Fabrication of enclosed nanochannels using silica nanoparticles

Patent metadata

Field	Value
Publication number	US-10060904-B1
Application number	US-201514868128-A
Country	US
Kind code	B1
Filing date	Sep 28, 2015
Priority date	Oct 17, 2005
Publication date	Aug 28, 2018
Grant date	Aug 28, 2018

Abstract

In accordance with the disclosure, a method of forming a nanochannel is provided. The method includes depositing a photosensitive film stack over a substrate; forming a pattern on the film stack using interferometric lithography; depositing a plurality of silica nanoparticles to form a structure over the pattern; removing the pattern while retaining the structure formed by the plurality of silica nanoparticles, wherein the structure comprises one or more enclosed nanochannels, wherein each of the one or more nanochannels comprise one or more sidewalls and a roof; and partially sealing the roof of one or more nanochannels, wherein the roof comprises no more than one unsealed nanochannel per squared micron.

First claim

What is claimed is:

1. A method for a manipulating a target molecule comprising:
providing at least one nanochannel having a partially sealed porous roof comprising a plurality of exposed unsealed pores and a plurality of tortuous nanopores;
introducing a sample comprising the target molecule to the nanochannel; and
allowing the target molecule to travel through the tortuous nanopores in the partially sealed porous roof before or after the target molecule travels through the nanochannel,
wherein the sample is introduced to the at least one nanochannel by placing the sample on the roof, thus forcing the target molecule to travel through the tortuous nanopores prior to traveling through the nanochannel.

2. The method of claim 1 , wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores to reduce the translocation speed of the target molecule.

3. The method of claim 1 , wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores in the partially sealed porous roof such that they are spread out to a density of less than 1/μm 2 .

4. The method of claim 1 , further comprising applying a potential along the at least one nanochannel to control transport of the target molecule within the at least one nanochannel.

5. The method of claim 1 , further comprising applying a potential above the roof of the at least one nanochannel to move the target molecule from the region above the nanochannel through the roof.

6. The method of claim 5 , further comprising adjusting the field strength of the electric field.

7. The method of claim 5 , further comprising adjusting the length of time the electric field is applied.

8. The method of claim 1 , wherein a variety of potentials is applied to impact the motion of the target molecule within the at least one nanochannel, through the tortuous pores of the roof, and in a region on the roof of the at least one nanochannel.

9. The method of claim 1 , wherein the at least one nanochannel comprises top and bottom layers of nanochannels, and further comprising applying an electric field between the top and bottom layers of nanochannels to drive molecules across the porous roof.

10. The method of claim 1 , wherein the target molecule comprises a long-chain molecule.

11. The method of claim 1 , wherein the target molecule is a biological molecule.

12. The method of claim 1 , wherein the target molecule comprises DNA.

13. The method of claim 1 , wherein the target molecule comprises RNA.

14. The method of claim 1 , wherein the target molecule comprises a protein.

15. A method for a manipulating a target molecule comprising:
providing at least one nanochannel having a partially sealed porous roof comprising a plurality of exposed unsealed pores and a plurality of tortuous nanopores;
introducing a sample comprising the target molecule to the nanochannel; and
allowing the target molecule to travel through the tortuous nanopores in the partially sealed porous roof before or after the target molecule travels through the nanochannel,
wherein the target molecule exits the at least one nanochannel through the roof, thus forcing the target molecule to travel through the tortuous nanopores after traveling through the nanochannel.

16. The method of claim 15 , further comprising applying a potential across the roof of the at least one nanochannel to control translocation of the target molecule through the tortuous nanopores of the roof from an interior of the nanochannel to a region above the roof.

17. The method of claim 15 , wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores to reduce the translocation speed of the target molecule.

18. The method of claim 15 , wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores in the partially sealed porous roof such that they are spread out to a density of less than 1/μm 2 .

19. The method of claim 15 , wherein the target molecule comprises a long-chain molecule.

20. The method of claim 15 , wherein the target molecule is a biological molecule.

Assignees

• Brueck Steven R J
• Kuznetsova Yuliya
• Neumann Alexander
• Stc Unm

Inventors

• Brueck Steven R J
• Kuznetsova Yuliya
• Neumann Alexander

Classifications

• G01N27/447

  using electrophoresis · CPC title

• G01N33/48721 Primary

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• B81C2201/0159

  Lithographic techniques not provided for in B81C2201/0157 · CPC title

• G03F7/2051

  Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source (G03F7/70 takes precedence) · CPC title

• B81C1/00071

  Channels · CPC title