A process for electrochemical deposition of copper with different current densities
US-2024183052-A1 · Jun 6, 2024 · US
US10060034B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10060034-B2 |
| Application number | US-201715412464-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 23, 2017 |
| Priority date | Jan 23, 2017 |
| Publication date | Aug 28, 2018 |
| Grant date | Aug 28, 2018 |
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Electroless copper plating compositions including (a) copper ions, (b) a complexing agent for copper ions, (c) a reducing agent, (d) a pH adjustor and (e) a stabilizer is disclosed. The stabilizer has a specific chemical structure, and contributes to stable an electroless copper plating composition from decomposition.
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What is claimed is: 1. An electroless copper plating composition comprising (a) a copper ion, (b) a complexing agent for copper ion, (c) a reducing agent, (d) a pH adjustor and (e) a stabilizer compound chosen from one or more of 3 ethyl-2-thioxo-4-oxazolidinone and 5-(4-pyridyl)-1,3,4-oxadiazole-2-thiol. 2. The electroless copper plating composition of claim 1 , wherein the amount of the stabilizer compound is from 0.01 to 1000 ppm. 3. The electroless copper plating composition of claim 1 , wherein the complexing agent is tartrate. 4. A method for forming a copper film on a substrate comprising the step of: contacting a substrate with a composition comprising (a) a copper ion, (b) a complexing agent for copper ion, (c) a reducing agent, (d) a pH adjustor and (e) a stabilizer compound chosen from one or more of 3-ethyl-2-thioxo-4-oxazolidinone and 5-(4-pyridyl)-1,3,4-oxadiazole-2-thiol.
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