Laminate, release agent composition, and method for manufacturing processed semiconductor substrate
US-2024208179-A1 · Jun 27, 2024 · US
US10059864B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10059864-B2 |
| Application number | US-201715664942-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 31, 2017 |
| Priority date | Nov 7, 2014 |
| Publication date | Aug 28, 2018 |
| Grant date | Aug 28, 2018 |
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Disclosed are a suspension fluid and a method for preparing the suspension fluid. Particularly, the suspension fluid is prepared by dispersing fumed silica particles in a solvent that includes one or more compounds selected from the group consisting of ethylene glycol and propylene glycol, and water. The phase-change suspension fluid obtained from the present invention is a shear thickening fluid that have a constant Newtonian behavior at a low rate of shear or a low frequency band, and further have a non-Newtonian behavior as a solid-like suspension at a high rate of shear or a high frequency band due to an increase in viscosity. In addition, the phase-change suspension fluid may reversibly change its phase with vibration of a vehicle, thereby providing advantages of both of the hydro bushes and the solid type bushes.
Opening claim text (preview).
What is claimed is: 1. A method for preparing a phase-change suspension fluid, comprising: (i) preparing a suspension fluid by adding and dispersing fumed silica particles in a solvent including one or more compounds selected from the group consisting of ethylene glycol and propylene glycol, and water; (ii) sonicating the suspension fluid; and (iii) removing air from the sonicated suspension fluid by placing the sonicated suspension fluid in a vacuum chamber. 2. The method of claim 1 , wherein the step of (ii) for sonicating the suspension fluid is performed for about 9 to 12 hours. 3. The method of claim 1 , wherein the step of (iii) for removing air is performed for about 9 to 12 hours.
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