Radiation detector, and method for producing radiation detector

Patent metadata

Field	Value
Publication number	US-10061035-B2
Application number	US-201415030412-A
Country	US
Kind code	B2
Filing date	Oct 10, 2014
Priority date	Nov 15, 2013
Publication date	Aug 28, 2018
Grant date	Aug 28, 2018

Abstract

A radiation detector has a photoelectric conversion element array having a light receiving unit and a plurality of bonding pads; a scintillator layer stacked on the photoelectric conversion element array; a resin frame formed on the photoelectric conversion element array so as to pass between the scintillator layer and the bonding pads away from the scintillator layer and the bonding pads and so as to surround the scintillator layer; and a protection film covering the scintillator layer and having an outer edge located on the resin frame; a first distance between an inner edge of the resin frame and an outer edge of the scintillator layer is shorter than a second distance between an outer edge of the resin frame and an outer edge of the photoelectric conversion element array; the outer edge and a groove are processed with a laser beam.

First claim

The invention claimed is:

1. A radiation detector comprising:
a photoelectric conversion element array having a light receiving unit including a plurality of photoelectric conversion elements one-dimensionally or two-dimensionally arrayed, and a plurality of bonding pads electrically connected to the photoelectric conversion elements and arranged outside the light receiving unit;
a scintillator layer stacked on the photoelectric conversion element array so as to cover the light receiving unit and configured to convert radiation into light;
a resin frame formed on the photoelectric conversion element array, when viewed from a stacking direction of the scintillator layer, so as to pass between the scintillator layer and the bonding pads away from the scintillator layer and the bonding pads and so as to surround the scintillator layer;
a protection film covering the scintillator layer and having an outer edge located on the resin frame; and
a coating resin layer arranged along the resin frame so as to cover the outer edge of the protection film,
wherein a first distance is a distance between an inner edge of the resin frame and an outer edge of the scintillator layer, and a second distance between an outer edge of the resin frame and an outer edge of the photoelectric conversion element array, and a ratio of the second distance to the first distance is not less than 5,
wherein the outer edge of the protection film and a corresponding region of the resin frame corresponding to the outer edge of the protection film are in a processed state with a laser beam,
wherein the outer edge of the protection film and the corresponding region are finely corrugated when viewed from the stacking direction, and
wherein the corresponding region is a groove formed at the resin frame.

2. The radiation detector according to claim 1 ,
wherein a height of the corresponding region is not more than one third of a height of the resin frame.

3. The radiation detector according to claim 1 ,
wherein the resin frame is formed so that a central portion thereof is higher than two edge portions thereof and wherein a height of the resin frame is lower than a height of the scintillator layer.

4. The radiation detector according to claim 3 ,
wherein a width between the inner edge of the resin frame and the outer edge of the resin frame is not more than 900 μm, and
wherein the height of the resin frame is not more than 450 μm.

5. The radiation detector according to claim 1 ,
wherein the outer edge of the protection film and the corresponding region processed with the laser beam are formed in a substantially rectangular ring shape with arcuate corners convex outward, when viewed from the stacking direction.

6. The radiation detector according to claim 1 ,
wherein a peripheral portion of the scintillator layer is formed in a taper shape with heights gradually decreasing toward the outside of the scintillator layer.

7. The radiation detector according to claim 1 ,
wherein the protection film includes a metal film to reflect light.

8. A method for producing a radiation detector, comprising:
a step of preparing a photoelectric conversion element array having a light receiving unit including a plurality of photoelectric conversion elements one-dimensionally or two-dimensionally arrayed, and a plurality of bonding pads electrically connected to the photoelectric conversion elements and arranged outside the light receiving unit, and stacking a scintillator layer for converting radiation into light, on the photoelectric conversion element array so as to cover the light receiving unit;
a step of forming a resin frame on the photoelectric conversion element array, when viewed from a stacking direction of the scintillator layer, so as to pass between the scintillator layer and the bonding pads away from the scintillator layer and the bonding pads and so as to surround the scintillator layer;
a step of forming a protection film so as to cover an entire surface at least on a side where the scintillator layer is stacked on the photoelectric conversion element array, the protection film having an outer edge located on the resin frame;
a step of irradiating the protection film along the resin frame with a laser beam to cut the protection film, thereby removing an outside portion of the protection film; and
a step of forming a coating resin layer arranged along the resin frame so as to cover the outer edge of the protection film,
wherein in the step of forming the resin frame, the resin frame is formed so that a first distance is a distance between an inner edge of the resin frame and an outer edge of the scintillator layer, and a second distance is a distance between an outer edge of the resin frame and an outer edge of the photoelectric conversion element array, and a ratio of the second distance to the first distance is not less than 5,
wherein the outer edge of the protection film and a corresponding region of the resin frame corresponding to the outer edge of the protection film are in a processed state with a laser beam,
wherein the outer edge of the protection film and the corresponding region are finely corrugated when viewed from the stacking direction, and
wherein the corresponding region is a groove formed at the resin frame.

9. A method for producing a radiation detector according to claim 8 , wherein the laser beam is a laser beam of the carbon dioxide laser.

10. A method for producing a radiation detector according to claim 8 , wherein the protection film includes poly-para-xylylene organic films.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Kurebayashi Syouji

Classifications

• H01L27/1462

  Electricity · mapped topic

• H01L27/14618

  Electricity · mapped topic

• H01L27/14663

  Electricity · mapped topic

• H01L27/14629

  Electricity · mapped topic

• H01L27/14685

  Electricity · mapped topic