Micro device transfer system with pivot mount

Patent metadata

Field	Value
Publication number	US-10043776-B2
Application number	US-201615182272-A
Country	US
Kind code	B2
Filing date	Jun 14, 2016
Priority date	Dec 14, 2012
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

A micro pick up array mount includes a pivot platform to allow a micro pick up array to automatically align with a carrier substrate. Deflection of the pivot platform may be detected to control further movement of the micro pick up array.

First claim

What is claimed is:

1. A micro pick up array mount comprising:
a pivot platform;
a base laterally around the pivot platform, wherein the pivot platform is movable relative to the base;
a beam physically coupled with the pivot platform at an inner pivot and physically coupled with the base at an outer pivot;
a voltage source contact on the base;
an electrostatic voltage source contact on the pivot platform to transfer an operating voltage;
a source trace that connects the voltage source contact to the electrostatic voltage source contact;
a clamp contact on the base;
a clamping electrode on the pivot platform; and
a clamp trace that connects the clamp contact to the clamping electrode.

2. The micro pick up array mount of claim 1 , further comprising a ribbon cable coupled to the voltage source contact and the clamp contact.

3. The micro pick up array mount of claim 1 , wherein the outer pivot is on a base edge and the inner pivot is on a pivot platform edge, and the base edge is orthogonal to the pivot platform edge.

4. The micro pick up array mount of claim 3 , further comprising second beam coupled with the base by a second outer pivot on a second base edge and coupled with the pivot platform by a second inner pivot on a second pivot platform edge.

5. The micro pick up array mount of claim 3 , wherein the beam is coupled with the pivot platform at a second inner pivot and coupled with the base at a second outer pivot.

6. The micro pick up array mount of claim 5 , wherein the inner pivot is across the pivot platform from the second inner pivot, and the outer pivot is across the pivot platform from the second outer pivot.

7. The micro pick up array mount of claim 1 , wherein the inner pivot and the outer pivot each comprise silicon.

8. The micro pick up array mount of claim 1 , further comprising:
a second voltage source contact on the base;
a second electrostatic voltage source contact on the pivot platform to transfer a second operating voltage; and
a second source trace that connects the second voltage source contact to the second electrostatic voltage source contact.

9. The micro pick up array mount of claim 1 , further comprising:
a second clamp contact on the base;
a second clamping electrode on the pivot platform; and
a second clamp trace that connects the second clamp contact to the second clamping electrode.

10. The micro pick up array mount of claim 1 , further comprising:
a second voltage source contact on the base;
a second electrostatic voltage source contact on the pivot platform to transfer a second operating voltage;
a second source trace that connects the second voltage source contact to the second electrostatic voltage source contact;
a second clamp contact on the base;
a second clamping electrode on the pivot platform; and
a second clamp trace that connects the second clamp contact to the second clamping electrode.

11. A micro pick up array mount comprising:
a pivot platform;
a base laterally around the pivot platform, wherein the pivot platform is movable relative to the base;
a plurality of beams physically coupled with the pivot platform and the base;
a pair of voltage source contacts on the base;
a pair of electrostatic voltage source contacts on the pivot platform to transfer operating voltages;
a pair of source traces that connect the pair of voltage source contacts to the pair of electrostatic voltage source contacts;
a pair of clamp contacts on the base;
a pair of clamping electrodes on the pivot platform; and
a pair of clamp traces that connect the pair of clamp contacts to the pair of clamping electrodes.

12. The micro pick up array mount of claim 11 , wherein the pair of source traces and the pair of clamp traces run over the plurality of beams in a symmetric pattern.

13. The micro pick up array mount of claim 11 , wherein the pivot platform, the base, and the plurality of beams comprise silicon.

14. The micro pick up array mount of claim 11 , further comprising a ribbon cable coupled to a voltage source contact of the pair of voltage source contacts and a clamp contact of the pair of clamp contacts.

Assignees

• Apple Inc

Inventors

• Golda Dariusz
• Higginson John A
• Bibl Andreas

Classifications

• H10W72/07178

  Means for aligning · CPC title

• H10W72/07173

  Means for moving chips, wafers or other parts, e.g. conveyor belts · CPC title

• H10W72/0711

  Apparatus therefor · CPC title

• H10W90/00

  Package configurations · CPC title

• H10W72/0198 Primary

  batch processes · CPC title