Semiconductor device

Patent metadata

Field	Value
Publication number	US-10056365-B2
Application number	US-201514628721-A
Country	US
Kind code	B2
Filing date	Feb 23, 2015
Priority date	Jun 29, 2012
Publication date	Aug 21, 2018
Grant date	Aug 21, 2018

Abstract

A semiconductor device incudes a cell region and a contact region, the cell region including a functional unit including a gate electrode, a source and a drain electrode, and the contact region including a gate pad. The gate electrode, the gate pad and the source electrode are disposed on a first main surface of a semiconductor substrate, and the drain electrode is disposed on a second main surface of the semiconductor substrate, the second main surface being opposite to the first main surface. A shielding member is disposed between the gate pad and the drain electrode, the shielding member being electrically connected to the source electrode.

First claim

What is claimed is:

1. A semiconductor device comprising a transistor in a semiconductor body having a first and a second main surface, the semiconductor body comprising a semiconductor substrate of a second conductivity type and the transistor comprising:
a gate electrode in contact with a semiconductor portion of a first conductivity type;
a source electrode in contact with a semiconductor portion of the second conductivity type;
a drain electrode on the second main surface and electrically connected with a portion of the semiconductor substrate, the source electrode being connected with the portion of the semiconductor substrate by an ohmic contact;
a gate pad laterally separated from the gate electrode and electrically connected to the gate electrode; and
a shielding member comprising a first semiconductor portion of the first conductivity type and a second semiconductor portion of the second conductivity type, the first semiconductor portion being electrically connected to the source electrode via a low-ohmic connection, the second semiconductor portion being disposed over the first semiconductor portion, on a side closer to the first main surface of the semiconductor body, the second semiconductor portion having a doping concentration higher than the doping concentration of the semiconductor substrate, the shielding member being disposed between the gate pad and the drain electrode such that the first semiconductor portion and the second semiconductor portion each horizontally overlap the gate pad.

2. The semiconductor device of claim 1 , wherein the semiconductor portion of the first conductivity type in contact with the gate electrode forms a horizontal layer.

3. The semiconductor device of claim 1 , wherein the first conductivity type is p type and the second conductivity type is n type.

4. The semiconductor device of claim 1 , wherein the first semiconductor portion and the second semiconductor portion of the shielding member form horizontal layers.

5. The semiconductor device of claim 1 , wherein the semiconductor substrate is a silicon carbide substrate.

6. A semiconductor device comprising a transistor in a semiconductor body having a first and a second main surface, the semiconductor body comprising a semiconductor substrate of a second conductivity type and the transistor comprising:
a gate electrode in contact with a semiconductor portion of a first conductivity type;
a source electrode in contact with a semiconductor portion of the second conductivity type;
a drain electrode on the second main surface and electrically connected with a portion of the semiconductor substrate, the source electrode being connected with the portion of the semiconductor substrate by an ohmic contact;
a gate pad laterally separated from the gate electrode and electrically connected to the gate electrode; and
a shielding member comprising a first semiconductor portion of the first conductivity type and a second semiconductor portion of the second conductivity type, the first semiconductor portion being in direct contact with a metal layer implementing the source electrode, the shielding member being disposed between the gate pad and the drain electrode such that the first semiconductor portion and the second semiconductor portion each horizontally overlap the gate pad.

7. The semiconductor device of claim 6 , wherein the second semiconductor portion is disposed over the first semiconductor portion, on a side closer to the first main surface of the semiconductor substrate.

8. The semiconductor device of claim 6 , wherein the semiconductor portion of the first conductivity type in contact with the gate electrode forms a horizontal layer.

9. The semiconductor device of claim 6 , wherein the first conductivity type is p type and the second conductivity type is n type.

10. The semiconductor device of claim 6 , wherein the semiconductor substrate is a silicon carbide substrate.

11. The semiconductor device of claim 6 , wherein the second semiconductor portion of the shielding member has a doping concentration higher than the doping concentration of the semiconductor substrate.

12. The semiconductor device of claim 6 , wherein the first semiconductor portion and the second semiconductor portion of the shielding member form horizontal layers.

13. A semiconductor device comprising a transistor in a semiconductor body having a first and a second main surface, the semiconductor body comprising a semiconductor substrate of a second conductivity type and the transistor comprising:
a gate electrode in contact with a semiconductor portion of a first conductivity type;
a source electrode in contact with a semiconductor portion of the second conductivity type;
a drain electrode on the second main surface and electrically connected with a portion of the semiconductor substrate, the source electrode being connected with the semiconductor substrate portion by an ohmic contact;
a gate pad laterally separated from the gate electrode and electrically connected to the gate electrode; and
a shielding member comprising a first semiconductor portion of the first conductivity type and a second semiconductor portion of the second conductivity type, the first semiconductor portion being electrically connected to the source electrode via a low-ohmic connection, the second semiconductor portion being disposed over the first semiconductor portion, on a side closer to the first main surface of the semiconductor body, the shielding member being disposed between the gate pad and the drain electrode such that the first semiconductor portion and the second semiconductor portion each horizontally overlap the gate pad.

14. The semiconductor device of claim 13 , wherein the semiconductor portion of the first conductivity type in contact with the gate electrode forms a horizontal layer.

15. The semiconductor device of claim 13 , wherein the first conductivity type is p type and the second conductivity type is n type.

Assignees

• Infineon Technologies Austria Ag

Inventors

• Kueck Daniel
• Elpelt Rudolf

Classifications

• H01L29/0649

  Electricity · mapped topic

• H01L29/41741

  Electricity · mapped topic

• H01L29/42316

  Electricity · mapped topic

• H01L29/41775

  Electricity · mapped topic

• H01L29/8122

  Electricity · mapped topic