Thermal oxide equivalent low temperature ALD oxide for dual purpose gate oxide and method for producing the same
US-10106892-B1 · Oct 23, 2018 · US
US10059597B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10059597-B2 |
| Application number | US-201615564641-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 31, 2016 |
| Priority date | Jan 19, 2016 |
| Publication date | Aug 28, 2018 |
| Grant date | Aug 28, 2018 |
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The present invention relates to a method for manufacturing an aerogel sheet. The method for manufacturing an aerogel sheet includes: a step (a) of immersing a blanket in an impregnation vessel in which silica sol is stored to impregnate the silica sol; and a step (b) of injecting a gelling catalyst to a surface of the blanket in which the silica sol is impregnated to gelate the silica sol.
Opening claim text (preview).
The invention claimed is: 1. A method for manufacturing an aerogel sheet, the method comprising: a step (a) of immersing a blanket in an impregnation vessel in which a silica sol is stored to impregnate the blanket with the silica sol; and a step (b) of injecting a gelling catalyst prepared by mixing 0.5 kg ethanol and 30 mL ammonia water (NH 4 OH) to a surface of the blanket in which the silica sol is impregnated to gelate the silica sol, wherein the step (b) and the step (a) are performed within a conveyor belt that transfers the blanket from one side to the other side thereof, wherein the conveyor belt comprises a scraper comprising a first scraper adjusting a thickness of the silica sol on the surface of the blanket and a second scraper adjusting a thickness of the gelling catalyst injected to the surface of the blanket, wherein, in the step (b), the gelling catalyst is injected to the surface of the blanket at a rate of 0.035 L/min to 0.012 L/min to leave the gelling catalyst for 8 minutes to 12 minutes and thereby to gelate the silica sol, and wherein a catalyst supply member adjusts the gelation of the silica sol by varying the injection rate of the gelling catalyst according to density of the silica sol impregnated in the blanket. 2. The method of claim 1 , wherein, in the step (a), tetraethyl orthosilicate (TEOS) and ethanol are mixed to prepare the silica sol. 3. The method of claim 2 , wherein the tetraethyl orthosilicate (TEOS) comprises hydrolyzed TEOS. 4. The method of claim 1 , after the step (b), further comprising a step (c) of aging the blanket in which the silica sol is gelated. 5. The method of claim 4 , wherein, in the step (c), the blanket in which the silica sol is gelated is aged at a temperature of 70° C. and aged for 50 minutes. 6. The method of claim 4 , wherein, in the step (c), the blanket in which the silica sol is gelated is left at room temperature for 10 minutes to perform the aging. 7. The method of claim 4 , after the step (c), further comprising a step (d) of injecting a surface modification solution to the surface of the aged blanket and reacting at a temperature of 70° C. for one hour in a reaction vessel to modify a surface of the blanket. 8. The method of claim 7 , wherein, in the step (d), the surface modification solution comprises hexamethyldisilazane (HMDS). 9. The method of claim 7 , after the step (d), further comprising a step (e) of drying the blanket of which the surface is modified. 10. The method of claim 9 , wherein the step (e) comprises a first drying step of injecting carbon dioxide at a rate of 70 L/min for ten minutes under environments of a temperature of 28° C. and a pressure of 70 bar to dry the blanket of which the surface is modified, a second drying step of raising to a temperature of 50° C. for 1 hour and 20 minutes to dry the blanket, a third drying step of injecting carbon dioxide at a rate of 0.7 L/min for 20 minutes under a temperature of 50° C. and a pressure of 150 bar to dry the blanket again, waiting for 20 minutes, and a fourth drying step of injecting carbon dioxide at a rate of 0.7 L/min for 20 minutes to dry the blanket. 11. The method of claim 10 , wherein, in the third drying step of the step (e), the ethanol generated from the blanket of which the surface is modified is collected while injecting the carbon dioxide. 12. The method of claim 10 , wherein the step (e) further comprises a step of discharging the carbon dioxide for 2 hours after the fourth drying step. 13. The method of claim 12 , wherein the steps (c), (d), and (e) are performed in a reaction vessel accommodating the blanket. 14. The method of claim 13 , wherein, in the step (e), the blanket undergoes supercritical drying in the state of being accommodated in the reaction vessel. 15. An apparatus of manufacturing an aerogel sheet, the apparatus comprising: a supply roller around which a blanket is wound in the form of roll; an impregnation vessel in which the blanket wound around the supply roller is immersed in stored silica sol to impregnate silica sol; a conveyor belt transferring the blanket passing through the impregnation vessel from one side to the other side thereof; a catalyst supply member injecting a stored gelling catalyst to a surface of the blanket disposed on the conveyor belt to gelate the silica sol; a collection roller winding the blanket, which is transferred up to the other side by the conveyor belt, in the form of the roll to collect the blanket; and a reaction vessel which accommodates the blanket collected by the collection roller and in which the accommodated blanket is aged, surface-modified by injecting a surface modification solution, or dried at a temperature from 28° C. to 50° C., wherein the conveyor belt comprises a scraper comprising a first scraper adjusting a thickness of the silica sol on the surface of the blanket and a second scraper adjusting a thickness of the gelling catalyst injected to the surface of the blanket, wherein the gelling catalyst prepared by mixing 0.5 kg ethanol and 30 mL ammonia water (NH 4 OH) is injected to the surface of the blanket at a rate of 0.035 L/min to 0.012 L/min to leave the gelling catalyst for 8 minutes to 12 minutes to thereby gelate the silica sol, and wherein the catalyst supply member adjusts the gelation of the silica sol by varying the injection rate of the gelling catalyst according to density of the silica sol impregnated in the blanket.
Dehydration into aerogels · CPC title
Coating or hydrophobisation · CPC title
Coating · CPC title
Post-treatment of applied coatings · CPC title
performed by dipping · CPC title
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