Method of forming an infrared photodetector

Patent metadata

Field	Value
Publication number	US-10069032-B2
Application number	US-201615287218-A
Country	US
Kind code	B2
Filing date	Oct 6, 2016
Priority date	Aug 4, 2014
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

A low noise infrared photodetector has an epitaxial heterostructure that includes a photodiode and a transistor. The photodiode includes a high sensitivity narrow bandgap photodetector layer of first conductivity type, and a collection well of second conductivity type in contact with the photodetector layer. The transistor includes the collection well, a transfer well of second conductivity type that is spaced from the collection well and the photodetector layer, and a region of first conductivity type between the collection and transfer wells. The collection well and the transfer well are of different depths, and are formed by a single diffusion.

First claim

The invention claimed is:

1. A method of forming an infrared photodetector, the method comprising:
depositing a first small bandgap layer of first conductivity type;
depositing a large bandgap layer of first conductivity type on the first small bandgap layer of first conductivity type;
forming a standoff layer on a portion of the large bandgap layer; and
forming, by a single diffusion step, a collection well of second conductivity type located in the large bandgap layer and the first small bandgap layer, and a transfer well of second conductivity type located in the large bandgap layer and spaced from the collection well and the first small bandgap layer.

2. The method of claim 1 and further comprising:
forming electrodes overlying the collection well, the transfer well, and a region between the collection well and the transfer well.

3. The method of claim 2 , wherein electrodes comprise Ti, Pt, Au, Ni, Cu, or combinations thereof.

4. The method of claim 1 , wherein forming the standoff layer comprises:
depositing a second small bandgap layer on the large bandgap layer; and
selectively removing a portion of the second small bandgap layer to define the standoff layer.

5. The method of claim 1 , wherein forming, by a single diffusion step, comprises:
depositing an insulator layer over the large bandgap layer and the standoff layer;
forming an opening in the insulator layer over a portion of the large bandgap layer to define a location of the collection well;
forming an opening in the insulator layer over the standoff layer to define a location of the transfer well; and
diffusing a dopant through the openings in the insulator layer to form the collection well and the transfer well.

6. The method of claim 5 , wherein the collection well extends to a top surface of the large bandgap layer.

7. The method of claim 5 , wherein the transfer well extends to a top surface of the standoff layer.

8. The method of claim 1 , wherein the first small bandgap layer and the standoff layer comprise InGaAs, and the large bandgap layer comprises InP.

9. A method of forming an infrared photodetector, the method comprising:
depositing a first small bandgap layer of first conductivity type;
depositing a large bandgap layer of first conductivity type on the first small bandgap layer of first conductivity type;
depositing a second small bandgap layer on the large bandgap layer; and
selectively removing a portion of the second small bandgap layer; and
forming, by a single diffusion step, a collection well of second conductivity type located in the large bandgap layer and the first small bandgap layer, and a transfer well of second conductivity type located in the second small bandgap layer and the large bandgap layer and spaced from the collection well and the first small bandgap layer.

10. The method of claim 9 and further comprising:
forming electrodes overlying the collection well, the transfer well, and a region between the collection well and the transfer well.

11. The method of claim 10 , wherein electrodes comprise Ti, Pt, Au, Ni, Cu, or combinations thereof.

12. The method of claim 9 , wherein forming, by a single diffusion step, comprises:
depositing an insulator layer over the large bandgap layer and the second small bandgap layer;
forming an opening in the insulator layer over a portion of the large bandgap layer to define a location of the collection well;
forming an opening in the insulator layer over the second small bandgap layer to define a location of the transfer well; and
diffusing a dopant through the openings in the insulator layer to form the collection well and the transfer well.

13. The method of claim 9 , wherein the collection well extends to a top surface of the large bandgap layer and wherein the transfer well extends to a top surface of the second small bandgap layer.

14. The method of claim 9 , wherein the first small bandgap layer and the standoff layer comprise InGaAs, and the large bandgap layer comprises InP.

15. A method of forming an infrared photodetector, the method comprising:
depositing a first small bandgap layer of first conductivity type;
depositing a large bandgap layer of first conductivity type on the first small bandgap layer of first conductivity type;
forming a second small bandgap layer on a portion of the large bandgap layer;
depositing an insulator layer over the large bandgap layer and the second small bandgap layer;
forming an opening in the insulator layer over a portion of the large bandgap layer to define a location of the collection well;
forming an opening in the insulator layer over the second small bandgap layer to define a location of the transfer well; and
diffusing a dopant through the openings in the insulator layer to form, by a single diffusion step, a collection well of second conductivity type located in the large bandgap layer and the first small bandgap layer, and a transfer well of second conductivity type located in the second small bandgap layer and the large bandgap layer and spaced from the collection well and the first small bandgap layer.

16. The method of claim 15 and further comprising:
forming electrodes overlying the collection well, the transfer well, and a region between the collection well and the transfer well.

17. The method of claim 16 , wherein electrodes comprise Ti, Pt, Au, Ni, Cu, or combinations thereof.

18. The method of claim 15 , wherein the collection well extends to a top surface of the large bandgap layer.

19. The method of claim 15 , wherein the transfer well extends to a top surface of the second small bandgap layer.

20. The method of claim 15 , wherein the first small bandgap layer and the second small bandgap layer comprise InGaAs, and the large bandgap layer comprises InP.

Assignees

• Sensors Unlimited Inc

Inventors

• Dixon Peter
• Masaun Navneet

Classifications

• H01L31/1127

  Electricity · mapped topic

• H01L27/14649

  Electricity · mapped topic

• H01L31/1844 Primary

  Electricity · mapped topic

• H01L31/022408

  Electricity · mapped topic

• H01L27/14694

  Electricity · mapped topic