Nanostructured lanthanum oxide humidity sensor

Patent metadata

Field	Value
Publication number	US-10036717-B2
Application number	US-201515540235-A
Country	US
Kind code	B2
Filing date	Dec 28, 2015
Priority date	Dec 29, 2014
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

A thin film gas sensor device includes a substrate, a nanostructured thin film layer, and a first and a second electrode. The nanostructured thin film layer is supported by the substrate and is formed with a semi-conductor material including holes. The semiconductor material is configured to undergo an increase in a density of the holes in the presence of a target gas, thereby decreasing an electrical resistance of the nanostructured thin film layer. The first and the second electrodes are supported by the substrate and are operably connected to the nanostructured thin film layer, such that the decrease in electrical resistance can be detected.

First claim

What is claimed is:

1. A thin film gas sensor device comprising:
a substrate;
a heater layer above the substrate;
a non-suitable seed layer above the heater layer and supported by the substrate,
a nanostructured thin film layer formed directly on the non-suitable seed layer using atomic layer deposition (ALD) and formed with a semi-conductor material including holes, wherein the semiconductor material is configured to undergo an increase in a density of the holes in the presence of a target gas thereby decreasing an electrical resistance of the nanostructured thin film layer; and
a first and a second electrode supported by the substrate and operably connected to the nanostructured thin film layer such that the decrease in electrical resistance can be detected.

2. The thin film gas sensor device of claim 1 , wherein:
the nanostructured thin film layer is configured to undergo the decrease in the electrical resistance during a time constant, and
the time constant is less than one second.

3. The thin film gas sensor device of claim 1 , wherein the nanostructured thin film layer is non-organic and does not include polyimide or other polymers.

4. The thin film gas sensor device of claim 1 , wherein the nanostructured thin film layer is formed from lanthanum oxide and the target gas is water vapor.

5. The thin film gas sensor device of claim 1 , wherein:
the nanostructured thin film layer defines a plurality of grain boundaries formed by spaced-apart nucleation on the non-suitable seed layer, and
air spaces are defined between at least some grains of the plurality of grains.

6. A method of fabricating a thin film gas sensor device comprising:
providing a substrate;
forming a heater layer above the substrate;
forming a non-suitable seed layer above the heater layer;
supporting a first electrode with the substrate;
supporting a second electrode with the substrate;
forming a nanostructured thin film layer using atomic layer deposition (ALD) directly on the non-suitable seed layer using a semi-conductor material including holes, wherein the semiconductor material is configured to undergo an increase in a density of the holes in the presence of a target gas thereby decreasing an electrical resistance of the nanostructured thin film layer; and
operably connecting a first and a second electrode to the nanostructured thin film layer such that the decrease in electrical resistance can be detected.

7. The method of claim 6 , further comprising:
forming the nanostructured thin film layer from lanthanum oxide, such that the decrease in electrical resistance occurs in response to the target gas including water vapor.

8. The method of claim 6 , further comprising:
forming the nanostructured thin film layer so as to cause the nanostructured thin film layer to undergo the decrease in electrical resistance during a time constant of less than one second.

9. The method of claim 6 , further comprising:
forming the nanostructured thin film layer with non-organic material and without polyimide or other polymers.

10. The method of claim 6 , further comprising:
forming the first electrode and the second electrode directly on the non-suitable seed layer.

11. The method of claim 6 , wherein forming the nanostructured thin film layer further comprises:
forming a plurality of grains of the nanostructured thin film layer by spaced-apart nucleation of the semiconductor material of the nanostructured thin film layer on the non-suitable seed layer.

12. The method of claim 11 , further comprising:
structuring the non-suitable seed layer to encourage the spaced-apart nucleation of the plurality of grains of the sensing layer.

13. The method of claim 12 , wherein structuring the non-suitable seed layer comprises:
ion-milling or chemically activating the non-suitable seed layer.

Assignees

• Bosch Gmbh Robert

Inventors

• Samarao Ashwin K
• O'Brien Gary
• Feyh Ando

Classifications

• G01N27/127

  comprising nanoparticles · CPC title

• G01N27/121 Primary

  for determining moisture content, e.g. humidity, of the fluid (moisture content of the tested material G01N27/048) · CPC title

• G01N27/07

  Construction of measuring vessels; Electrodes therefor · CPC title

• G01N27/14

  of an electrically-heated body in dependence upon change of temperature · CPC title

• C01F17/0043

  Chemistry & Metallurgy · mapped topic