Solvent separator and heat treatment apparatus

Patent metadata

Field	Value
Publication number	US-10040025-B2
Application number	US-201614997536-A
Country	US
Kind code	B2
Filing date	Jan 17, 2016
Priority date	Apr 24, 2015
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

To provide a solvent separator for purifying an exhaust atmosphere efficiently in solvent removal from the exhaust atmosphere containing a vaporized solvent by the heating exhausted from an exhaust generator, so that the vaporized solvent does not slip through an electrode for collecting the solvent and is positively led to the electrode. An electrode is arranged in a first wall surface of a casing of a solvent separation unit having a circular cylindrical shape, thereby inducing a vaporized solvent in an exhaust atmosphere to the electrode by a fan and discharging the solvent to the outside of the separator with part of the peripheral exhaust atmosphere while attracting the solvent to the electrode by an electric field of the electrode.

First claim

What is claimed is:

1. A solvent separator as a device for separating a solvent from a gas containing a vaporized solvent having a polarity comprising:
a circular cylindrical shaped casing having a curved inner wall surface;
an electrode formed on the curved inner wall surface of the casing;
a rotation drive unit arranged in a first end portion of the casing in an axial direction for inducing the gas to flow from the axial direction to a rotation direction to thereby feed the gas into the casing, wherein the inducing the gas to flow includes:
changing a flow direction of a gas drawn in the axial direction from the axial direction to a direction toward the curved inner wall surface of the casing and then moving along the curved inner wall surface in the casing from one end in the axial direction of the casing so as to flow while spirally turning toward the other end; and

first and second exhaust flow paths separated into two paths in a second end portion of the casing in the axial direction which is an opposite side to the rotation drive unit,
wherein the second exhaust flow path is arranged so as to extend along the electrode, and,
in a state where an electric field is applied to the electrode and the solvent contained in the gas is concentrated to a vicinity of the electrode, a concentrated gas containing the solvent is separated from a gas not containing the solvent and is discharged from the second exhaust flow path where the electrode is arranged, and the gas not containing the solvent is discharged from the first exhaust flow path, and
an exhaust duct is provided at one end in an axial direction of the casing,
wherein the first and second exhaust flow paths are provided at an other end portion in the axial direction of the casing opposed to the exhaust duct.

2. The solvent separator according to claim 1 ,
wherein the casing has a tapered shape in which a diameter increases from one of the first and second end portions toward an other of the first and second end portions.

3. The solvent separator according to claim 2 ,
wherein the first and second exhaust flow paths are separated respectively into a central axis side and an outer peripheral side of the casing by a partition portion inside an upper part of the casing, and
the gas containing the solvent is exhausted from the second exhaust flow path in the outer peripheral side and the gas from which the solvent is separated is exhausted from the first exhaust flow path in the central axis side.

4. The solvent separator according to claim 2 ,
wherein plural grooves are formed in an inner wall surface of the casing, and
the electrode is formed in inner wall surfaces of the grooves.

5. A heat treatment apparatus comprising:
the solvent separator according to claim 1 which is communicated with an exhaust unit.

6. The solvent separator according to claim 1 ,
wherein the first and second exhaust flow paths are separated respectively into a central axis side and an outer peripheral side of the casing by a partition portion inside an upper part of the casing, and
the gas containing the solvent is exhausted from the second exhaust flow path in the outer peripheral side and the gas from which the solvent is separated is exhausted from the first exhaust flow path in the central axis side.

7. The solvent separator according to claim 1 ,
wherein plural grooves are formed in an inner wall surface of the casing, and
the electrode is formed in inner wall surfaces of the grooves.

8. A solvent separator as a device for separating a solvent from a gas containing a vaporized solvent having a polarity comprising:
a circular cylindrical shaped casing having a curved inner wall surface;
an electrode formed on the curved inner wall surface of the casing;
a rotation drive unit arranged in a first end portion of the casing in an axial direction, and inducing the gas to flow from the axial direction to a rotation direction to thereby feed the gas into the casing;
a partition plate having a diameter larger than that of the rotation drive unit is disposed on an opposite side of an inlet port of the rotation drive unit in an axial direction of the rotation drive unit; and
first and second exhaust flow paths separated into two paths in a second end portion of the casing in the axial direction which is an opposite side to the rotation drive unit,
wherein the second exhaust flow path is arranged so as to extend along the electrode,
in a state where an electric field is applied to the electrode and the solvent contained in the gas is concentrated to a vicinity of the electrode, a concentrated gas containing the solvent is separated from a gas not containing the solvent and is discharged from the second exhaust flow path where the electrode is arranged, and the gas not containing the solvent is discharged from the first exhaust flow path,
wherein the casing has a tapered shape in which a diameter increases from one of the first and second end portions toward an other of the first and second end portions.

9. A solvent separator as a device for separating a solvent from a gas containing a vaporized solvent having a polarity comprising:
a circular cylindrical shaped casing having a curved inner wall surface;
an electrode formed on the curved inner wall surface of the casing;
a rotation drive unit arranged in a first end portion of the casing in an axial direction, and inducing the gas to flow from the axial direction to a rotation direction to thereby feed the gas into the casing;
a partition plate having a diameter larger than that of the rotation drive unit is disposed on an opposite side of an inlet port of the rotation drive unit in an axial direction of the rotation drive unit; and
first and second exhaust flow paths separated into two paths in a second end portion of the casing in the axial direction which is an opposite side to the rotation drive unit,
wherein the second exhaust flow path is arranged so as to extend along the electrode,
in a state where an electric field is applied to the electrode and the solvent contained in the gas is concentrated to a vicinity of the electrode, a concentrated gas containing the solvent is separated from a gas not containing the solvent and is discharged from the second exhaust flow path where the electrode is arranged, and the gas not containing the solvent is discharged from the first exhaust flow path.

Assignees

• Panasonic Ip Man Co Ltd
• Panasonic Corp

Inventors

• Ujino Tomohiro
• Segawa Terutsugu
• Nagai Koichi

Classifications

• B01D2257/708

  Volatile organic compounds V.O.C.'s · CPC title

• B01D2258/06

  Polluted air · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B03C3/34

  Constructional details or accessories or operation thereof · CPC title

• B01D53/323 Primary

  by electrostatic effects or by high-voltage electric fields · CPC title