Sensor device, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-10048072-B2
Application number	US-201514956732-A
Country	US
Kind code	B2
Filing date	Dec 2, 2015
Priority date	Dec 11, 2014
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

A sensor device includes a first physical quantity sensor, a drive section adapted to generate a drive signal for driving the first physical quantity sensor with a drive frequency, a second physical quantity sensor, and an output section adapted to generate an output signal based on a signal from the second physical quantity sensor and a signal having a frequency n times (n is an integer equal to or greater than 1) as high as the drive frequency.

First claim

What is claimed is:

1. A sensor device comprising:
a first physical quantity sensor;
a drive section adapted to generate a drive signal and drive the first physical quantity sensor with a drive frequency of the drive signal;
a second physical quantity sensor; and
an output section adapted to generate an output signal based on a signal from the second physical quantity sensor and a signal having a frequency n times as high as the drive frequency assuming n is an integer equal to or greater than 1, wherein
the signal having the frequency n times as high as the drive frequency is applied to the second physical quantity sensor.

2. The sensor device according to claim 1 , wherein
the signal having the frequency n times as high as the drive frequency is a signal from the drive section.

3. The sensor device according to claim 2 , further comprising:
a filter section, to which the signal from the drive section is input, and which has filter characteristics of transmitting a signal in a first band including the drive frequency, and attenuating a signal in a second band higher than the first band, wherein
the signal having the frequency n times as high as the drive frequency is a signal via the filter section.

4. The sensor device according to claim 3 , further comprising:
a level-shift section adapted to decrease an amplitude of the signal from the drive section, wherein
the signal having the frequency n times as high as the drive frequency is a signal from the level-shift section.

5. An electronic apparatus comprising:
the sensor device according to claim 4 .

6. An electronic apparatus comprising:
the sensor device according to claim 3 .

7. A moving object comprising:
the sensor device according to claim 3 .

8. An electronic apparatus comprising:
the sensor device according to claim 2 .

9. A moving object comprising:
the sensor device according to claim 2 .

10. The sensor device according to claim 1 , further comprising:
a waveform shaping section to which a signal from the drive section is input, wherein
the signal having the frequency n times as high as the drive frequency is a signal from the waveform shaping section.

11. The sensor device according to claim 10 , further comprising:
a level-shift section adapted to decrease an amplitude of the signal from the drive section, wherein
the signal having the frequency n times as high as the drive frequency is a signal from the level-shift section.

12. An electronic apparatus comprising:
the sensor device according to claim 11 .

13. The sensor device according to claim 10 , wherein
the first physical quantity sensor is an angular velocity sensor, and
the second physical quantity sensor is an acceleration sensor.

14. An electronic apparatus comprising:
the sensor device according to claim 10 .

15. The sensor device according to claim 1 , further comprising:
a level-shift section adapted to decrease an amplitude of a signal from the drive section, wherein
the signal having the frequency n times as high as the drive frequency is a signal from the level-shift section.

16. The sensor device according to claim 15 , wherein
the first physical quantity sensor is an angular velocity sensor, and
the second physical quantity sensor is an acceleration sensor.

17. An electronic apparatus comprising:
the sensor device according to claim 15 .

18. The sensor device according to claim 1 , wherein
the first physical quantity sensor is an angular velocity sensor, and
the second physical quantity sensor is an acceleration sensor.

19. An electronic apparatus comprising:
the sensor device according to claim 1 .

20. A moving object comprising:
the sensor device according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Shindo Takehiko

Classifications

• G01P15/125

  by capacitive pick-up · CPC title

• G01C19/5776 Primary

  Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title

• G01D21/02 Primary

  Measuring two or more variables by means not covered by a single other subclass · CPC title