Substrate processing apparatus, etching method of metal film, and manufacturing method of magnetoresistive effect element
US-9685299-B2 · Jun 20, 2017 · US
US10057663B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10057663-B2 |
| Application number | US-201615255345-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 2, 2016 |
| Priority date | Feb 28, 2014 |
| Publication date | Aug 21, 2018 |
| Grant date | Aug 21, 2018 |
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Sensing/control/identification devices of machines are provided. The devices include a shielding defining a shielded volume, a rectification and power conditioning module within the shielded volume and configured to receive electromagnetic (EM) transmissions from an EM transmitting source and convert said EM transmissions to electrical power, a communication interface module within the shielded volume and configured to receive power from the rectification and power conditioning module and at least one of receive the EM transmissions or transmit EM communications, and a control module within the shielded volume and configured to at least one of (i) receive the EM transmissions from the communication interface for processing or prepare the EM communications for transmission from the communication interface module and (ii) communicate with a remote sensor of the machine.
Opening claim text (preview).
The invention claimed is: 1. A sensing/control/identification device of a machine, the device comprising: a shielding defining a shielded volume; a rectification and power conditioning module within the shielded volume and configured to receive electromagnetic (EM) transmissions from an EM transmitting source and convert said EM transmissions to electrical; a communication interface module within the shielded volume and configured to receive power from the rectification and power conditioning module and at least one of receive the EM transmissions or transmit EM communications; a control module within the shielded volume configured to at least one of (i) receive the EM transmissions from the communication interface for processing or prepare the EM communications for transmission from the communication interface module and (ii) communicate with a remote sensor of the machine; and a power output module configured to distribute the electrical power from the rectification and power conditioning module to an electromechanical device. 2. The device as recited in claim 1 , further comprising a storage module within the shielded volume, wherein the control module is configured to at least one of read from or write to the storage module. 3. The device as recited in claim 2 , wherein the storage module includes at least one of (i) programs and/or applications to be executed by the control module, (ii) identification data associated with the device, (iii) historical data associated with the device, (iv) characterization curves associated with the machine, (v) an engine installation, (vi) flight profiles, or (vii) environmental data. 4. The device as recited in claim 1 , further comprising a sensor circuit module configured to interface between the remote sensor and the control module. 5. The device as recited in claim 4 , further comprising a conversion module configured to convert a signal from an external signal to a signal to be processed by the control module. 6. The device as recited in claim 5 , wherein the sensor circuit module and the conversion module are configured to convert an analog signal received from the remote sensor to a digital signal to be processed by the control module. 7. The device as recited in claim 1 , further comprising a control output module operably connected to the control module and configured to process and convert instructions or commands from the control module into an output signal and transmit said output signal. 8. The device as recited in claim 1 , wherein the rectification and power conditioning module, the communication interface module, and the control module are all configured on a single printed circuit board or highly integrated system in a package (SIP). 9. The device as recited in claim 8 , wherein the printed circuit board or highly integrated system in a package (SIP) includes an on-chip antenna. 10. The device as recited in claim 1 , further comprising a power bus, a power conditioning circuit, and at least one power switching device configured to switch or modulate the power to the electromechanical device. 11. The device as recited in claim 1 , wherein the electromechanical device is an electro-hydraulic servo valve, a direct drive valve, or a solenoid. 12. A system for a gas turbine engine, the system comprising: a component; a remote sensor operably connected to the component; an electromagnetic (EM) transmitting source located remote from the component; and a sensing/control/identification device configured on or proximate to the component, wherein the sensing/control/identification device includes: a shielding defining a shielded volume; a rectification and power conditioning module within the shielded volume and configured to receive EM transmissions from an EM transmitting source and convert said EM transmissions to electrical power; a communication interface module within the shielded volume and configured to receive power from the rectification and power conditioning module and at least one of receive the EM transmissions or transmit EM communications; a control module within the shielded volume and configured to at least one of (i) receive the EM transmissions from the communication interface for processing or prepare the EM communications for transmission from the communication interface module and (ii) communicate with the remote sensor; and a power output module configured to distribute the electrical power from the rectification and power conditioning module to an electromechanical device associated with the component. 13. The system as recited in claim 12 , the sensing/control/identification device further comprising a storage module within the shielded volume, wherein the control module is configured to at least one of read from or write to the storage module. 14. The system as recited in claim 13 , wherein the storage module includes at least one of (i) programs and/or applications to be executed by the control module, (ii) identification data associated with at least one of the device or the component, (iii) historical data associated with at least one of the device or the component, (iv) characterization curves associated with the machine, (v) an engine installation, (vi) flight profiles, or (vii) environmental data. 15. The system as recited in claim 12 , further comprising a control output module operably connected to the control module and configured to process and convert instructions or commands from the control module into an output signal and transmit said output signal. 16. The system as recited in claim 12 , wherein the rectification and power conditioning module, the communication interface module, and the control module are all configured on a single printed circuit board or highly integrated system in a package (SIP) including an on-chip antenna. 17. The system as recited in claim 12 , further comprising a power bus, a power conditioning circuit, and at least one power switching device configured to switch or modulate the power to the electromechanical device. 18. The system as recited in claim 12 , wherein the electromechanical device is an electro-hydraulic servo valve, a direct drive valve, or a solenoid.
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