Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
US10034101B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10034101-B2 |
| Application number | US-201715416084-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 26, 2017 |
| Priority date | Oct 25, 2016 |
| Publication date | Jul 24, 2018 |
| Grant date | Jul 24, 2018 |
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A microphone includes a conducting vibrating diaphragm; a back plate opposed to the vibrating diaphragm and including a plurality of through holes; a first electrode formed in a middle of the back plate; a second electrode formed at an edge of the back plate; and a support portion located between the first electrode and the second electrode for supporting the vibrating diaphragm when the vibrating diaphragm is electrified. When the sound pressure is applied in the middle of the vibrating diaphragm and drives the vibrating diaphragm to deform, the middle of the vibrating diaphragm moves relative to the first electrode, and the edge of the vibrating diaphragm moves relative to the second electrode, at this time, the first electrode and the second electrode generate reversed electric signals.
Opening claim text (preview).
What is claimed is: 1. A microphone, comprising: a conducting vibrating diaphragm; a back plate opposed to the vibrating diaphragm and including a plurality of through holes; a first electrode formed in a middle of the back plate; a second electrode formed at an edge of the back plate; a support portion located in an insulation gap formed between the vibrating diaphragm and the back plate, the support portion being located between the first electrode and the second electrode for supporting the vibrating diaphragm when the vibrating diaphragm is electrified; when the vibrating diaphragm is electrified, the vibrating diaphragm absorbed by an electrostatic force and supported by the support portion, the vibrating diaphragm parallel to the back plate; when the sound pressure is applied in the middle of the vibrating diaphragm and drives the vibrating diaphragm to the deformed, the middle of the vibrating diaphragm moving along a direction relative to the first electrode, and the edge of the vibrating diaphragm moving along an opposite direction relative to the second electrode, the first electrode and the second electrode generating reversed signals. 2. The microphone as described in claim 1 , wherein the support portion is a continuously closed ring structure, or includes separated columns. 3. The microphone as described in claim 1 , wherein the vibrating diaphragm is made from conducting material. 4. The microphone as described in claim 1 , wherein the vibrating diaphragm includes conducting glue formed on a surface of the diaphragm facing the back plate. 5. The microphone as described in claim 1 , wherein the first electrode includes a plurality of opening formed therethrough.
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