Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor

Patent metadata

Field	Value
Publication number	US-10048147-B2
Application number	US-201615179232-A
Country	US
Kind code	B2
Filing date	Jun 10, 2016
Priority date	Sep 18, 2015
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

A pressure sensor includes a ceramic sensor that is accommodated between a body and a holder. On an end surface of the sensor, plural resistive bodies are printed and fired in a straight line using a thick-film resistive paste material by screen printing.

First claim

What is claimed is:

1. A pressure sensor comprising a body including a fluid passage into which a pressure fluid is introduced, and a ceramic sensor disposed on an end of the body and including a thin-film diaphragm portion that faces toward the fluid passage;
wherein, on the diaphragm portion, plural resistive bodies, which are printed by thick-film printing, are provided in a straight line and are separated mutually at a predetermined distance from each other.

2. The pressure sensor according to claim 1 , wherein the resistive bodies are provided in at least one row or more.

3. A manufacturing method for manufacturing a pressure sensor including a ceramic sensor, comprising the steps of:
after carrying out surface processing with respect to the sensor, printing and firing wires with respect to an end surface of the sensor by thick-film printing using a conductive paste material; and
by scraping a thick-film resistive paste material of a ruthenium base with respect to a screen mask, simultaneously printing and firing plural resistive bodies in a straight line by thick-film printing in a direction perpendicular to a direction of the scraping of the thick-film resistive paste material.

4. The manufacturing method according to claim 3 , further comprising the steps of:
covering the resistive bodies with a first protective film made from a low-melting-point glass; and
after resistance values of the resistive bodies have been adjusted, covering the first protective film with a second protective film made from an organic material.

Assignees

• Smc Corp

Inventors

• Saitoh Mitsuhiro
• Oshima Yuta
• Yamagishi Takeshi

Classifications

• G01L9/04 Primary

  of resistance-strain gauges · CPC title

• G01L9/0044 Primary

  Constructional details of non-semiconductive diaphragms · CPC title

• G01L9/0051

  using variations in ohmic resistance · CPC title

• G05D23/122

  using a plurality of sensing elements · CPC title

• G01L9/0052

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title