Electric field shielding in silicon carbide metal-oxide-semiconductor (MOS) device cells using channel region extensions

Patent metadata

Field	Value
Publication number	US-10056457-B2
Application number	US-201715595717-A
Country	US
Kind code	B2
Filing date	May 15, 2017
Priority date	May 23, 2016
Publication date	Aug 21, 2018
Grant date	Aug 21, 2018

Abstract

The subject matter disclosed herein relates to semiconductor power devices, such as silicon carbide (SiC) power devices. In particular, the subject matter disclosed herein relates to shielding regions in the form of channel region extensions for that reduce the electric field present between the well regions of neighboring device cells of a semiconductor device under reverse bias. The disclosed channel region extensions have the same conductivity-type as the channel region and extend outwardly from the channel region and into the JFET region of a first device cell such that a distance between the channel region extension and a region of a neighboring device cell having the same conductivity type is less than or equal to the parallel JFET width. The disclosed shielding regions enable superior performance relative to a conventional stripe device of comparable dimensions, while still providing similar reliability (e.g., long-term, high-temperature stability at reverse bias).

First claim

The invention claimed is:

1. A device, comprising:
a plurality of device cells at least partially disposed in a semiconductor device layer having a first conductivity type, wherein each device cell of the plurality comprises:
a body region having a second conductivity type disposed near the center of the device cell;
a source region having the first conductivity type disposed adjacent to the body region of the device cell;
a channel region having the second conductivity type disposed adjacent to the source region of the device cell; and

a JFET region having the first conductivity type disposed adjacent the channel region of the device cell, wherein the JFET region has a parallel JFET width between the channel region, of the device cell and a parallel portion of a channel region of a neighboring device cell of the plurality of device cells,
wherein at least one device cell of the plurality of device cells comprises a channel region extension having the second conductivity type that, extends outwardly from the channel region of the at least one device cell and into the JFET region, such that a distance between the channel region extension of the at least one device cell and a region of the neighboring device cell having the second conductivity type is less than or equal to the parallel JFET width and the channel region extension of the at least one device cell has a width that is greater than twice a length (L ch ) of the channel region of the at least one device cell, and wherein the at least one device cell comprises a source region extension that extends from the source region of the device cell in the same direction as the channel region extension of the at least one device cell.

2. The device of claim 1 , wherein the semiconductor device layer is a silicon carbide (SiC) semiconductor device layer.

3. The device of claim 1 , wherein the distance between the channel region extension of the at least one device cell and the region of the neighboring device cell having the second conductivity type is less than the parallel JEET width.

4. The device of claim 1 , wherein the channel region extension of the at least one device cell has a width between approximately 0.1 μm and approximately 2 μm.

5. The device of claim 4 , wherein the width of the channel region extension of the at least one device cell is between approximately 0.1 μm and approximately 1 μm.

6. The device of claim 1 , wherein at least two device cells of the plurality of device cells include a respective channel region extension, and wherein the channel region extensions of the at least two device cells extend towards and overlap with one another.

7. The device of claim 1 , wherein at least two device cells of the plurality of device cells include a respective channel region extension and a respective source region extension, and wherein the channel region extensions of the at least two device cells extend towards and overlap with one another.

8. The device of claim 7 , wherein the source region extensions of the at least two device cells also extend towards and overlap with one another.

9. The device of claim 1 , wherein the channel region extension of the at least one device cell does not extend through all corners of the channel region of the at least one device cell.

10. The device of claim 1 , wherein the channel region extension has a variable width.

11. The device of claim 1 , wherein one or more device cells of the plurality of device cells disposed adjacent to the at least one device cell do not include respective channel region extensions, and wherein a widest portion of JFET region of one or more device cells is shielded by the channel region extension of the at least one adjacent device cell.

12. The device of claim 1 , wherein the channel region extension of the at least one device cell extends from at least one corner and at least one side of the channel region of the device cell.

13. The device of claim 1 , wherein each of the plurality of device cells has a substantially square, hexagonal, elongated rectangular shape, or elongated hexagonal shape.

14. The device of claim 1 , wherein the device is a field effect transistor (FET), an insulated gate bipolar transistor (IGBT), or an insulated base MOS-controlled thyristor (IBMCT).

15. The device of claim 1 , wherein the channel region extension has a variable width and the channel region extension of the at least one device cell extends from at least one corner and at least one side of the channel region of the device cell.

16. The device of claim 13 , wherein one or more device cells of the plurality of device cells disposed adjacent to the at least one device cell do not include respective channel region extensions, and wherein a widest portion of JFET region of one or more device cells is shielded by the channel region extension of the at least one adjacent device cell.

17. The device of claim 15 , wherein each of the plurality of device cells has a substantially square, hexagonal, elongated rectangular shape, or elongated hexagonal shape.

18. The device of claim 15 , wherein the channel region extension of the at least one device cell has a width between approximately 0.1 μm and approximately 2 μm.

19. The device of claim 18 , wherein the width of the channel region extension of the at least one device cell is between approximately 0.1 μm and approximately 1 μm.

Assignees

• Gen Electric

Inventors

• Bolotnikov Alexander Viktorovich
• Losee Peter Almern

Classifications

• H10P30/2042

  into crystalline silicon carbide · CPC title

• H10P30/22

  using masks · CPC title

• H10P30/21

  of electrically active species · CPC title

• H01L29/7816

  Electricity · mapped topic

• H01L29/0696

  Electricity · mapped topic