Expansion of allowed design rule space by waiving benign geometries

Patent metadata

Field	Value
Publication number	US-10042973-B2
Application number	US-201615281183-A
Country	US
Kind code	B2
Filing date	Sep 30, 2016
Priority date	Sep 30, 2016
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

Systems, methods, and computer program products for design rules checking in which the waiver of design rules is optimized while ensuring compliant designs that are manufacturable. A first design rule and a plurality of patterns of a layout that violate the first design rule are received by a design rule waiver system. The design rule waiver system may process the first design rule to extract a plurality of descriptors that can be perturbed. The design rule waiver system may perturb an attribute associated with at least one of the plurality of descriptors extracted from the first design rule in order to define a second design rule that is satisfied by the plurality of patterns.

First claim

What is claimed is:

1. A method comprising:
receiving, by one or more processors, a first design rule and a plurality of patterns of a design layout that violate the first design rule;
processing, by the one or more processors, the first design rule to extract a first plurality of descriptors that can be perturbed;
perturbing, by the one or more processors, an attribute associated with at least one of the first plurality of descriptors to define a second design rule that is satisfied by the plurality of patterns;
producing, by the one or more processors, a pattern report that includes the plurality of patterns;
modifying, by the one or more processors, the design layout based on the pattern report; and
fabricating a set of photomasks based on the modified design layout.

2. The method of claim 1 wherein the first design rule comprises a unary design rule that applies to a geometric element in the layout or to each geometric element in a set of geometric elements in the design layout.

3. The method of claim 1 wherein the first design rule comprises a complex rule that includes a plurality of conditions that need to be concomitantly satisfied through the application of Boolean logic.

4. The method of claim 1 comprising:
enumerating, by the one or more processors, the patterns that satisfy the second design rule; and
simulating, by the one or more processors, the patterns through a process window to determine printability.

5. The method of claim 4 comprising:
determining, by the one or more processors, a fuzzy pattern by clustering the patterns for which the printability is determined to be acceptable.

6. The method of claim 5 comprising:
verifying, by the one or more processors, printability of the fuzzy pattern on a test substrate to confirm stability in the process window.

7. The method of claim 1 wherein processing the first design rule to extract the descriptors that can be perturbed further comprises:
parsing, by the one or more processors, the first design rule to identify the first plurality of descriptors;
comparing, by the one or more processors, the first plurality of descriptors with a plurality of tokens stored in a dictionary; and
generating, by the one or more processors, a second plurality of descriptors that includes each of the first plurality of descriptors that matches one of the tokens.

8. The method of claim 7 wherein the dictionary is built using a plurality of exemplary design rules before the first design rule and the plurality of patterns of the layout are received.

9. The method of claim 7 comprising:
building, by the one or more processors, the dictionary using a tokenizer by parsing a plurality of exemplary design rules to extract the tokens.

10. A system comprising:
one or more computer processors; and
a memory storing instructions that, upon execution by the one or more computer processors, cause the system to:
receive a first design rule and a plurality of patterns of a design layout that violate the first design rule;
process the first design rule to extract a first plurality of descriptors that can be perturbed;
perturb an attribute associated with at least one of the first plurality of descriptors to define a second design rule that is satisfied by the plurality of patterns;
produce a pattern report that includes the plurality of patterns;
modify the design layout based on the pattern report; and
cause a set of photomasks to be fabricated based on the modified design layout.

11. The system of claim 10 wherein the first design rule comprises a unary design rule that applies to a geometric element in the layout or to each geometric element in a set of geometric elements in the layout.

12. The system of claim 10 wherein the first design rule comprises a complex rule that includes a plurality of conditions that need to be concomitantly satisfied through the application of Boolean logic.

13. The system of claim 10 wherein the instructions upon execution further cause the system to:
enumerate the patterns that satisfy the second design rule; and
simulate the patterns through a process window to determine printability.

14. The system of claim 13 wherein the instructions upon execution further cause the system to:
determine a fuzzy pattern by clustering the patterns for which the printability is determined to be acceptable.

15. The system of claim 14 wherein the instructions upon execution further cause the system to:
verify printability of the fuzzy pattern on a test substrate to confirm stability in the process window.

16. The system of claim 1 wherein the instructions upon execution cause the system to parse the first design rule to extract the descriptors that can be perturbed by causing the system to:
parse the first design rule to identify the first plurality of descriptors;
compare the first plurality of descriptors with a plurality of tokens stored in a dictionary; and
generate a second plurality of descriptors that includes each of the first plurality of descriptors that matches one of the tokens.

17. The system of claim 16 wherein the dictionary is built using a plurality of exemplary design rules before the first design rule and the plurality of patterns of the layout are received.

18. The system of claim 16 wherein the instructions upon execution further cause the system to:
build the dictionary using a tokenizer by parsing a plurality of exemplary design rules to extract the tokens.

19. A computer program product comprising:
a non-transitory computer-readable storage medium; and
instructions stored on the non-transitory computer-readable storage medium that upon execution by one or more computer processors cause the one or more computer processors to:
receive a first design rule and a plurality of patterns of a design layout that violate the first design rule;
process the first design rule to extract a first plurality of descriptors that can be perturbed;
perturb an attribute associated with at least one of the first plurality of descriptors to define a second design rule that is satisfied by the plurality of patterns;
produce a pattern report that includes the plurality of patterns;
modify the design layout based on the pattern report; and
cause a set of photomasks to be fabricated based on the modified design layout.

Assignees

• Globalfoundries Inc

Inventors

• Graur Ioana C
• Vengertsev Dmitry

Classifications

• G06F2119/18

  Manufacturability analysis or optimisation for manufacturability · CPC title

• G06F30/398 Primary

  Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36) · CPC title

• G06F17/5081 Primary

  Physics · mapped topic

• G06F2217/12

  Physics · mapped topic

• Y02P90/02

  Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS] · CPC title