Plasma-based light source

Patent metadata

Field	Value
Publication number	US-10034362-B2
Application number	US-201514838594-A
Country	US
Kind code	B2
Filing date	Aug 28, 2015
Priority date	Dec 16, 2014
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high energy ions, neutrals, micro-particles, and contaminants. Particular embodiments include arrangements for reducing the adverse effects of plasma generated ions and neutrals on light source components while simultaneously reducing in-band light attenuation due to target material gas and vapor.

First claim

What is claimed is:

1. A device comprising:
a plasma generating system configured to generate plasma from a target material at a plasma site on a cylindrically-symmetric rotatable element within a chamber;
a component disposed at a selected distance from the plasma site, wherein the component is configured to collect radiation emitted by the plasma and focus the radiation along an optical pathway to an intermediate focus location to form a light cone;
a conical flow guide positioned below the cylindrically-symmetric rotatable element;
a set of gas outlets configured to establish a directional flow of buffer gas forming a gas flow between the plasma and the component, the directional flow of buffer gas establishing an average gas pressure between the component and the plasma sufficient to reduce ion energy below 100 eV before the ions reach the component, wherein the conical flow guide is positioned at least partially coextensive with the light cone formed between the component and the intermediate focus, wherein flow of buffer gas within the conical flow guide displaces target material out of the light cone; and
at least one pump configured to remove gas from the chamber, the pump and outlet configured to reduce target material gas concentration along the optical pathway from the plasma to the intermediate focus.

2. A device as recited in claim 1 wherein the component is a near normal incidence mirror reflecting EUV radiation from the plasma site to the intermediate focus.

3. A device as recited in claim 1 wherein the device further comprises a flow directing structure to direct flow from the at least one outlet.

4. A device as recited in claim 3 wherein the component is a near normal incidence mirror and the flow directing structure comprises at least one vane positioned between the near normal incidence mirror and the plasma site to direct flow from the at least one outlet.

5. A device as recited in claim 3 wherein the flow directing structure comprises a tubular flow guide.

6. A device as recited in claim 1 wherein the radiation includes EUV radiation and the buffer gas has a higher EUV transmission than the target material gas.

7. A device as recited in claim 1 wherein the buffer gas is selected from the group of buffer gases consisting of Hydrogen, Helium, Argon, Nitrogen and combinations thereof.

8. A device as recited in claim 1 wherein the system is a laser produced plasma system having a drive laser irradiating target material coated on a surface of the cylindrically-symmetric rotatable element.

9. A device as recited in claim 1 wherein the system is a laser produced plasma system having a drive laser irradiating target material coated on a surface of a rotatable, cylindrically-symmetric element.

10. A device as recited in claim 1 wherein at least one outlet cooperates with at least one pump to produce a transversely directed flow between the component and the plasma site to push target material gas out of the optical pathway.

11. A device as recited in claim 1 wherein the device further comprises a flow guide at the intermediate focus and wherein at least one outlet directs buffer gas into the flow guide to reduce the concentration of target material gas along the optical pathway.

12. A device as recited in claim 1 wherein the radiation includes EUV radiation having a wavelength of 13.5 nm.

13. A device as recited in claim 1 further comprising a partition in the chamber to establish a preselected gas flow pattern in the chamber.

14. A device comprising:
a plasma generating system configured to generate plasma from a target material at a plasma site on a cylindrically-symmetric rotatable element within a chamber;
a component disposed at a selected distance from the plasma site, wherein the component is configured to collect radiation emitted by the plasma and focus the radiation along an optical pathway to an intermediate focus location to form a light cone;
a conical flow guide positioned below the cylindrically-symmetric rotatable element;
at least one outlet configured to introduce a buffer gas into the chamber and establish a directional flow of buffer gas forming a gas flow, wherein the conical flow guide is at least partially coextensive with the light cone formed between the component and the intermediate focus, wherein flow of buffer gas within the conical flow guide displaces target material out of the light cone; and
at least one pump assembly configured to remove gas from the chamber, the pump assembly having a pump, a conductance control plate positioned upstream of the pump, the pump assembly cooperating with the at least one outlet to establish a flowing gas between the plasma and the component having an average gas pressure between the component and the plasma sufficient to reduce ion energy below 100 eV before the ions reach the component.

15. A device as recited in claim 14 wherein the at least one pump assembly cooperates with the outlet to establish a flowing gas between the plasma and the component having an average gas pressure sufficient to reduce ion energy below 30 eV before the ions reach the component.

16. A device as recited in claim 14 wherein the system produces radiation traveling along an optical pathway toward an intermediate focus, and produces target material gas and ions exiting the plasma and wherein the at least one outlet is configured to receive buffer gas flowing from a fluidically coupled gas source and cooperate with the at least one pump removing gas from the chamber to reduce target material gas concentration along the pathway from the plasma to the intermediate focus.

17. A device as recited in claim 14 wherein the pump has a pump inlet and the conductance control plate operates to establish an inlet pressure at the pump inlet.

18. A device as recited in claim 14 further comprising a baffle positioned between the conductance control plate and the pump to reduce gas jet formation by the conductance control plate.

19. A device as recited in claim 14 further comprising a pump inlet extension positioned between the conductance control plate and the pump to prevent a gas jet formed by the conductance control plate from disrupting the pump.

20. A device as recited in claim 14 wherein the conductance control plate is formed with an aperture.

21. A device as recited in claim 20 further comprising a mechanism for adjusting the size of the aperture.

22. A device as recited in claim 14 wherein the conductance control plate is spaced from a line inlet to establish a gap there between.

23. A device as recited in claim 22 further comprising a mechanism for moving the conductance control plate relative to the line inlet to adjust the size of the gap.

24. A device as recited in claim 14 wherein the radiation includes EUV radiation having a wavelength of 13.5 nm.

25. A device comprising:
a cylindrically-symmetric element rotatable about an axis and having a surface coated with a band of plasma-forming target material, the band extending from a first edge to a second edge and establishing an operational region of plasma-forming target material;
a housing overlying the surface of the cylindrically-symmetric element, wherein the housing substantially conforms to the surface of the cylindrically-symmetric element, wherein the housing includes an opening to allow for exposure of the plasma-forming target material with radiation from a drive laser to produce plasma,

Assignees

• Kla Tencor Corp

Inventors

• Kuritsyn Alexey
• Bykanov Alexander
• Kanouff Michael
• Khodykin Oleg

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/70033

  by plasma extreme ultraviolet [EUV] sources · CPC title

• H05G2/008

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/003 Primary

  the plasma being generated from a material in a liquid or gas state · CPC title

• H05G2/0086

  Optical arrangements for conveying the laser beam to the plasma generation location · CPC title