Interrupted structured abrasive article and methods of polishing a workpiece

Patent metadata

Field	Value
Publication number	US-10058970-B2
Application number	US-201515308198-A
Country	US
Kind code	B2
Filing date	Apr 22, 2015
Priority date	May 2, 2014
Publication date	Aug 28, 2018
Grant date	Aug 28, 2018

Abstract

Interrupted structured abrasive articles comprise an abrasive layer comprising shaped abrasive composites that extend outwardly from a first major surface of a backing to which they are secured. The abrasive layer defines at least one open region that is free of the shaped abrasive composites and may extend partially or completely through the backing. In some embodiments, each of the open regions comprises a circular area of at least 1.5 square centimeters, and when combined the open regions have total area that is at least 10 percent of the area of the first major surface of the backing. Interrupted abrasive articles are useful in single-sided polishing processes.

First claim

What is claimed is:

1. A method of polishing a workpiece, the method comprising;
providing a polishing apparatus comprising:
a polishing member rotatable about a central first axis, wherein the polishing member has a first major surface having an area, wherein the first major surface is perpendicular to the first axis, wherein an interrupted structured abrasive article is secured to the first major surface of the polishing member, wherein the interrupted structured abrasive article comprises an abrasive layer disposed on and secured to a backing, wherein the abrasive layer comprises shaped abrasive composites comprising abrasive particles retained in a binder material, wherein at least one outer hole extends through the abrasive layer and the backing wherein the first axis does not pass through any one of the said at least one outer hole, wherein each of said at least one outer hole independently defines a respective open region coplanar with the abrasive layer, wherein the combined total area of the respective open regions of said at least one outer hole totals at least 10 areal percent of the first major surface of the backing; and
a carrier member having a second major surface, wherein the workpiece is removably fastened to the second major surface, wherein the carrier member is independently rotatable about a second axis parallel to the first axis, wherein the workpiece has an outer major surface to be polished that contacts the interrupted structured abrasive article, wherein at least 30 areal percent of the second major surface of the workpiece can be superimposed within the open region corresponding to one of the at least one outer holes, and wherein not more than 90 areal percent of the second major surface of the workpiece can be superimposed on any of the respective open regions of the outer holes; and

rotating the polishing member and the carrier member to abrade the outer major surface of the workpiece.

2. The method of claim 1 wherein the shaped abrasive composites have a substantially uniform depth relative to the backing.

3. The method of claim 1 , wherein the combined total respective open region of said at least one outer hole totals at least 20 areal percent of the first major surface of the backing.

4. The method of claim 1 , wherein said at least one outer hole comprises at least four of the outer holes.

5. A method of polishing a workpiece, the method comprising;
providing a polishing apparatus comprising:
a polishing member rotatable about a first axis, wherein the polishing member has a planar first major surface with an interrupted structured abrasive article secured thereto, wherein the planar first major surface is perpendicular to the first axis, wherein the interrupted structured abrasive article comprises an abrasive layer secured to a first major surface of a backing, wherein the first major surface has an area, wherein the abrasive layer comprises an array of shaped abrasive composites that extend outwardly from the backing, wherein the shaped abrasive composites comprise abrasive particles retained in a binder material, wherein the abrasive layer defines at least one open region that is free of the array of shaped abrasive composites and has a substantially uniform depth relative to the backing; and
a carrier member having a second major surface, wherein the workpiece is removably fastened to the second major surface, and wherein the workpiece has an outer major surface to be polished that contacts the interrupted structured abrasive article, wherein at least 30 areal percent of the second major surface of the workpiece can be superimposed within at least one of the at least one open regions, and wherein not more than 90 areal percent of the second major surface of the workpiece can be superimposed on any one of said at least one open region; and

rotating the polishing member and the carrier member to abrade the outer major surface of the workpiece.

6. The method of claim 5 , wherein the interrupted structured abrasive article has a centrally disposed arbor hole that extends through the abrasive layer and the backing.

7. The method of claim 5 , wherein the shaped abrasive composites have a substantially uniform depth relative to the backing.

8. The method of claim 5 , wherein said at least one open region has a combined total area that is at least 20 areal percent of the first major surface of the backing.

9. The method of claim 5 , wherein said at least one open region comprises at least four of the open regions.

10. The method of claim 5 , wherein the at least one open region comprises at least two concentric rings.

11. An interrupted structured abrasive article comprising an abrasive layer secured to a first major surface of a backing, wherein the first major surface has an area, wherein the abrasive layer comprises an array of shaped abrasive composites that extend outwardly from the backing, wherein the shaped abrasive composites comprise abrasive particles retained in a binder material, wherein the abrasive layer defines at least one open region that is free of the array of shaped abrasive composites and has a substantially uniform depth relative to the backing, wherein each one of said at least one open region comprises a circular area of at least 1.5 square centimeters, and wherein said at least one open region has a combined total area that is at least 10 percent of the area of the first major surface of the backing; wherein the at least one open region comprises at least two concentric rings.

12. The interrupted structured abrasive article of claim 11 , wherein the interrupted structured abrasive article has a centrally disposed arbor hole that extends through the abrasive layer and the backing.

13. The interrupted structured abrasive article of claim 11 , wherein the shaped abrasive composites have a substantially uniform depth relative to the backing.

14. The interrupted structured abrasive article of claim 11 , wherein the array of shaped abrasive composites is a regular array.

15. The interrupted structured abrasive article of claim 11 , wherein the at least one open region has a combined total area that is at least 20 areal percent of the first major surface of the backing.

16. The interrupted structured abrasive article of claim 11 , wherein the at least one open region comprises at least four of the open regions.

Assignees

• 3M Innovative Properties Co

Inventors

• Gagliardi John J
• Romero Vincent D
• Coad Eric C

Classifications

• B24B37/245

  Pads with fixed abrasives · CPC title

• B24B37/22 Primary

  characterised by a multi-layered structure · CPC title

• B24D11/00

  Constructional features of flexible abrasive materials; Special features in the manufacture of such materials · CPC title

• B24B7/228 Primary

  for grinding thin, brittle parts, e.g. semiconductors, wafers (grinding edges of thin, brittle parts B24B9/065) · CPC title

• B24D7/02

  Wheels in one piece · CPC title