MEMS microphone

US10051381B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-10051381-B2
Application numberUS-201715416980-A
CountryUS
Kind codeB2
Filing dateJan 26, 2017
Priority dateOct 25, 2016
Publication dateAug 14, 2018
Grant dateAug 14, 2018

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

    Technology tags used to group this patent with similar filings.

  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A MEMS microphone, includes a base with a back cavity and a capacitor system fixed to the base. The capacitor system includes a back plate above the base and a diaphragm opposite to the back plate for forming an insulated gap. The back plate includes a body part and multiple spaced fixation parts extending from the body part, and the diaphragm includes a vibrating part and a connecting part extending from the vibrating part. An orthographic projection of the body part of the back plate along a vibration direction of the diaphragm is completely located on the diaphragm; and at least a part of an orthographic projection of the fixation parts along the vibration direction is located on the diaphragm.

First claim

Opening claim text (preview).

What is claimed is: 1. A MEMS microphone, including: a base with a back cavity; a capacitor system fixed to the base, the capacitor system including a back plate above the base and a diaphragm opposite to the back plate for forming an insulated gap; wherein the back plate includes a body part and multiple spaced fixation parts extending from the body part, and the diaphragm includes a vibrating part and a connecting part extending from the vibrating part; an orthographic projection of the body part of the back plate along a vibration direction of the diaphragm is completely located on the diaphragm; and at least a part of an orthographic projection of the fixation parts along the vibration direction is located on the diaphragm. 2. The MEMS microphone as described in claim 1 , wherein the orthographic projection of the body part of the back plate along the vibration direction is completely located on the vibrating part. 3. The MEMS microphone as described in claim 1 , wherein the fixation parts are spaced apart with a certain distance for forming comb fingers. 4. The MEMS microphone as described in claim 1 , wherein the fixation parts form a ring comb finger structure together. 5. The MEMS microphone as described in claim 1 further comprising a first insulation layer fixed between the base and the back plate, and a second insulation layer is fixed between the diaphragm and the back plate, both the first insulation layer and the second insulation layer are provided with a plurality of ventholes penetrating therethrough.

Assignees

Inventors

Classifications

  • Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's · CPC title

  • H04R19/04Primary

    Microphones (H04R19/01 takes precedence) · CPC title

  • Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title

  • using semiconductor materials · CPC title

  • Comb structures · CPC title

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Frequently asked questions

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What does patent US10051381B2 cover?
A MEMS microphone, includes a base with a back cavity and a capacitor system fixed to the base. The capacitor system includes a back plate above the base and a diaphragm opposite to the back plate for forming an insulated gap. The back plate includes a body part and multiple spaced fixation parts extending from the body part, and the diaphragm includes a vibrating part and a connecting part ext…
Who is the assignee on this patent?
Zhang Jinyu, Zhang Rui, Meng Zhenkui, and 1 more
What technology area does this patent fall under?
Primary CPC classification H04R19/04. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 14 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).