Ultraviolet systems and methods for irradiating a substrate
US-9502149-B2 · Nov 22, 2016 · US
US10039176B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10039176-B2 |
| Application number | US-201415502768-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2014 |
| Priority date | Sep 30, 2014 |
| Publication date | Jul 31, 2018 |
| Grant date | Jul 31, 2018 |
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A discharge lamp lighting device includes: a storage unit that stores information; a lamp drive unit that supplies drive power to the discharge lamp; a voltage detection unit that detects the lamp voltage of the discharge lamp; and a control unit that, on the basis of the voltage detection value supplied from the voltage detection unit, stores in the storage unit error log information that indicates the operating state of the discharge lamp when change of the lamp voltage indicates a predetermined voltage characteristic.
Opening claim text (preview).
The invention claimed is: 1. A discharge lamp lighting device that controls lighting of a discharge lamp, the discharge lamp lighting device comprising: a storage unit that stores information; a lamp drive unit that supplies drive power to said discharge lamp; a voltage detection unit that detects a lamp voltage of said discharge lamp; and a control unit that, on a basis of a voltage detection value that is supplied from said voltage detection unit, stores in said storage unit log information that indicates an operating state of said discharge lamp when a change of said lamp voltage indicates a predetermined voltage characteristic, wherein said control unit acquires the voltage detection value for each detection time interval, compares the acquired voltage detection value with a previously acquired voltage detection value, and stores said log information in said storage unit when said lamp voltage has increased by a predetermined value or higher for a predetermined number of successive time intervals. 2. The discharge lamp lighting device as set forth in claim 1 , wherein said predetermined voltage characteristic is a characteristic that satisfies a condition ΔVL≥(3/10)T, where a time interval in which said detection time interval has continued, said predetermined number of successive time intervals is assumed to be determining time interval T (in units of hours), and an amount of change of said lamp voltage that has changed during said determining time interval T is assumed to be ΔVL (in units of volts), and which is meant that the amount of change of said lamp voltage ΔVL is set to be 3 volts or higher during the determining time interval T of 10 hours. 3. The discharge lamp lighting device as set forth in claim 2 , wherein said log information is information that corresponds to flicker of said discharge lamp when said amount of change ΔVL satisfies a condition ΔVL≥T, which is meant that the amount of change of said lamp voltage ΔVL is set to be at a predetermined voltage level or higher during the determining time interval T, continuously for a first time interval or more. 4. The discharge lamp lighting device as set forth in claim 3 , wherein said first time interval is six hours or more. 5. The discharge lamp lighting device as set forth in claim 2 , wherein said log information is information corresponding to cracking or rupture of said discharge lamp when said amount of change ΔVL satisfies a condition T>ΔVL≥T, which is meant that the amount of change of said lamp voltage ΔVL is set to be 3 volts or higher during the determining time interval T of 10 hours, continuously for a second time interval or more. 6. The discharge lamp lighting device as set forth in claim 5 , wherein said second time interval is 40 hours or more. 7. The discharge lamp lighting device as set forth in claim 1 , wherein said detection time interval is 2 hours, said predetermined value is 2V, said predetermined number of successive time intervals is 3, and said log information is information corresponding to flicker of said discharge lamp. 8. The discharge lamp lighting device as set forth in claim 1 , wherein said detection time interval is 10 hours, said predetermined value is 3V, said predetermined number of successive time intervals is 4, and said log information is information corresponding to cracking or rupture of said discharge lamp. 9. The discharge lamp lighting device as set forth in claim 1 , wherein said control unit: acquires said voltage detection value every two hours and compares said voltage detection value with the previously acquired voltage detection value, and when said lamp voltage has increased by at least 2V for three successive two-hour time intervals, stores in said storage unit log information that includes said voltage detection value that was acquired last and information corresponding to flicker of said discharge lamp; and acquires said voltage detection value every 10 hours and compares said voltage detection value with the previously acquired voltage detection value, and when said lamp voltage has increased by at least 3V for four successive ten-hour time intervals, stores in said storage unit log information that includes said voltage detection value that was acquired last and information corresponding to cracking or rupture of said discharge lamp. 10. The discharge lamp lighting device as set forth in claim 9 , further comprising a two-hour timer that measures two hours, wherein said control unit uses said two-hour timer to acquire said voltage detection value every two hours and to acquire said voltage detection value every ten hours. 11. The discharge lamp lighting device as set forth in claim 1 , further comprising an information output unit that supplies information, wherein, when change of said lamp voltage indicates said predetermined voltage characteristic, said control unit causes information indicating a failure or warning signs of a failure of said discharge lamp to be supplied from said information output unit. 12. The discharge lamp lighting device as set forth in claim 1 , wherein said lamp drive unit generates an alternating current that corresponds to said drive power and supplies the alternating current to said discharge lamp, and wherein, when change of said lamp voltage indicates said predetermined voltage characteristic, said control unit lowers a frequency of said alternating current that is supplied from said lamp drive unit. 13. The discharge lamp lighting device as set forth in claim 12 , further comprising a current detection unit that detects said alternating current, wherein said lamp drive unit comprises: a DC/DC converter that converts an input direct-current voltage to a direct-current voltage of a designated voltage value; and a DC/AC inverter that takes as input the direct-current voltage that is supplied from said DC/DC converter and that generates an alternating current having a designated frequency and supplies said alternating current to said discharge lamp, and wherein said control unit calculates lamp power on the basis of the voltage detection value that is supplied from said voltage detection unit and a current detection value that is supplied from said current detection unit, controls the output voltage of said DC/DC converter such that the lamp power reaches a predetermined power, and when change of said lamp voltage indicates said voltage characteristic, lowers the frequency of said alternating current that is supplied from said DC/AC inverter. 14. The discharge lamp lighting device as set forth in claim 13 , further comprising: a high-frequency generation unit that generates a high-frequency signal; a first low-frequency generation unit that generates a first low-frequency signal having frequency that is lower than said high-frequency signal; a second low-frequency generation unit that generates a second low-frequency signal having frequency that is lower than said first low-frequency signal; and a switching unit that takes as input each of said high-frequency signal, said first low-frequency signal, and said second low-frequency signal and that selectively supplies one of these inputs; wherein said DC/AC inverter generates said alternating current having the frequency of the frequency signal that is supplied from said switching unit, and wherein, at a time of a steady lighting operation, said control unit causes each of the outputs of said first and second low-frequency generation units to be periodically selected in said switching unit in a state in which the output of said high-frequency generation unit is selected, and when change of said lamp voltage in
in which the lamp is fed by DC or by low-frequency AC, e.g. by 50 cycles/sec AC {, or with network frequencies} · CPC title
in which the lamp is fed by high frequency AC {, or with separate oscillator frequency} (H05B41/26 takes precedence) · CPC title
Intensity control of illuminating light (controlled by video signal processing H04N5/74 or H04N9/31) · CPC title
against abnormal lamp operating conditions · CPC title
for protecting the lamp against abnormal operating conditions · CPC title
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