Dielectric, capacitor, electrical circuit, circuit board, and apparatus
US-2024047137-A1 · Feb 8, 2024 · US
Dielectric film and electronic component
US10035711B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10035711-B2 |
| Application number | US-201715459306-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2017 |
| Priority date | Mar 22, 2016 |
| Publication date | Jul 31, 2018 |
| Grant date | Jul 31, 2018 |
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- Title
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Abstract
Official abstract text for this publication.
A dielectric film containing an alkaline earth metal oxide having a NaCl type crystal structure as a main component, wherein the dielectric film has a (111)-oriented columnar structure in a direction perpendicular to the surface of the dielectric film, and in a Cu—Kα X-ray diffraction chart of the dielectric film, a half width of the diffraction peak of (111) is in a range of from 0.3° to 2.0°.
First claim
Opening claim text (preview).
What is claimed is: 1. A dielectric film, comprising an alkaline earth metal oxide having a NaCl type crystal structure as a main component, wherein the dielectric film has a (111)-oriented columnar structure in a direction perpendicular to the surface of the dielectric film, and in a Cu—Kα X-ray diffraction chart of the dielectric film, a half width of the diffraction peak of (111) is in a range of from 0.5° to 2.0°. 2. The dielectric film according to claim 1 , wherein the dielectric film contains at least one element selected from the group consisting of Ta, Nb, V, Hf, Zr, Ti and Zn as a subcomponent. 3. The dielectric film according to claim 2 , wherein when the total content of the subcomponents is set as x, the x is in the range of 0 mol %<x≤20 mol % relative to the main component. 4. An electronic component comprising the dielectric film according to claim 1 . 5. An electronic component comprising the dielectric film according to claim 2 . 6. An electronic component comprising the dielectric film according to claim 3 .
Assignees
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Classifications
the material containing two or more metal elements · CPC title
characterised by the metal · CPC title
using physical ablation of a target, e.g. physical vapour deposition or pulsed laser deposition · CPC title
Cubic symmetry, e.g. beta-SiC · CPC title
- H01G4/10Primary
Metal-oxide dielectrics {(H01G4/085 takes precedence)} · CPC title
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- What does patent US10035711B2 cover?
- A dielectric film containing an alkaline earth metal oxide having a NaCl type crystal structure as a main component, wherein the dielectric film has a (111)-oriented columnar structure in a direction perpendicular to the surface of the dielectric film, and in a Cu—Kα X-ray diffraction chart of the dielectric film, a half width of the diffraction peak of (111) is in a range of from 0.3° to 2.0°.
- Who is the assignee on this patent?
- Tdk Corp
- What technology area does this patent fall under?
- Primary CPC classification H01G4/10. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jul 31 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).