Infrared radiation emission surface having a high thermal emissivity and a long life time and its manufacturing method

Patent metadata

Field	Value
Publication number	US-10054489-B2
Application number	US-201715694699-A
Country	US
Kind code	B2
Filing date	Sep 1, 2017
Priority date	Sep 5, 2016
Publication date	Aug 21, 2018
Grant date	Aug 21, 2018

Abstract

An infrared IR radiation emission surface in a predetermined wavelength range comprises a substrate made of a material based on silicon carbide SiC, and an ensemble of texturing microstructures covering the exposed emission face of the substrate. Each microstructure is formed by a single protuberance, which is arranged on and integrally with the substrate. The microstructures have the same shape and the same dimensions, and are distributed over the face of the substrate in a bidimensional periodic pattern. The shape of each microstructure is smooth and regular, with a radius of curvature which varies continuously from the apex of the microstructure to the exposed emission face of the substrate.

First claim

The invention claimed is:

1. An infrared IR radiation emission surface with high thermal emissivity for an infrared radiation emitter, comprising
a substrate consisting of a thickness of a first material based on silicon carbide SiC and having a planar or curved face, and
a set of texturing microstructures covering the face,
the said infrared IR radiation emission surface wherein
each microstructure is formed by a single protuberance made of the first material, which is arranged on and integrally with the substrate, and
the microstructures have the same shape and the same dimensions, and are distributed over the face of the substrate in a bidimensional periodic pattern, and
the shape of each microstructure is smooth and regular, while having a single apex and a radius of curvature which varies continuously from the apex of the microstructure to the face of the substrate.

2. The infrared IR radiation emission surface according to claim 1 , wherein the first material based on silicon carbide is
monocrystalline or polycrystalline silicon carbide SiC, or
monocrystalline or polycrystalline silicon carbide SiC enriched with silicon Si in the form of silicon islands Si.

3. The infrared IR radiation emission surface according to claim 1 , wherein
the surface of each microstructure has an apex lying in a central region with the same maximum height h, corresponding to the height of the microstructure, and the said surface of the microstructure decreases from the apex towards an edge of a base of the microstructure.

4. The infrared IR radiation emission surface according to claim 1 , wherein
the surface of each microstructure comprises a part of the surface of a spherical, elliptical or parabolic cap.

5. The infrared IR radiation emission surface according to claim 1 , wherein
each microstructure substantially has the same base diameter d, which is greater than or equal to 0.5 μm and less than or equal to 7 μm, preferably lying between 1 μm and 5 μm, and
the same maximum height h of each microstructure is greater than or equal to 0.5 times the base diameter d and less than or equal to 10 times the base diameter d.

6. The infrared IR radiation emission surface according to claim 1 , wherein
the radius of curvature p of each microstructure is greater than or equal to 0.1 μm and distributed around a central radius of curvature value of between 0.5 μm and 5 μm.

7. The infrared IR radiation emission surface according to claim 1 , wherein
the arrangement of the microstructures on the exposure face of the substrate is carried out in the form of tiling of elementary networks of microstructures,
the elementary networks having the same cell pattern among the group formed by hexagonal cells, square cells and triangular cells, and being characterized by a degree of compactness of the microstructures with respect to one another.

8. The infrared IR radiation emission surface according to claim 1 , wherein
the surface of each microstructure and the face of the substrate are oxidized.

9. The infrared IR radiation emitter comprising an infrared IR radiation emission surface as defined in claim 1 .

10. The infrared IR radiation emitter according to claim 9 , among the group of devices formed by
infrared heating sources,
emitters of infrared IR to a thermophotovoltaic cell for converting heat into electricity, and
emitters of an infrared IR source for gas sensors.

11. A method for manufacturing an infrared IR radiation emission surface capable of operating at high temperatures,
the said manufacturing method comprising
a first step consisting in providing a substrate, consisting of a thickness of a first material based on silicon carbide SiC and having a planar or curved exposure face,
further comprising
a second step, carried out following the first step, consisting in producing an ensemble of texturing microstructures covering the face,
each microstructure being formed by a single protuberance made of the first material and arranged on and integrally with the substrate,
the microstructures having the same shape and the same dimensions, and being distributed over the face of the substrate in a bidimensional periodic pattern, and
the shape of each microstructure being smooth and regular, while having a single apex and a radius of curvature which varies continuously from the apex to the face.

12. The method for manufacturing an infrared IR radiation emission surface according to claim 11 , wherein
the first step consists:
either in providing monocrystalline or polycrystalline silicon carbide SiC, or
in providing monocrystalline or polycrystalline silicon carbide SiC enriched with silicon in the form of silicon islands Si.

13. The method for manufacturing an infrared IR radiation emission surface according to claim 11 , wherein
the first step consists:
either in isostatically compressing a silicon carbide SIC powder, or
in growing polycrystalline silicon carbide SIC, or
in growing monocrystalline silicon carbide SIC, or
in infiltrating silicon Si at high temperature into a porous carbon-containing matrix.

14. The method for manufacturing an infrared IR radiation emission surface according to claim 11 , wherein
the second step comprises the successive steps consisting in
in a third step, depositing a compact monolayer of particles of a second material on the surface of the substrate, and
in a fourth step, etching the substrate by a dry etching method on the exposure face side through interstices existing between the particles,
the second material being included in the group formed by silica (SiO 2 ), polystyrene (PS) or any other colloidal material in the form of balls with the required dimension.

15. The method for manufacturing an infrared IR radiation emission surface according to claim 14 , wherein
reduction of the size and the shape of the particles by dry etching is carried out,
either in a fifth step carried out during the fourth step at the same time as the dry etching of the substrate,
or in a sixth step interposed between the third step and the fourth step.

16. The method for manufacturing an infrared IR radiation emission surface according to claim 14 , wherein
the deposition of the compact film of particles carried out during the third step is performed
either by a deposition technique involving an air/liquid interface ordering the particles, among the group formed by the Langmuir-Blodgett technique, the Langmuir-Shaefer technique, the surface vortex method, the flotation transfer technique, the technique of fine dynamic and mobile laminar flow,
or by a deposition technique involving only particles in colloidal solution, among the group formed by electrophoretic deposition, horizontal deposition by evaporation of a film, deposition by evaporating of a bath, deposition by vertical removal of an immersed substrate, and horizontal deposition by forced removal of the contact line.

17. The method for manufacturing an infrared IR radiation emission surface according to claim 14 , wherein
the dry etching method carried out in the fourth step is reactive ion etching using a gas mixture of sulfur hexafluoride (SF 6 ) and dioxygen (O 2 ) in a ratio of 5/3.

18. The method for manufacturing an infrared IR radiation emission surface according to claim 17 , wherein
the etching rate Vsub of the substrate material and the etching rate Vpar of the particles, the etching selectivity Sg, defined as the ratio of the etching rate of the substrate to the etching rate of the particles, and the etching time are regulated so a

Assignees

• Commissariat Energie Atomique
• Commissariat A Lenergie Atomique Aux Energies Alternatives

Inventors

• Ollier Emmanuel
• Dunoyer Nicolas

Classifications

• G01J5/048 Primary

  Protective parts · CPC title

• G01J5/0014

  for sensing the radiation from gases, flames · CPC title

• H01K1/14

  characterised by the shape · CPC title

• H01K13/00

  Lamps having an incandescent body which is substantially non-conductive until heated, e.g. Nernst lamp · CPC title

• H01K1/12

  Bodies which are non-conductive when cold, e.g. for Nernst lamp · CPC title