2 O 3 ;
5-60 mol % Bi 2 O 3 ; and
0-70 mol % ZnO.

12. A bonding method comprising:
forming an inorganic film over a surface of a first substrate;
positioning a second substrate in contact with the inorganic film; and
locally heating the inorganic film with laser radiation having a predetermined wavelength to form a weld region comprising a bond between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate,
wherein the inorganic film comprises at least one inorganic film element and wherein one or both of the first and second substrates comprises at least one inorganic substrate element; and
wherein a first substrate element concentration of the weld region is higher than a second substrate element concentration of the inorganic film outside the weld region.

13. The method of claim 12 , further comprising arranging a workpiece between the first and second substrates prior to locally heating the inorganic film with laser radiation.

14. A bonding method comprising:
forming an inorganic film over a surface of a first substrate;
positioning a second substrate in contact with the inorganic film; and
locally heating the inorganic film with laser radiation having a predetermined wavelength to form a stress region comprising a bond between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate,
wherein a first stress in the stress region is greater than a second stress outside of the stress region.

15. The method of claim 14 , further comprising arranging workpiece between the first and second substrates prior to locally heating the inorganic film with laser radiation.

16. The method of claim 14 , wherein the bond between the first and second substrates is formed as a function of the composition of impurities in the first or second substrates and as a function of the composition of the inorganic film through the local heating of the inorganic film with laser radiation having the predetermined wavelength.

17. The method of claim 14 , further comprising forming a second inorganic film over a surface of the second substrate.

18. The method of claim 14 , wherein the first stress ranges from greater than about 1 MPa to about 25 MPa.

19. The method of claim 14 , wherein a ratio of the first stress to the second stress ranges from about 1.1:1 to about 25:1.

20. The method of claim 14 , wherein the stress region has a thickness ranging from about 20 microns to about 500 microns.

21. A sealed device comprising:
an inorganic film formed over a surface of a first substrate;
a second substrate in contact with the inorganic film; and
a stress region comprising a bond formed between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate,
wherein a first stress in the stress region is greater than a second stress outside of the stress region.

22. The sealed device of claim 21 , wherein the inorganic film, and optionally at least one of the first or second substrates is transmissive at wavelengths ranging from about 420 nm to about 750 nm.

23. The sealed device of claim 21 , wherein at least one of the first or second substrates comprises a glass, glass-ceramic, ceramic, polymer, or metal.

24. The sealed device of claim 21 , further comprising a second inorganic film formed over a surface of the second substrate.

25. The sealed device of claim 21 , wherein the inorganic film has a thickness ranging from about 0.1 microns to about 10 microns.

26. The sealed device of claim 21 , wherein the inorganic film has the following composition:
20-100 mol % SnO;
0-50 mol % SnF 2 ; and
0-30 mol % P 2 O 5 or B 2 O 3 .

27. The sealed device of claim 21 , wherein the inorganic film has the following composition:
10-80 mol % B 2 O 3 ;
5-60 mol % Bi 2 O 3 ; and
0-70 mol % ZnO.

28. The sealed device of claim 21 , wherein the stress region has a thickness ranging from about 20 microns to about 500 microns.

29. The sealed device of claim 21 , wherein the first stress ranges from greater than about 1 MPa to about 25 MPa.

30. The sealed device of claim 21 , wherein a ratio of the first stress to the second stress ranges from about 1.1:1 to about 25:1.

Assignees

• Corning Inc

Inventors

• Dabich Ii Leonard Charles
• Logunov Stephan Lvovich
• Quesada Mark Alejandro
• Streltsov Alexander Mikhailovich

Classifications

• C03C23/0025

  by a laser beam · CPC title

• B32B17/06

  comprising glass as the main or only constituent of a layer, next to another layer of a specific {material} · CPC title

• C03C8/08

  containing phosphorus · CPC title

• B32B37/06

  characterised by the heating method · CPC title

• C03B23/203

  Uniting glass sheets (C03B23/24 takes precedence) · CPC title