Semiconductor device with high thermal conductivity substrate and process for making the same

Patent metadata

Field	Value
Publication number	US-10037899-B2
Application number	US-201615251590-A
Country	US
Kind code	B2
Filing date	Aug 30, 2016
Priority date	Nov 11, 2015
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

The present disclosure relates to a process of forming a high thermal conductivity substrate for an Aluminum/Gallium/Indium (III)-Nitride semiconductor device. According to an exemplary process, a semiconductor precursor including a substrate structure and a buffer structure is provided. The buffer structure is formed over the substrate structure and has a first buffer surface and a second buffer surface. Herein, the second buffer surface is adjacent to the substrate structure and the first buffer surface is opposite the second buffer surface. Next, a high thermal conductivity substrate with a thermal conductivity greater than 400 W/mK is formed over the first buffer surface. A heat sink carrier is then provided over the high thermal conductivity substrate. The substrate structure is then substantially removed to provide a thermally enhanced precursor for the III-Nitride semiconductor device.

First claim

What is claimed is:

1. A method comprising:
providing a semiconductor precursor comprising a substrate structure, and a buffer structure over the substrate structure, and having a first buffer surface and a second buffer surface, which has a first polarity, wherein the first buffer surface is opposite the second buffer surface and the second buffer surface is adjacent to the substrate structure;
forming a high thermal conductivity substrate over the first buffer surface, wherein the high thermal conductivity substrate has a thermal conductivity greater than 400 W/mK;
providing a heat sink carrier over the high thermal conductivity substrate to form an intermediate structure; and
removing substantially all of the substrate structure to provide a thermally enhanced precursor with an exposed surface, which has the first polarity.

2. The method of claim 1 further comprising flipping the intermediate structure before removing the substrate structure, such that the substrate structure is over the buffer structure and at a top portion of the intermediate structure.

3. The method of claim 1 wherein the buffer structure comprises:
a buffer layer having a first surface and a second surface opposite the first surface of the buffer layer and adjacent to the substrate structure; and
a transition layer having a first surface and a second surface opposite the first surface of the transition layer, wherein the second surface of the transition layer is adjacent to the first surface of the buffer layer, the first surface of the transition layer is the first buffer surface, and the second surface of the buffer layer is the second buffer surface.

4. The method of claim 3 wherein the buffer layer is formed of Gallium Nitride (GaN), and the transition layer is formed of Aluminum Nitride (AlN) or Silicon Nitride (SiN x ).

5. The method of claim 1 wherein the buffer structure comprises a buffer layer having a first surface and a second surface opposite the first surface of the buffer layer, wherein the first surface of the buffer layer is the first buffer surface and the second surface of the buffer layer is the second buffer surface and adjacent to the substrate structure.

6. The method of claim 5 wherein the buffer layer is formed of Gallium Nitride (GaN).

7. The method of claim 1 wherein the first polarity is a group III polarity.

8. The method of claim 7 further comprising forming a channel structure over the exposed surface of the thermally enhanced precursor.

9. The method of claim 8 wherein forming the channel structure comprises:
forming a channel layer over the exposed surface, wherein the channel layer has a first surface adjacent to the exposed surface and a second surface opposite the first surface of the channel layer; and
forming an energy barrier layer over the channel layer, wherein the energy barrier layer has a first surface adjacent to the second surface of the channel layer and a second surface opposite the first surface of the energy barrier layer.

10. The method of claim 9 wherein:
the channel layer is formed of GaN, such that the first surface of the channel layer has a Nitrogen(N)-polarity and the second surface of the channel layer has a group III-polarity; and
the energy barrier layer is formed of Aluminum Gallium Nitride (AlGaN), such that the first surface of the energy barrier layer has an N-polarity and the second surface of the energy barrier layer has a group III-polarity.

11. The method of claim 1 wherein the first polarity is an N-polarity.

12. The method of claim 11 further comprising forming a channel structure over the exposed surface of the thermally enhanced precursor.

13. The method of claim 12 wherein forming the channel structure comprises:
forming a second buffer layer over the exposed surface, wherein the second buffer layer has a first surface adjacent to the exposed surface and a second surface opposite the first surface of the second buffer layer;
forming an energy barrier layer over the second buffer layer, wherein the energy barrier layer has a first surface adjacent to the second surface of the second buffer layer and a second surface opposite the first surface of the energy barrier layer; and
forming a channel layer over the energy barrier layer, wherein the channel layer has a first surface adjacent to the second surface of the energy barrier layer and a second surface opposite the first surface of the channel layer.

14. The method of claim 13 wherein:
the second buffer layer is formed of GaN, such that the first surface of the second buffer layer has a group III-polarity and the second surface of the channel layer has a N-polarity;
the energy barrier layer is formed of AlGaN, such that the first surface of the energy barrier layer has a group III-polarity and the second surface of the energy barrier layer has a N-polarity; and
the channel layer is formed of GaN, such that the first surface of the channel layer has a group III-polarity and the second surface of the channel layer has a N-polarity.

15. The method of claim 1 wherein the high thermal conductivity substrate is formed from diamond.

16. The method of claim 15 wherein forming the high thermal conductivity substrate is provided by a deposition process.

17. The method of claim 1 wherein the heat sink carrier is formed from polycrystalline diamond.

18. The method of claim 17 wherein forming the heat sink carrier is provided by a wafer bonding process or a thick film growth process.

Assignees

• Qorvo Us Inc

Inventors

• Gu Xing
• Xie Jinqiao
• Beam Iii Edward A
• Lee Cathy

Classifications

• H10W40/259

  Ceramics or glasses (H10W40/254, H10W40/257, H10W40/255, H10W40/251, H10W40/253 take precedence) · CPC title

• H10W40/22

  characterised by their shape, e.g. having conical or cylindrical projections · CPC title

• H10W40/255

  having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates · CPC title

• H10W40/254 Primary

  Diamond · CPC title

• H10W40/037 Primary

  Assembling together parts thereof · CPC title