Metallic wire grid polarizer and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-10048419-B2
Application number	US-201615115688-A
Country	US
Kind code	B2
Filing date	Jun 15, 2016
Priority date	May 9, 2016
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

The present invention provides a metallic wire grid polarizer and a manufacturing method thereof. The metallic wire grid polarizer of the present invention includes a base plate (10) and a plurality of metallic wire grids formed on the base plate (10). The metallic wire grids are divided into first wire lines (21) and second wire lines (22) having different heights so as to form a dual-period wire-grid structure for achieving better optical performance and exhibiting more global optimization parameters for making modulation of the optical performance thereof more scientific and more flexible. The manufacturing method of the metallic wire grid polarizer of the present invention may make a wire grid structure having layers of different heights and the manufacturing operation is simple.

First claim

What is claimed is:

1. A manufacturing method of a metallic wire grid polarizer, comprising the following steps:
(1) providing a metal backing and coating a layer of optical resin on an upper surface of the metal backing;
(2) providing an imprint mold plate and positioning the imprint mold plate on the optical resin to conduct nano-imprinting so as to make the optical resin that is located on the metal backing forming a plurality of first photoresist strips and a plurality of second photoresist strips in an alternate arrangement, wherein a height of the first photoresist strips is greater than a height of the second photoresist strips;
(3) removing the imprint mold plate and conducting dry etching on the metal backing with the optical resin as a shielding layer so as to form a plurality of metallic wire grids on the metal backing, wherein the metallic wire grids are divided into first wire lines and second wire lines and wherein the first wire lines are formed as corresponding to the first photoresist strips and the second wire lines are formed as corresponding to the second photoresist strips so as to form a metallic wire grid polarizer that comprises the base plate and the plurality of metallic wire grids on the base plate;
wherein a plurality of first wire lines and a plurality of second wire lines are alternately arranged on the base plate in a cyclic or periodic arrangement, the first wire lines having a first height H1, the second wire lines having a second height H2, the heights of the first wire lines and the second wire lines satisfying (H1−H2)/H1>10%.

2. The manufacturing method of the metallic wire grid polarizer as claimed in claim 1 , wherein the metallic wire grids have widths that are between 20-150 nm and a spacing distance between two adjacent metallic wire grids is between 20-150 nm.

3. The manufacturing method of the metallic wire grid polarizer as claimed in claim 1 , wherein the plurality of metallic wire grids is arranged in an equally spaced manner on the base plate.

4. The manufacturing method of the metallic wire grid polarizer as claimed in claim 1 , wherein each of the first wire lines is alternate with each of the second wire lines.

5. The manufacturing method of the metallic wire grid polarizer as claimed in claim 1 , wherein the imprint mold plate provided in step (2) comprises a plurality of first grid grooves and a plurality of second grid grooves, wherein the first grid grooves have a depth that is greater than a depth of the second grid grooves and the first photoresist strips and the second photoresist strips are formed as respectively corresponding to the first grid grooves and the second grid grooves; and step (3) further comprises removing a remaining portion of the optical resin after the dry etching and coating a buffer layer on the plurality of metallic wire grids so formed so that the metallic wire grid polarizer so obtained also comprises the buffer layer that is arranged on the base plate and the plurality of metallic wire grids.

Assignees

• Shenzhen China Star Optoelect

Inventors

• Chen Lixuan

Classifications

• B29L2011/0066

  Optical filters · CPC title

• B29C59/022

  characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor · CPC title

• G02B5/3058 Primary

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title

• C23F4/00

  Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00 · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title