End effectors and reticle handling at a high throughput
US-2016252826-A1 · Sep 1, 2016 · US
US10040203B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10040203-B2 |
| Application number | US-201715807296-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 8, 2017 |
| Priority date | Dec 26, 2016 |
| Publication date | Aug 7, 2018 |
| Grant date | Aug 7, 2018 |
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A robot hand includes: a first movable member including a first pushing surface pushed against a first surface of a workpiece and a second pushing surface pushed against a second surface of the workpiece, intersecting the first surface, supported in a manner capable of moving in a first direction perpendicular to the first pushing surface, a second movable member supported by the first movable member in a manner capable of relatively moving in a second direction intersecting a movement direction of the first movable member, a third pushing surface pushed against a third surface facing the second surface, an actuator for pressing the first and the second movable members in the first direction, and a pressing force conversion mechanism converting a part of the pressing force generated by the actuator into a pressing force in a direction of moving the second movable member relative to the first movable member.
Opening claim text (preview).
The invention claimed is: 1. A robot hand comprising: a first movable member that includes a first pushing surface to be pushed against a first surface of a workpiece and a second pushing surface to be pushed against a second surface of the workpiece, intersecting the first surface, and that is supported in a manner capable of moving in a first direction perpendicular to the first pushing surface; a second movable member that is supported by the first movable member in a manner capable of relatively moving in a second direction intersecting a movement direction of the first movable member, and that includes a third pushing surface to be pushed against a third surface facing the second surface; an actuator that generates a pressing force for pressing the first movable member and the second movable member in the first direction; and a pressing force conversion mechanism that converts a part of the pressing force generated by the actuator into a pressing force in a direction of moving the second movable member relative to the first movable member. 2. The robot hand according to claim 1 , wherein the first movable member, the second movable member, and the pressing force conversion mechanism are each provided in pair, wherein the pair of first movable members are arranged with first pushing surfaces facing each other so that the first pushing surfaces are pushed against the first surfaces of the workpiece that face each other, and wherein the actuator generates the pressing force in such a way that one of the first movable members and one of the second movable members come close to the other of the first movable members and the other of the second movable members. 3. The robot hand according to claim 1 , wherein the pressing force conversion mechanism is a guide mechanism that guides the second movable member in the second direction that is inclined relative to the first direction at an angle smaller than 90 degrees. 4. The robot hand according to claim 1 , wherein the second movable member is supported in a manner capable of moving in the second direction that is perpendicular to the movement direction of the first movable member, and wherein the pressing force conversion mechanism includes a tilted surface that is fixed to one of the actuator and the second movable member and that is inclined at angles smaller than 90 degrees with respect to the first direction and the second direction, and a roller that is attached to the other of the actuator and the second movable member and that is caused to roll on the tilted surface. 5. The robot hand according to claim 1 , wherein the actuator is configured to press the second movable member in the first direction, and wherein the robot hand further comprises a retaining mechanism, the retaining mechanism retains the second movable member such that the second movable member does not move relative to the first movable member until a pressing force that is transmitted from the second movable member to the first movable member exceeds a predetermined threshold.
characterised by positioning means for manipulator elements · CPC title
having gripping members · CPC title
comprising parallel grippers · CPC title
Linear actuators · CPC title
with an external support, i.e. a support which does not belong to the manipulator or the object to be gripped, e.g. for maintaining the gripping head in an accurate position, guiding it or preventing vibrations · CPC title
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