Method for producing a semiconductor device including semiconductor pillar and fin

Patent metadata

Field	Value
Publication number	US-10056483-B2
Application number	US-201715672533-A
Country	US
Kind code	B2
Filing date	Aug 9, 2017
Priority date	Apr 16, 2013
Publication date	Aug 21, 2018
Grant date	Aug 21, 2018

Abstract

A method for producing a semiconductor device includes forming a fin-shaped semiconductor layer on a substrate, forming a first insulating film around the fin-shaped semiconductor layer, and a first metal film is formed around the first insulating film. A pillar-shaped semiconductor layer is formed on the fin-shaped semiconductor layer and a gate insulating film is formed around the pillar-shaped semiconductor layer. A gate electrode is formed around the gate insulating film, the gate electrode being made of a third metal, and a gate line is connected to the gate electrode. A second insulating film is formed around a sidewall of an upper portion of the pillar-shaped semiconductor layer, and a second metal film is formed around the second insulating film.

First claim

The invention claimed is:

1. A method for producing a semiconductor device, the method comprising:
a first step of:
forming a fin-shaped semiconductor layer on a substrate,
forming a first insulating film around the fin-shaped semiconductor layer, and
forming a first metal film around the first insulating film;

after the first step, a second step of:
forming a pillar-shaped semiconductor layer on the fin-shaped semiconductor layer;

after the second step, a third step of:
forming a gate insulating film around the pillar-shaped semiconductor layer, and
forming a gate electrode around the gate insulating film, the gate electrode being made of a third metal, and a gate line connected to the gate electrode; and

after the third step, a fourth step of:
forming a second insulating film around a sidewall of an upper portion of the pillar-shaped semiconductor layer, and
forming a second metal film around the second insulating film.

2. The method for producing a semiconductor device according to claim 1 , wherein the first step further includes forming a first resist for forming a fin-shaped semiconductor layer on a semiconductor substrate, etching the semiconductor substrate to form the fin-shaped semiconductor layer, removing the first resist, depositing a fourth insulating film around the fin-shaped semiconductor layer, etching back the fourth insulating film to expose an upper portion of the fin-shaped semiconductor layer, forming the first insulating film around the fin-shaped semiconductor layer and on the fourth insulating film, depositing the first metal film around the first insulating film, etching the first metal film so that the first metal film is left as a sidewall around the fin-shaped semiconductor layer, depositing a fifth insulating film, etching back the fifth insulating film to expose an upper portion of the first metal film, and removing the exposed first metal film.

3. The method for producing a semiconductor device according to claim 1 , wherein the second step further includes depositing a sixth insulating film around the fin-shaped semiconductor layer, etching back the sixth insulating film to expose an upper portion of the fin-shaped semiconductor layer, forming a second resist so that the second resist intersects the fin-shaped semiconductor layer perpendicularly, and etching the fin-shaped semiconductor layer and removing the second resist so that a portion in which the second resist intersects the fin-shaped semiconductor layer perpendicularly is formed into the pillar-shaped semiconductor layer.

4. The method for producing a semiconductor device according to claims 1 , wherein the third step further includes depositing the gate insulating film around the pillar-shaped semiconductor layer and on the fin-shaped semiconductor layer, depositing a third metal film so that the third metal film covers the gate insulating film, forming a third resist for forming the gate line, etching the third metal film to form the gate line, depositing a seventh insulating film, etching back the seventh insulating film to expose an upper portion of the third metal film, and removing the exposed third metal film.

5. The method for producing a semiconductor device according to claims 1 , wherein the fourth step further includes depositing an eighth insulating film on the pillar-shaped semiconductor layer, etching back the eighth insulating film to expose an upper portion of the pillar-shaped semiconductor layer, depositing the second insulating film on the pillar-shaped semiconductor layer, depositing the second metal film so that the second metal film covers the second insulating film, and etching the second metal film so that the second metal film is left as a sidewall around an upper portion of the pillar-shaped semiconductor layer.

Assignees

• Unisantis Elect Singapore Pte

Inventors

• Masuoka Fujio
• Nakamura Hiroki

Classifications

• H10P50/642

  Chemical etching · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P50/264

  by chemical means · CPC title

• H10P14/3451

  Structure · CPC title

• H10P14/3404

  being Group IVA materials · CPC title